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SEMI E54.16-0705 © SEMI 2005 2 NOTICE : This standard specification does not purpor t to address safety issue s, if any, associated with its use. It is the responsibility of the users of this standard specification to es…

SEMI E54.16-0705 © SEMI 2005 1

SEMI E54.16-0705

SPECIFICATION FOR SENSOR/ACTUATOR NETWORK

COMMUNICATIONS FOR LONWORKS

This standard was technically approved by the global Information & Control Committee. This edition was

approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was available

at www.semi.org in June 2005 and on CD-ROM in July 2005.

NOTICE: This document replaced SEMI E54.6 in 2005.

1 Purpose

1.1 This standard specification defines a communication specification based on the ANSI/EIA/CEA-709.1 Control

Networking Protocol (LONWORKS) to enable communications between intelligent devices on a sensor/actuator

network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on

semiconductor manufacturing equipment.

1.2 This document specifies a mapping of the SEMI Common Device Model (CDM) onto LONWORKS technology

using the LONMARK Interoperability Guidelines established for LONWORKS devices. The LONMARK International

Association will review and approve the enhanced SEMI LONMARK functional profiles presented in this network

communication document and incorporate the required SEMI profiles into the LONMARK Interoperability

Guidelines.

1.3 Background and Motivation — The LONWORKS communications system provides interconnection of smart

control devices such as sensors, actuators, and controllers in a fast-response time, low-cost network for industrial

use. LONWORKS enables multiple devices to share a single network, thereby significantly reducing the point-to-point

wiring between controllers, sensors, and actuators. The LONWORKS network communications standard (NCS) is

based on the seven-layer ANSI/EIA/CEA-709.1 (LONWORKS) protocol, implemented by the Neuron Chip, a

physical layer transceiver, and an optional host processor. The ANSI/EIA/CEA-709.1 (LONWORKS) control

networking protocol was developed by Echelon and may be freely licensed for implementation on any hardware

platform. The SEMI NCS for LONWORKS is based on the LONMARK interoperability guidelines, which provide a

framework for interoperable use of the ANSI/EIA/CEA-709.1 (LONWORKS) protocol at layers 1-6, as well as at the

application layer. Where the LONMARK interoperability guidelines do not provide the functionality required by the

SEMI Common Device Model (CDM) and the SEMI Specific Device models (SDM), the guidelines are extended

with SEMI-specific enhanced profile requirements.

2 Scope

2.1 This document specifies a SAN communications specification standard, based on the ANSI/EIA/CEA-709.1

Control Networking Protocol (LONWORKS) specification, that enables communication with SAN devices configured

according to the SEMI SAN Common Device Model and appropriate SEMI SAN Specific Device Model (SDM)

specifications.

2.2 This document specifies the use of LONWORKS technology for services that compliant intelligent devices must

support in order to exchange information over this semiconductor equipment sensor/actuator network.

2.3 This document specifies the utilization of LONWORKS technology to present externally visible device structure

and behavior, specified in the CDM and appropriate SDMs, on a LONWORKS network.

2.4 This document is used in conjunction with the SEMI SAN Common Device Model specification and one or

more SEMI SAN Specific Device Model specifications (e.g., for a mass flow controller). Together, the model

documents describe the externally visible data structures and behavior of devices using LONWORKS technology in a

SEMI-compliant SAN system.

2.5 This specification, together with the sensor/actuator network common device model, one or more sensor/

actuator network specific device model documents, the ANSI/EIA/CEA-709.1 (LONWORKS) protocol specification,

and the LONMARK interoperability guidelines, specifies requirements for SEMI SAN implementations based on

LONWORKS technology.

SEMI E54.16-0705 © SEMI 2005 2

NOTICE: This standard specification does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard specification to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use.

3 Limitations

3.1 This document specifies a semiconductor equipment SAN based solely on LONWORKS technology and is a

companion document to the ANSI/EIA/CEA-709.1 (LONWORKS) control networking protocol specification; thus, a

complete specification of this standard necessarily includes the LONWORKS specifications. There are other

semiconductor equipment SAN communications options. The specifications for these options are not included here.

3.2 This document specifies enhancements that provide additional capabilities over and above those currently

required by the LONMARK Interoperability Guidelines. In order to avoid document consistency problems,

information in the LONWORKS technology specifications that relate to this standard is not repeated in this document.

This document is limited to describing enhancements or limitations of LONWORKS technology and the LONMARK

interoperability guidelines that are imposed by this specification.

3.3 A complete specification of the conformance testing procedure shall include the applicable LONMARK

interoperability conformance testing specification. Conformance testing shall include enhancements to the

LONMARK interoperability guidelines required by this standard specification.

4 Referenced Standards and Documents

4.1 It must be noted that unless otherwise indicated, all documents cited below shall be the latest published

versions.

4.2 SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54 – Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E54.3 – Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

SEMI E54.10 – Specification for Sensor/Actuator Network Specific Device Model for An In-Situ Particle Monitor

Device

SEMI E54.11 – Specification for Sensor/Actuator Specific Device Model for An Endpoint Device

4.3 ISO Standard

ISO 7498 — Basic Reference Model for Open Systems Interconnection

ISO/CEN EN14908 Specification for Control Networking Protocol

ANSI/EIA/CEA-709.1 (LONWORKS) Control Networking Protocol Specification, Rev B-2000

4.4 Other Documents

LONMARK Layers 1–6 Interoperability Guidelines, LONMARK International.

LONMARK Application Layer Interoperability Guidelines, LONMARK International.

Neuron Chip Data Book, Toshiba and Cypress Corporation.

Smart Transceiver Data Book, Echelon Corporation.

Neuron C Programmer’s Guide, Revision 2, Echelon Corporation

Neuron C Reference Guide, Revision 2, Echelon Corporation

Standard Device Resource Report, http://types.lonmark.org, LONMARK International.

1 International Organization for Standardization, 1 rue de Varembe, Case postale 56, CH-1211, Geneva 20, Switzerland

Standard Program ID Definitions, http://types.lonmark.org/spid, LONMARK International.

SCPT Master List and Programmer’s Guide, http:// types.lonmark.org/scpt, LONMARK International.

SNVT Master List and Programmer’s Guide, http:// types.lonmark.org/snvt, LONMARK International.

5 Terminology

5.1 Terminology that is common to all of the documents in this SAN series may also be defined in the Sensor

Actuator Network Standard (see reference SEMI E54 §4.1). Terminology may be reproduced here which is defined

in other SEMI documents.

5.2 Abbreviations and Acronyms

5.2.1 APDU – Application Protocol Device Unit

5.2.2 CDM — Common Device Model

5.2.3 CP — Configuration Parameter

5.2.4 DM — Device Manager

5.2.5 DS — Device Status

5.2.6 NCS — Network Communications Standard

5.2.7 Neuron — Neuron Chip is the 8 bit hardware implementation of the ANSI/EIA/CEA-709.1 (L

ONWORKS)

Control Networking Protocol

5.2.8 NV — Network Variable

5.2.9 NVI — Network Variable Input

5.2.10 NVO — Network Variable Output

5.2.11 OSI — Open Systems Interconnect

5.2.12 OSS — Object Services Standard

5.2.13 RO — Read Only

5.2.14 RW — Read/Write

5.2.15 SAC — Sensor, Actuator, Controller (object)

5.2.16 SAN — Sensor/Actuator Network

5.2.17 SCPT — Standard Configuration Parameter Type

5.2.18 SDM — Specific Device Model

5.2.19 SNVT — Standard Network Variable Type

5.2.20 SPID — Standard Program ID

5.3 Device Component Definitions — As this standard defines the presentation or mapping of CDM data structure

and behavior over a network, it makes use of many of the terms in the SEMI E54.1 - CDM document. Table 1

provides a mapping of fundamental terminology of the CDM document into this document and the L

ONWORKS

definitions. The symbol “=” indicates that the definition is used exactly as specified on the CDM specification.

5.4 In the following sections, additional clarification of some of these terms is provided in the context of the

ANSI/EIA/CEA-709.1 (LONWORKS) protocol.