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SEMI S11-1296 © SEMI 1996 2 5.2 Envir onmental Desi gn Requir e m e nt s 5.2.1 In order to assess the environm e n ta l impact of minienv ironments, the mini environment suppl ier should provide a listing of materials o …
SEMI S11-1296 © SEMI 19961
SEMI S11-1296
ENVIRONMENTAL, SAFETY, AND HEALTH GUIDELINES FOR
SEMICONDUCTOR MANUFACTURING EQUIPMENT
MINIENVIRONMENTS
1 Purpose
1.1 These guidelines are intended as a minimum set of
performance-based environmental, health, and safety
considerations for minienvironments used in
semiconductor manufacturing.
1.2 These guidelines are intended to be a supplement
to SEMI S2 (see Section 3.1).
2 Scope
2.1 These guidelines apply to minienvironments used
in the manufacturing, metrology, assembly, and testing
of semiconductor products.
2.2 Equipment enclosed by, or used in conjunction
with, the minienvironments is addressed separately by
SEMI S2 (see Section 3.1). Examples are process tools
and exhaust emissions abatement devices.
2.3 For “integrated minienvironments,” only the
minienvironment enclosure portion is addressed by
these guidelines.
3 Referenced Documents
NOTE: Documents as listed or referenced shall be the latest
available.
3.1 SEMI Documents
SEMI S2 — Safety Guidelines for Semiconductor
Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics/Human
Factors Engineering of Semiconductor Manufacturing
Equipment
3.2 NFPA Documents
1
NFPA 255 — Standard Method of Test of Surface
Burning Characteristics of Building Materials
NFPA 318 — Standard for the Protection of
Cleanrooms
3.3 Other Documents
ACGIH — Industrial Ventilation - A Manual of
Recommended Practice
2
1 National Fire Protection Association, 1 Batterymarch Park, Quincy,
MA 02269-9101
UL 181 — Standard for Safety Factory-Made Air Ducts
and Air Connectors
3
4 Terminology
4.1 closed loop air supply — A system in which air is
recirculated from the minienvironment and returned to
the minienvironment with minimal make-up air.
4.2 emergency off (EMO) — Control circuit which
when activated, places the equipment into a safe shut
down condition.
4.3 integrated minienvironment — The
minienvironment that is an integral part of the tool.
4.4 minienvironment — A localized environment
created by an enclosure to isolate the product from
contamination and people.
4.5 minienvironment end user — The facility which
uses a minienvironment for semiconductor fabrication.
4.6 minienvironment supplier — The party that builds,
sells, or otherwise provides minienvironment
enclosures.
4.7 tool supplier — The party that builds, sells, or
otherwise provides the tools that are used together with
the minienvironments.
5 General Requirements
5.1 Safety and Health Design Requirements —
Minienvironment manufacturers should consider site-
specific design requirements but must not compromise
compliance with applicable regulatory requirements.
The requirements covered in these guidelines are not
all-inclusive. The minienvironment supplier should
employ any additional applicable regulatory and
industry standards that govern associated components.
It is the minienvironment supplier’s responsibility to
work with the user and tool supplier to understand the
local codes and variances.
2 American Conference of Governmental Industrial Hygienists, 6500
Glenway, Building D-7, Cincinnati, OH 45211-4438
3 Underwriters Laboratories Inc., 33 Pfingsten Road, North Brook, IL
60062
SEMI S11-1296 © SEMI 1996 2
5.2 Environmental Design Requirements
5.2.1 In order to assess the environmental impact of
minienvironments, the minienvironment supplier
should provide a listing of materials of construction
showing the compatibility with chemical and process
materials typically used in the given minienvironment.
In the case of “non-typical” chemical and process
chemicals, the minienvironment supplier and
minienvironment end-user will evaluate the particular
materials involved to ensure compatibility.
“Nonprocess” chemical wastes (i.e., wastes not in
contact with the product such as oil filters, pump oils,
etc.) that are generated by routine preventative
maintenance should be included.
5.3 Materials of construction should be in
conformance with SEMI S2, Section 19.
6 Enclosure Interlocks
6.1 Not all enclosure panels, doors, and hatches
require interlocks. There may be cases where the
customer requires ports for manual access for product
load/unload or tool adjustment without process tool
interrupt. The need for interlocks should be assessed. If
the overall level of safety is not compromised,
interlocks need not be provided.
6.2 Interlocks are required when the minienvironment
replaces an interlocked door or panel on the process
tool or where the minienvironment provides the
primary barrier to operator exposure to chemical,
electrical, mechanical, thermal, radiation or other
recognized hazards.
7 Chemical and Physical Ha zards
7.1 The addition of the minienvironment and its
associated components should not compromise
equipment safety and health considerations required for
conformance with SEMI S2.
7.2 Shut-off Valves — Manual shut-off valves for
hazardous materials should be clearly visible, labeled,
and easily accessible. Access to these valves should not
be restricted by any part of the minienvironment.
8 Noise
The addition of a minienvironment system should not
cause the noise level to exceed conformance with SEMI
S2, Section 9 (see Section 3.1).
9 Ventilation & Exhaust
9.1 Recirculating air ducts, connectors, and ventilation
components within the minienvironment, should be
constructed of noncombustible material of Class 0 or
Class 1 materials as tested in accordance with UL 181,
Standard for Safety Factory-Made Air Ducts and Air
Connectors.
9.2 Recirculating air duct materials should be
compatible with chemical processes used in the given
minienvironment; the minienvironment supplier should
provide a listing of materials of construction showing
the compatibility with chemical and process materials
typically used in the given minienvironment. In the case
of “non-typical” chemical and process materials, the
minienvironment supplier and minienvironment end-
user will evaluate the particular materials involved to
ensure compatibility.
9.3 Exhaust should not be altered in any fashion to
accommodate a process where flammable liquids are
used or flammable vapors present. Dampers, where
required for balancing or control of the exhaust system,
should be of the locking type.
9.4 Primary exhaust and monitoring of the
equipment/process enclosed should be incorporated as
defined in SEMI S2 (see Section 3.1).
9.5 Minienvironments with a closed loop air supply
should control fugitive emissions in accordance with
SEMI S2, to prevent the buildup of gases and vapors
within the enclosure.
9.6 Ventilation of tools and areas i n which hazardous
materials are used, should comply with the ACGIH
reference in Section 3.2.
10 Electrical
The addition of the minienvironment and associated
equipment should be in compliance with SEMI S2 (see
Section 3.1).
11 Emergency Shutdown
Emergency off (EMO) buttons should be relocated, or
additional EMO buttons installed, if the original EMOs
are out of reach or obstructed due to mini-environment
installation.
12 Ergonomics/Human Factors
12.1 Ergonomics/human factors should comply with
SEMI S8 (see Section 3.1).
12.2 Areas of particular concern for minienvironments
include load/unload ports and maintenance accesses.
The design should discourage extended reaching,
lifting, pulling, and manual orientation of product
and/or containers.
SEMI S11-1296 © SEMI 19963
13 Seismic Event Design
Minienvironments and associated equipment should be
designed in conformance with SEMI S2, Section 17
(see Section 3.1).
14 Fire Suppression
14.1 Whenever possible, non-combustible materials
should be used in minienvironment design and
construction. Fire detection/suppression should be
incorporated based on evaluation of the
minienvironment size, materials of construction, the
process, equipment enclosed, the facility design, and
interaction with the facility fire detection/suppression
systems.
14.2 If fire sprinklers are used, they should be the
“quick response” (QR) type.
14.3 If the minienvironment prevents personnel
exposure to the tool and process, an automatic gaseous
fire suppression system may be used as an alternative to
sprinklers. Gaseous extinguishing systems should be
actuated by optical detectors.
15 Maintenance & Servicing
15.1 Maintenance and Service Preparation of
Minienvironments with Chemical Process Tools —
Exhaust design at the tool should be adequate to
prevent the concentration buildup of fugitive vapor
emissions in the tool and minienvironment. The exhaust
should be maintained during maintenance and service
operations even though the enclosure doors are open.
15.2 Hazardous materials should be avoided for
service and maintenance requirements.
15.3 Minienvironment panels, doors, and access ports
removed for service or maintenance, should be stored in
a secure manner that will not permit these parts to fall,
obstruct passage ways, or otherwise cause tripping or
handling hazards.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.