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SEMI ME1392-0305 © SEMI 2003, 2005 18 FILE_NAME name/number/id of this data file MEAS_DATE date the measur ement was made, mm-dd-yyyy MEAS_TIME time the meas urement finished, hh:mm:ss, 24 h format MODE indicates whether…

SEMI ME1392-0305 © SEMI 2003, 2005 17

APERTURE text field that describes the type of receiver aperture (circular, slit, bow tie, other)

NORM normalization method — absolute (A), relative BRDF (R), relative specular reflectance (S),

relative total reflectance (T)

FILE_REF name/number/id of the file that contains the reference sample information for the instrument

and this measurement

FILE_SIG name/number/id of the file that contains the signature information for the instrument and this

measurement

NEBRDF noise equivalent BRDF of the instrument

ERROR error levels expected in the BRDF measurement

SYSTEM_COMMENTS comments that pertain to the system, for example, the type of normalization used

SAMPLE INFORMATION

SAMPLE_NAME name or id number of the sample

SAMPLE_TYPE type of sample such as mirror, lens, window, grating, baffle substrate, paper

SAMPLE_VEND name of the sample vendor

SAMPLE_ADD street address of the sample vendor

SAMPLE_CITY city of the sample vendor

SAMPLE_STATE state of the sample vendor

SAMPLE_ZIP zip code of the sample vendor

SAMPLE_PHONE phone number of the sample vendor

SAMPLE_CONTACT name of a contact person for the sample

SAMPLE_KW key words describing the sample such as silver, black, diffuse, grating, specular, one-

dimensional, two-dimensional, color

MANUF_KW key words describing the manufacturing process of the sample such as molded, polished,

ground, diamond-turned, crystal

TREAT_KW key words describing the treatment process of the sample such as cleaned, radiated, e-beam,

dust, contaminated

SHAPE_KW key words describing the shape of the sample such as flat, square, circular, spherical,

hemisphere, ellipse, irregular

FS_AREA surface area of the front surface of the sample

SIZE_DIM diameter or the sample

SIZE_X size of the sample at the sample center from edge to edge in the x dimension

SIZE_Y size of the sample at the sample center from edge to edge in the y dimension

SIZE_Z thickness of the sample at the sample center

SUB_MAT sample substrate material

SUB_N substrate index of refraction, n

SUB_K substrate extinction coefficient, k

FS_FINISH_KW key words describing sample front surface finish such as coated, superpolish, hardened,

ground, irradiated, smooth, rough

BS_FINISH_KW key words describing the sample back surface finish

FS_CURV the inverse of the radius of curvature of the sample front surface, convex is positive, concave

is negative

BS_CURV the inverse of the radius of curvature of the sample back surface

FS_COAT description of the coating on the front surface

FS_SPEC_REFL specular reflectance of the sample front surface

FS_SPEC_TRAN specular transmittance of the sample when the front surface is incident

FS_DIFF_REFL total hemispherical reflectance of the sample front surface

FS_DIFF_TRAN total hemispherical transmittance of the sample when the front surface is incident

CLEAN description of the cleaning procedure

SAMPLE_COMMENTS comments that pertain to the sample

EASUREMENT PARAMETER

MEAS_NAME a descriptive name for the measurement

SEMI ME1392-0305 © SEMI 2003, 2005 18

FILE_NAME name/number/id of this data file

MEAS_DATE date the measurement was made, mm-dd-yyyy

MEAS_TIME time the measurement finished, hh:mm:ss, 24 h format

MODE indicates whether the sample was measured in a reflective (R), transmissive (T) or both (B)

mode or is a signature (S), Values are R, T, B, S

NUM_AVE the number of measurements averaged for each data point in the data sequence

NUM_POINTS the number of data points in the data sequence, this is a mandatory field

VARS list of the field names for the variables that will appear in the data sequence, the entry after

each of these fields in the headers will be var1, var2, var3, etc. depending on the position

(column) in the data sequence

BRDF BRDF of the sample, this is normally var1

WAVELENGTH

center wavelength of the source, units are m

BANDWIDTH bandwidth of the source, FWHM

ALPHA the sample x axis position as measured from the incident plane or XB axis in degrees

THETA_I

angle of incidence,



PHI_I

incident azimuthal angle,



THETA_S

polar angle from sample normal,



PHI_S

scatter azimuthal angle,



POWER_INC total incident power on sample in watts

POWER_SCTR scattered power from the sample in watts

SPOT_SIZE

illuminated spot size, A, on the sample defined by the exp

2

power points

SOURCE_POL_I I component of the stokes vector defining the source polarization

SOURCE_POL_M M component of the stokes vector defining the source polarization

SOURCE_POL_C C component of the stokes vector defining the source polarization

SOURCE_POL_S S component of the stokes vector defining the source polarization

RX_POL_I I component of the stokes vector defining the receiver polarization selection

RX_POL_M M component of the stokes vector defining the receiver polarization selection

RX_POL_C C component of the stokes vector defining the receiver polarization selection

RX_POL_S S component of the stokes vector defining the receiver polarization selection

SOURCE_POL_ORN the angular orientation of linear polarization for the source light wrt the PLIN, p = 0°,

s = 90°, in degrees from 0 to 90°

RX_POL_ORN the angular orientation of a linear polarizer in the receiver wrt the scatter plane, P = 0°,

S = 90°, in degrees from 0 to 90°

RX_DIST rotational radius of the aperture stop defining the solid angle for the BRDF calculation

APER_SIZE size of the aperture stop, this is the width of a slit or the diameter of a circular aperture or the

area of a bow tie or other type of complex aperture

RX_FOV receiver FOV in steradians

SAMPLE_TEMP sample temperature in degrees K

SAMPLE_ATM_KW key words that describe the test atmosphere surrounding the sample during the measurement

such as vacuum, air, vapor, chemical

SAMPLE_PRES pressure of the gas surrounding the sample in torr

SAMPLE_HUMID humidity of the gas surrounding the sample in percent

SOURCE_CONV the source convergence or divergence at the sample in radians, convergence is positive and

divergence is negative

SPOT_X illuminated spot position in the X direction with respect to sample center

SPOT_Y illuminated spot position in the Y direction with respect to sample center

SPOT_Z sample front surface location with respect to the center of rotation of the instrument. A

sample mounted so the front surface was the surface inspected would have a value of 0.0. A

sample mounted so the back surface was the surface inspected such as a back surface

reflector would have a value equal to the sample thickness

MEAS_COMMENTS comments that pertain to the measurement

ATA SEQUENCE

This section of the data file is a list of all data for the measurement. Each data point is stored

on a separate line ending in a carriage return—line feed pair. Separate variables in the line

are delimitated with commas. There is no imposed limit to the number of variables in the

line. Variables that do not change from the data point to the next do not have to be repeated,

but two commas are needed to reserve the column.

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