semi合集-English.pdf - 第5962页
SEMI P41-0304 E © SEMI 2004 22 <EvaluationMethod>optical im age simulation</EvaluationMethod> <DirectionInformation> <ReferenceMark>bottom center ID</ReferenceMark> < M a s k R o t a t i …
SEMI P41-0304
E
© SEMI 2004 21
<ToolOffset_Y>0</ToolOffset_Y>
</ToolOffset>
</MaskOriginPointInformation>
<ToolStageAccuracy unit = "Millmetor">10</ToolStageAccuracy>
</ToolCoordinateInformation>
</RepairTool>
<RepairMethod>FIB</RepairMethod>
<DirectionInformation>
<ReferenceMark>BottomCenterID</ReferenceMark>
<MaskRotation>0</MaskRotation>
<MaskMirror>none</MaskMirror>
<MaskFlip>Film Side Up</MaskFlip>
</DirectionInformation>
<NumberRepairProcessing>
<TotalRepairProcess>1</TotalRepairProcess>
<ClassifyPrepairProcess defect_type = "spot">1</ClassifyPrepairProcess>
</NumberRepairProcessing>
<RepairOperator>SEMI-J</RepairOperator>
<RepairJudgment>OK</RepairJudgment>
</RepairSummary>
<EvaluationSummary beginning_date = "19:00:00 03-sep-2003" ending_date = "20:00:00 03-sep-2003">
<EvaluationTool tool_name = "REVIEW000" tool_no = "003">
<ToolCoordinateInformation>
<CoordinateSystem>center_0</CoordinateSystem>
<ToolOriginPointInformation>
<ToolOriginPoint>StageCenter</ToolOriginPoint>
<ToolOriginPosition unit = "millimetor">
<ToolOriginPosition_X>0</ToolOriginPosition_X>
<ToolOriginPosition_Y>0</ToolOriginPosition_Y>
</ToolOriginPosition>
</ToolOriginPointInformation>
<ToolStageCorrectionInformation>
<ToolStageCorrection unit = "ppm">
<ToolStageCorrection_X>193</ToolStageCorrection_X>
<ToolStageCorrection_Y>193</ToolStageCorrection_Y>
</ToolStageCorrection>
<ToolStageSkew unit = "micron">
<ToolStageSkewCorrection>10</ToolStageSkewCorrection>
</ToolStageSkew>
</ToolStageCorrectionInformation>
<MaskOriginPointInformation>
<MaskOriginPoint>center</MaskOriginPoint>
<MaskOriginPosition unit = "millimetor">
<MaskOriginPosition_X>0</MaskOriginPosition_X>
<MaskOriginPosition_Y>0</MaskOriginPosition_Y>
</MaskOriginPosition>
<ToolOffset unit = "millimetor">
<ToolOffset_X>1.5</ToolOffset_X>
<ToolOffset_Y>-2.0</ToolOffset_Y>
</ToolOffset>
</MaskOriginPointInformation>
<ToolStageAccuracy unit = "micron">20</ToolStageAccuracy>
</ToolCoordinateInformation>
</EvaluationTool>
SEMI P41-0304
E
© SEMI 2004 22
<EvaluationMethod>optical image simulation</EvaluationMethod>
<DirectionInformation>
<ReferenceMark>bottom center ID</ReferenceMark>
<MaskRotation>0</MaskRotation>
<MaskMirror>none</MaskMirror>
<MaskFlip>Film side up</MaskFlip>
</DirectionInformation>
<NumberEvaluationProcessing>
<TotalEvaluationProcess>1</TotalEvaluationProcess>
<ClassifyEvaluationProcess defect_type = "pinhole">1</ClassifyEvaluationProcess>
</NumberEvaluationProcessing>
<EvaluationOperator>SEMI-J</EvaluationOperator>
<EvaluationJudgment>OK</EvaluationJudgment>
</EvaluationSummary>
</Summary>
<Defect defect_type = "spot" date_stamp = "16:30:00 03-sep-2003">
<DefectInformation origin = "MaskOrigin">
<DefectPosition unit = "micron">
<DefectPosition_X>66200</DefectPosition_X>
<DefectPosition_Y>76200</DefectPosition_Y>
</DefectPosition>
<DefectSize unit = "micron">
<DefectSize_X>1</DefectSize_X>
<DefectSize_Y>1</DefectSize_Y>
</DefectSize>
<DefectJudgment>repair</DefectJudgment>
<ImageData>
<ImageReferenceAdress>C:\image\defect\defect1.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>10000</ImageMagnification>
<ImagePixelNumber_X>1024</ImagePixelNumber_X>
<ImagePixelNumber_Y>1024</ImagePixelNumber_Y>
<ImagePixelSize unit = "micron">
<ImagePixelSize_X>0.1</ImagePixelSize_X>
<ImagePixelSize_Y>0.1</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>256</ImageGrayLevel>
</ImageInformation>
<ImageIllumination>referect</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>128/256</ImageContrast>
<ImageBrightness>128/256</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "InspectionStartPoint">
<ImageReferencePoint>TopLeft</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>39448.8</ImageReferencePosition_X>
<ImageReferencePosition_Y>49448.8</ImageReferencePosition_Y>
</ImageReferencePosition>
SEMI P41-0304
E
© SEMI 2004 23
</ImageReference>
<ImageTarget origin = "LeftTop">
<ImageTargetPosition unit = "pixel">
<ImageTargetPosition_X>512</ImageTargetPosition_X>
<ImageTargetPosition_Y>512</ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</DefectInformation>
<DefectRepair date_stamp = "18:20:00 03-sep-2003">
<RepairRecipe recipe_name = "recipe1">
<RepairCondition>parameter1-000 parameter2-000 </RepairCondition>
</RepairRecipe>
<RepairResult>OK</RepairResult>
<ImageData>
<ImageReferenceAdress>D:\repair\image\image000.bmp</ImageReferenceAdress>
<ImageInformation>
<ImageFormat>bitmap</ImageFormat>
<ImageMagnification>50000</ImageMagnification>
<ImagePixelNumber_X>512</ImagePixelNumber_X>
<ImagePixelNumber_Y>512</ImagePixelNumber_Y>
<ImagePixelSize unit = "nanometor">
<ImagePixelSize_X>10</ImagePixelSize_X>
<ImagePixelSize_Y>10</ImagePixelSize_Y>
</ImagePixelSize>
<ImageGrayLevel>128</ImageGrayLevel>
</ImageInformation>
<ImageIllumination>secondary electron</ImageIllumination>
<ImageRotation>none</ImageRotation>
<ImageMirror>none</ImageMirror>
<ImageFlip>none</ImageFlip>
<ImageConvertInformation>
<ImageContrast>60/128</ImageContrast>
<ImageBrightness>80/128</ImageBrightness>
<ImageConversionParameter>raw data</ImageConversionParameter>
</ImageConvertInformation>
<ImageReference origin = "mask origin">
<ImageReferencePoint>center</ImageReferencePoint>
<ImageReferencePosition unit = "micron">
<ImageReferencePosition_X>66200</ImageReferencePosition_X>
<ImageReferencePosition_Y>76200</ImageReferencePosition_Y>
</ImageReferencePosition>
</ImageReference>
<ImageTarget origin = "LeftTop">
<ImageTargetPosition unit = "pixel">
<ImageTargetPosition_X>256</ImageTargetPosition_X>
<ImageTargetPosition_Y>256</ImageTargetPosition_Y>
</ImageTargetPosition>
<ExpressionMark>square box</ExpressionMark>
</ImageTarget>
</ImageData>
</DefectRepair>
<DefectEvaluate date_stamp = "">