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SEMI E109-0305 © SEMI 2001, 2005 11 10.2.2 From the host point o f view, an object is in stantiated if the host i s able to query the equipment ab out that object, its current state, and other attributes. Once inst antia…

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SEMI E109-0305 © SEMI 2001, 2005 10
# Previous State Trigger New State Actions Comments
6 READY TO
LOAD
Manual: “The equipment
recognizes the logical indication of
the start of a manual load transfer.
This trigger is configurable by the
user, exam
p
les are included in table
8.”
Automated: The PIO load transfer
is beginning and the PIO ready
signal is activated.
TRANSFER
BLOCKED
Data required to be available for this
event report:
PortID
7 READY TO
UNLOAD
Manual: The equipment recognizes
a logical indication of the start of
an unload transfer.
Automated: The PIO unload
transfer is beginning and the PIO
ready signal is activated.
TRANSFER
BLOCKED
Data required to be available for this
event report:
PortID
8 TRANSFER
BLOCKED
Manual: The reticle pod unload
transfer has completed, and the
reticle load port is now empty and
ready for load transfer.
Automated: The PIO unload
transfer ends with a PIO complete
signal.
READY TO
LOAD
Data required to be available for this
event report:
PortID
9 TRANSFER
BLOCKED
Manual: Activities using reticles
contained within the pod have
completed the reticle pod is ready
to be removed.
Automated: Handling for reticles
destined for the reticle pod has
completed, or a CancelPod/
CancelPodAtPort service has been
issued, and the reticle pod is ready
to be removed. This is indicated
by a PIO unload request signal.
READY TO
UNLOAD
The reticle pod on the reticle pod load
p
ort can now be unloaded from the reticle
load port to an external entity.
Data required to be available for this
event report:
PortID
PodID
10 TRANSFER
BLOCKED
The transfer was unsuccessful, and
the reticle pod was not loaded or
unloaded.
TRANSFER
READY
The sub-state of TRANSFER READY,
which is decided by transition #5.
Data required to be available for this
event report:
PortID
10 Reticle Pod Object
10.1 Information about a reticle pod is encapsulated as an object. This allows the host to exchange information
with the equipment about one or more specific reticle pods using services defined in SEMI E39, Object Services
Standard. A reticle pod has properties (attributes) that are defined in Table 6, Pod Attribute Definition.
10.2 Object Instantiation
10.2.1 The reticle pod object is a software representation of the reticle pod in the equipment. Under normal
circumstances this object is instantiated by the equipment when the host uses the Bind, ReticleTransferJob, or
PodNotification service or when the equipment successfully reads the PodID from the reticle pod. A reticle pod
object is instantiated by PodID read only if there are no currently existing objects of the same object type with the
PodID just read. A reticle pod object can also be instantiated by either the ProceedWithPod or CancelPod Services
on an UNASSOCIATED port. (This implies a failed PodID read event.) The ContentMap attribute will be an empty
list (a list of zero) when the instantiation is done by PodID read. The SlotMap attribute should be a list consisting of
all slots enumerated as “UNDEFINED” when the reticle pod object is instantiated by PodID read.
SEMI E109-0305 © SEMI 2001, 2005 11
10.2.2 From the host point of view, an object is instantiated if the host is able to query the equipment about that
object, its current state, and other attributes. Once instantiated, the object is considered destroyed (no longer
instantiated) if the response to such queries is “unknown object”.
10.2.3 Summary of reticle pod object instantiation:
1. Bind, ReticleTransferJob, or PodNotification Service;
2. PodID read with no currently existing pod objects having the PodID just read; and
3. ProceedWithPod or CancelPod Service on an UNASSOCIATED port with a pod.
10.2.4 Reticle Pod Object Identifier (ObjID)
10.2.4.1 The purpose of an Object Identifier is to allow references to an object within the system. The object
identifier is created when an object is instantiated and should be unchanged or persistent until the end of the object
lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. The PodID is the
Reticle Pod Object Identifier. The equipment is responsible for ensuring uniqueness of the PodID prior to
instantiation by the bind, pod notification, or ReticleTransferJob service.
10.2.5 Reticle Pod Object Destruction
10.2.5.1 Normally, the Reticle Pod Object reaches the end of its lifecycle when the reticle pod is unloaded from the
equipment. Abnormally, the Reticle Pod Object reaches the end of it’s lifecycle when a CancelBind,
CancelReticleTransferJob, or CancelPodNotification service is executed prior to the reticle pod being loaded, or
when an equipment based pod verification fails following pod instantiation by the bind service.
10.2.5.2 Summary of reticle pod object destruction:
1. A reticle pod is unloaded from the equipment;
2. A CancelBind, CancelReticleTransferJob or CancelPodNotification service is received; and
3. An equipment based verification fails (after the object has been instantiated via the bind services).
10.3 Reticle Pod Attribute Definitions
10.3.1 The following table contains the attributes that are of importance to the host and/or the equipment in order to
manage the history and the reports about the reticle pod object.
10.3.2 REQD Column
10.3.2.1 All attributes in the following table are required to be associated with the reticle pod object. However only
the attributes marked with a “Y” in the REQD column are always required to be maintained and updated by the
equipment. The attributes marked with an “N” in the REQD column are only required to be maintained if they are
provided by the host by either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod Services or if the
equipment has means of determining the attribute values. (For example, if the equipment has a ReticleID reader, the
equipment can determine the ContentMap).
10.3.3 ACCESS Column
10.3.3.1
Even though a value may be marked as RO (read only), the initial value for the attribute may be provided
by the host when attached to either the Bind, PodNotification, ReticleTransferJob or ProceedWithPod services. The
only other time the PodCapacityStatus attributes are updated is at the first ProceedWithPod service.
10.3.4 Pod Attribute Definition Table
Table 6 Pod Attribute Definition
Attribute Name Definition Access Reqd Form
ObjType Object type. RO Y Text equal to “Reticle Pod”.
ObjID Object identifier. RO Y Text 1 to 80 characters equal to the PodID.
Capacity Maximum number of reticles in
pod.
RO Y Positive integer. If a pod arrives at a load port
with no warning the default value is one.
SEMI E109-0305 © SEMI 2001, 2005 12
Attribute Name Definition Access Reqd Form
PodIDStatus Current state of the PodID
verification.
RO Y Enumerated:
ID NOT READ, WAITING FOR HOST ON
ID STATUS, ID VERIFICATION OK, ID
VERIFICATION FAILED.
ReticlePodAccessing-
Status
The current accessing state of the
reticle pod by the equipment. The
current substate of the
ReticlePodAccessingStatus state
model.
RO Y Enumerated:
NOT AVAILABLE, AVAILABLE, IN
ACCESS, COMPLETE.
ContentMap Ordered list of reticle identifiers
corresponding to slot 1,2,3……n.
RO Y Ordered list of n elements, where n is equal to
the value of “Capacity” above, and each
element consists of a ReticleID.
When a slot has no reticle, the ReticleID value
should be null.
ReticlePodLocationID Identifier of current location of the
reticle pod.
RO Y Text 1 to 80 characters.
ReticlePodLocking-
Status
The current state of pod locking by
the equipment. The current
substate of the
ReticlePodLockingStatus.
RO Y Enumerated:
NOT LOCKED, RELEASED AND LOCKED,
HOLD.
SlotMap Ordered List of slot status as
provided by the host until a
successful slot map read, then as
read by the equipment.
RO Y Ordered List of n elements where n is equal to
the value of “Capacity” above.
1. Enumerated
1
.
n. Enumerated
n
Enumerated:
UNDEFINED, EMPTY, CORRECTLY
OCCUPIED. The number shown above is the
slot number.
SlotMapStatus Current state of slot map
verification.
RO Y Enumerated:
SLOT MAP NOT READ, WAITING FOR
HOST ON SLOT STATUS, SLOT MAP
VERIFICATION OK, SLOT MAP
VERIFICATION FAILED.
10.3.5 Rules for Reticle Pod Attributes
The equipment shall change object attributes, ContentMap and SlotMap, provided by the host. All other
attributes, such as LocationID, shall be set and maintained by the equipment.
The attributes, Capacity, ContentMap, Reticle count, shall be provided with Bind, PodNotification,
ReticleTransferJob,
or ProceedWithPod service before or when SlotMap is provided.
The SlotMap shall be provided with Bind, PodNotification, ReticleTransferJob or ProceedWithPod to verify
PodID, when the SlotMap verification is equipment based. And it shall not be provided when the SlotMap
verification is host based.
Reticle pod properties may be provided before the reticle pod arrives as part of the Bind, PodNotification, or
ReticleTransferJob service and should be retained until either a CancelBind, CancelPodNotification, or
CancelReticleTransferJob service is received or the reticle pod is removed.
Reticle pod properties may also be provided by the ProceedWithPod service. The reticle pod properties that are
provided by the ProceedWithPod service may differ based whether or not the object is instantiated by the
service.