semi合集-English.pdf - 第5528页
SEMI P10-0705 © SEMI 1990, 2005 23 END_CLOSURE_MEASUREMENTS <cd_group_measurements> = START_CD_GROUP_M EASUREMENTS [ CD_QUALITY_ID ] [ CD_TONE_CLEAR ] [ CD_MORPHOGRAPHY ] [ CD_PERCENT_CLEAR ] [ CD_PERCENT_CLEAR_WIN…
SEMI P10-0705 © SEMI 1990, 2005 22
[REGISTR_COMPENSATION_TEMPERATURE]
[REGISTR_EQUIP_USED] [EQUIP_SITE_USED] [REGISTR_REF_METHOD_USED]
[REGISTR_STD_GRID_USED] [REGISTR_ALGORITHM_USED]
[
REGISTR_MEASUREMENT_DATE]
[
REGISTR_REF_MASK_ID REGISTR_REF_MASK_SET_ID]
[REGISTR_ERROR] [REGISTR_SCALE [REGISTR_SCALE_REFERENCE_ONLY] ]
[REGISTR_RESIDUAL [REGISTR_RESIDUAL_REFERENCE_ONLY] ]
[REGISTR_THREE_SIGMA [REGISTR_THREE_SIGMA_REFERENCE_ONLY] ]
[REGISTR_RESIDUAL_THREE_SIGMA
[REGISTR_RESIDUAL_THREE_SIGMA_REFERENCE_ONLY] ]
[REGISTR_TOLERANCE]
[REGISTR_ORTHO [REGISTR_ORTHO_REFERENCE_ONLY] ]
[REGISTR_RELATIVE [REGISTR_RELATIVE_REFERENCE_ONLY] ]
{<
measured_registr_mark>}
[MEASURED_REGISTR_ERROR] [MEASURED_REGISTR_SCALE]
[MEASURED_REGISTR_THREE_SIGMA]
[MEASURED_REGISTR_RESIDUAL]
[MEASURED_REGISTR_RESIDUAL_THREE_SIGMA]
[MEASURED_REGISTR_TOLERANCE]
[MEASURED_REGISTR_MINIMUM] [MEASURED_REGISTR_MAXIMUM]
[MEASURED_REGISTR_ORTHO] [MEASURED_REGISTR_RELATIVE]
[
MEASURED_REGISTR_FILE_NAME]
[OPERATOR]
END_REGISTR_MEASUREMENTS
<measured_registr_mark> = START_MEASURED_REGISTR_MARK
MEASURED_REGISTR_MARK_ID
[ VENDOR_REGIGISTRATION_MARK_ID ]
[ MASK_REGISTR_MARK_LOCATION ]
MEASURED_REGISTR_MARK_LOCATION
[ MEASURED_REGISTR_MARK_ERROR ]
[ MEASURED_REGISTR_MARK_RESIDUAL ]
END_MEASURED_REGISTR_MARK
<closure_measurements> = START_CLOSURE_MEASUREMENTS
{REGISTR_CLOSURE_EQUIP_REQD} {EQUIP_SITE_REQD}
[REGISTR_CLOSURE_EQUIP_USED] [EQUIP_SITE_USED]
[
REGISTR_CLOSURE]
[REGISTR_CLOSURE_REFERENCE_ONLY]
MEASURED_REGISTR_CLOSURE
{ MEASURED_CLOSURE_READING [MEASURED_CLOSURE_LOCATION] }
[OPERATOR]
SEMI P10-0705 © SEMI 1990, 2005 23
END_CLOSURE_MEASUREMENTS
<cd_group_measurements> = START_CD_GROUP_MEASUREMENTS
[
CD_QUALITY_ID]
[
CD_TONE_CLEAR]
[
CD_MORPHOGRAPHY]
[
CD_PERCENT_CLEAR] [CD_PERCENT_CLEAR_WINDOW]
[
CD_TARGET]
[
CD_ORIENTATION]
[
CD_PITCH]
[
CD_FEATURE]
[
CD_REFERENCE_ONLY]
[CD_TOLERANCE]
[CD_RANGE] [CD_THREE_SIGMA]
[CD_DEVIATION_FROM_TARGET]
[CD_DEVIATION_FROM_MEAN]
[CD_STD] [CD_CORRELATION_ID]
{
CD_EQUIP_REQD} {EQUIP_SITE_REQD}
[
CD_EQUIP_USED] [EQUIP_SITE_USED]
[
CD_MEASUREMENT_DATE]
[NUMBER_OF_CDS]
{<
cd_measurement>}
[MEASURED_CD_MEAN] [MEASURED_CD_MIN] [MEASURED_CD_MAX]
[MEASURED_CD_TOLERANCE]
[MEASURED_CD_RANGE] [MEASURED_CD_THREE_SIGMA]
[MEASURED_CD_DEVIATION_FROM_TARGET]
[MEASURED_CD_DEVIATION_FROM_MEAN]
[
MEASURED_CD_FILE_NAME]
[OPERATOR]
END_CD_GROUP_MEASUREMENTS
<cd_measurement> = START_CD_MEASUREMENT
[ [
CD_SITE_ID] CD_LOCATION ]
MEASURED_CD_SITE_ID
MEASURED_CD_LOCATION
MEASURED_CD
END_CD_MEASUREMENT
<cd_set_results> = START_CD_SET_RESULTS
{
CD_GROUP_NAME}
[
CD_REFERENCE_ONLY]
[
CD_QUALITY_ID]
[CD_TOLERANCE] [CD_RANGE] [CD_THREE_SIGMA]
SEMI P10-0705 © SEMI 1990, 2005 24
[CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]
[MEASURED_CD_MEAN] [MEASURED_CD_MIN] [MEASURED_CD_MAX]
[MEASURED_CD_TOLERANCE]
[MEASURED_CD_RANGE] [MEASURED_CD_THREE_SIGMA]
[MEASURED_CD_DEVIATION_FROM_TARGET]
[MEASURED_CD_DEVIATION_FROM_MEAN]
END_CD_SET_RESULTS
<cd_xy_results> = START_CD_XY_RESULTS
{CD_X_GROUP} {CD_Y_GROUP}
{<
cd_xy_site>}
[
CD_XY_TOLERANCE] [CD_XY_DEVIATION] [CD_XY_REFERENCE_ONLY]
[MEASURED_CD_XY_TOLERANCE] [MEASURED_CD_XY_DEVIATION]
[MEASURED_CD_XY_MORPHOGRAPHY]
[MEASURED_CD_XY_TONE_CLEAR]
END_CD_XY_RESULTS
<cd_xy_site> = START_CD_XY_SITE
[
CD_HORIZONTAL_ID CD_HORIZONTAL_LOCATION ]
[
CD_HORIZONTAL_MORPHOGRAPHY] [CD_HORIZONTAL_TONE_CLEAR]
MEASURED_HORIZONTAL_CD
[
CD_VERTICAL_ID CD_VERTICAL_LOCATION ]
[
CD_VERTICAL_MORPHOGRAPHY] [CD_VERTICAL_TONE_CLEAR]
MEASURED_VERTICAL_CD
END_CD_XY_SITE
<cd_iso_dense_results> = START_CD_ISO_DENSE_RESULTS
{
CD_ISO_GROUP} {CD_DENSE_GROUP}
[
CD_ISO_DENSE_TOLERANCE]
[
CD_ISO_DENSE_REFERENCE_ONLY]
[
MEASURED_CD_ISO_MEAN] [MEASURED_CD_ISO_RANGE]
[
MEASURED_CD_DENSE_MEAN] [MEASURED_CD_DENSE_RANGE]
[
MEASURED_CD_ISO_DENSE_TOLERANCE]
END_CD_ISO_DENSE_RESULTS
<defect_measurements> = START_DEFECT_MEASUREMENTS
[
DEFECT_QUALITY_ID]
{INSPECTION_AREA} {INSPECTION_AREA_EXCLUDE}
{VISUAL_INSP_CRITERIA}
DIE_TO_DIE_INSPECTION
DIE_TO_DIE_MEASUREMENTS
{DEFECT_EQUIP_REQD {EQUIP_SITE_REQD}
[
DEFECT_INSP_MODE_REQD] [DEFECT_INSP_PIXEL_SIZE_REQD]
{DEFECT_TYPE DEFECT_INSP_SENSITIVITY_REQD