semi合集-English.pdf - 第5605页

SEMI P10-0705 © SEMI 1990, 2005 100 < x s : a t t r i b u t e n a m e = " p 1 0 M u l t i V a l u e " t y p e = " x s : i n t e g e r " u s e = " r e q u i r e d " f i x e d = " 2 &q…

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SEMI P10-0705 © SEMI 1990, 2005 99
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Regist rMea su re m e nt s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndRe gist rMea su re m e nt s" / >
< / xs: com plexType>
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< xs: elem ent nam e= "Mea sure dRegist r M ark I d"
type
= " xs:st r ing" / >
< xs: elem ent nam e= "VendorRe gist r a t ionM a rkI d"
type
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- < xs: elem ent nam e= "MaskRegist r M ark Loca t ion" >
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type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
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- < xs: elem ent nam e= "Mea sure dRe gist r M ark Locat ion" >
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fixed
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< / xs: ext ension>
< / xs: com plexCont ent>
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fixed
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< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
- < xs: elem ent nam e= "Mea sure dRe gist r M ark Re sidual" >
- < xs: com plexType>
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SEMI P10-0705 © SEMI 1990, 2005 100
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt Mea su re dRe gist rM a rk " / >
< xs: at t ribut e
nam e= " p1 0 End" type= " xs:st rin g" use= " required"
fixed
= "EndMea sur edRegist r M a rk " / >
< / xs: com plexType>
- < xs: com plexType nam e= "Closur eMea su rem ent sType " >
- < xs: sequence>
< xs: elem ent nam e= "Regist rClosureEquipReqd"
type
= " xs:st r ing" m inOccurs= " 0 " m axOccurs= "unbounded"
/ >
< xs: elem ent nam e= "EquipSit e Reqd" type= "x s:st ring"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "Regist rClosureEquipUse d"
type
= " xs:st r ing" m inOccurs= "
0 " / >
< xs: elem ent nam e= "EquipSit e Use d" type= "xs:st r in g"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rClosu re" t ype= "x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Regist rClosureRe fe re nceOnly"
type
= " x s:boolean" m inOccurs= "0 " / >
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- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " x s:in t e ger
" use= "r equir ed"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
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- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
SEMI P10-0705 © SEMI 1990, 2005 101
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Mea sur edClosure Loca t ion"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use
= "r e quir ed"
fixed
= "St a rt ClosureM e asur em ent s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndClosur e M ea su re m e nt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "CdGroupMe a sure m e nt sType">
- < xs: sequence>
< xs: elem ent nam e= "CdQua lityI d" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdToneClea r" t ype= "xs:boolea n"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdM orph ogra ph y" t ype= "
xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdPerce nt Clea r " t ype= "x s:double"
m inOccurs
= " 0 " / >
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= " 0 " >
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< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "CdTa rge t " t ype= " xs:dou ble"
m inOccurs
= " 0 " / >
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< xs: enum erat ion value= "VERTI CAL" / >
< xs: enum erat ion value= "H ORI ZON TAL" / >
< / xs: restrict ion>
< / xs: sim pleType>
< / xs: elem ent>
< xs: elem ent nam e= "CdPit ch" type= "
xs:dou ble"
m inOccurs= " 0 " / >