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SEMI D17-0200 © SEMI 1998, 2000 11 ± ± ± ± ± ± ± Figure 5 Cassette Physical Alignm ent Interface – Type A Coupling Pin S hape
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Figure 4
Cassette Vertical Dimensions
SEMI D17-0200 © SEMI 1998, 200011
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Figure 5
Cassette Physical Alignment Interface – Type A
Coupling Pin Shape
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Figure 6
Cassette Physical Alignment Interface – Type B
Roller Position