semi合集-English.pdf - 第5511页

SEMI P10-0705 © SEMI 1990, 2005 6 [ FRACTURE_FILE ] { [< data_manipulation >] [< data_function >] } END_DATA_PATTERN_NAME <data_manipulation> = START_DATA_MANIPULATION [ BOOLEAN [ PATTERN_GENERATION_ARE…

SEMI P10-0705 © SEMI 1990, 2005 5

7.4 Mask Order Structure Syntax — The following syntax definition uses the upper case keyword to represent the

permissible applications of the corresponding data record within the mask order structure.

<mask_order> = START_ORDER SEMI_REVISION CUSTOMER VENDOR

FILE_DATE_TIME [OPERATOR_NAME]

mask_set> END_ORDER CHECKSUM

<mask_set> = MASK_SET_ID <

mask_set_options> END_MASK_SET_OPTIONS

mask_group>} END_MASK_SET

<mask_set_options> = [BUSINESS_CONTACT] {BUSINESS_ADDRESS} {BUSINESS_PHONE}

{BUSINESS_FAX} [BUSINESS_EMAIL]

[BILLING_CONTACT] {BILLING_ADDRESS}

{BILLING_PHONE} {BILLING_FAX} [BILLING_EMAIL]

[DESIGN_RULE] [FAB_TECHNOLOGY] [WAFER_FAB]

[CUSTOMER_SPEC CUSTOMER_SPEC_REVISION]

{WAIVER} {WAIVER_OVERRIDE}

[PRICE_UNITS]

[SECURITY_CLASS]

[QS9000]

[ENGINEERING_CONTACT] {ENGINEERING ADDRESS} {ENGINEERING_PHONE}

{ENGINEERING_FAX} [ENGINEERING_EMAIL]

[SHIPPING_CONTACT] {SHIPPING_ADDRESS} {SHIPPING_PHONE}

{SHIPPING_FAX} [SHIPPING_EMAIL]

{SHIPPING_METHOD}

[REPAIRS_AUTHORIZED]

shippable_data>]

data>}

standard_pattern>}

[MASK_SET_NAME [MASK_SET_VERSION] ] [ORDER_ID]

{ADDITIONAL_MASK_SET_INFO}

<data> = DATA_MEDIUM [DATA_LOCATION] [DATA_ID]

[DATA_FORMAT [DXF_ANGLE DXF_UNIT] ]

[DATA_DENSITY] [DATA_FILE_SIZE]

[DATA_COMPRESSION] [DATA_CONSOLIDATION] [DATA_ENCRYPTION]

[DATA_CHECKSUM DATA_CHECKSUM_TYPE ]

{<pattern_data>} {<job_data>}

[

FRACTURE_FILE FRACTURE_FILE_FORMAT]

{MEASURE_FILE_NAME [MEASURE_FILE_FORMAT] }

{CD_MATRIX_FILE_NAME [CD_MATRIX_FILE_FORMAT] }

END_DATA_MEDIUM

<pattern_data> = DATA_PATTERN_NAME {PATTERN_FORMAT} [DATA_FILE_NUMBER]

[PATTERN_UNITS] [PATTERN_CHARACTER_SET]

SEMI P10-0705 © SEMI 1990, 2005 6

[FRACTURE_FILE]

{ [<

data_manipulation>] [<data_function>] }

END_DATA_PATTERN_NAME

<data_manipulation> = START_DATA_MANIPULATION

[

BOOLEAN

[

PATTERN_GENERATION_AREA]

data_file_parameters> { <data_file_parameters> } ]

data_fracture>}

END_DATA_MANIPULATION

<data_file_parameters> =

DATA_SOURCE_FILE [PATTERN_FORMAT]

[

DATA_TOP_CELL] [DATA_LAYER_ID]

[

DATA_PATTERN_WINDOW]

data_fracture>}

END_DATA_SOURCE_FILE

<data_function> = START_DATA_FUNCTION

DATA_FUNCTION_PURPOSE

{ SOFTWARE_NAME {SOFTWARE_REVISION}

{ RUNSET_NAME [RUNSET_REVISION] [DATA_LOCATION]

{ PARAMETER_FILE_NAME [PARAMETER_FILE_REVISION] }

{ INPUT_FILE_NAME INPUT_FILE_FORMAT

[TOP_CELL] [DATA_LOCATION] }

{RESULT_FILE_NAME} {SUMMARY_FILE_NAME} {LOG_FILE_NAME} }

}

END_DATA_FUNCTION

<data_fracture> =

START_DATA_FRACTURE

[

SIZING [SIZING_RULE] [SIZING_BORDER_RULE] ]

[

FRACTURING_SCALE] [DATA_SCALE_FACTOR]

[

PATTERN_ADDRESS_SIZE]

[

DARK_INTERNAL_WINDOW] [CLEAR_INTERNAL_WINDOW]

[

EXTERNAL_WINDOW] [ROTATION] [MIRROR]

END_DATA_FRACTURE

<job_data> = DATA_JOB_NAME JOB_FORMAT

<standard_pattern> = STD_PATTERN_NAME PATTERN_FORMAT

<mask_group> = MASK_GROUP_ID [<

mask_options>] END_MASK_GROUP_OPTIONS

PLACEMENT_TOP_CELL {<

mask_definition>}

cell_definition>} {<pattern_group>} END_MASK_GROUP

<mask_options> = [BLANKET_PO_NUMBER] [PO_NUMBER] [SO_NUMBER] [ORDER_ID]

[RELEASE_NUMBER] [LINE_ITEM_NUMBER] [QUOTE_NUMBER]

[STATUS]

[DUE_DATE_TIME_REQUESTED] [

DELIVERY_PRIORITY]

[LAYER_PRIORITY [ELAPSED_TIME] ]

[MILESTONES <

ship_to>] [PERIODIC_UPDATES <ship_to>]

[ESTIMATED_ARRIVALS <

ship_to>]

[BUSINESS_CONTACT] {BUSINESS_ADDRESS} {BUSINESS_PHONE}

{BUSINESS_FAX} [BUSINESS_EMAIL]

[BILLING_CONTACT] {BILLING_ADDRESS}

{BILLING_PHONE} {BILLING_FAX} [BILLING_EMAIL]

[PRICE]

{PTC_HOURS [PTC_RATE] [PTC_FIXED] }

[EWT_THRESHOLD EWT_RATE [EWT_CEILING] ]

[SECURITY_CLASS] [QS9000]

[SHIPPING_CONTACT] {SHIPPING_ADDRESS} {SHIPPING_PHONE}

{SHIPPING FAX} [SHIPPING_EMAIL]

{SHIPPING_METHOD}

[REPAIRS_AUTHORIZED]

shippable_data>]

{ MFG_SITE_REQD }

{ [LITHO_EQUIP_REQD] {EQUIP_SITE_REQD}

{ [LITHO_MODEL_REQD] {LITHO_MODE_REQD} } }

PRODUCT_TYPE [PRODUCT_MAGNIFICATION] [PRODUCT_IMAGING_TYPE]

[QUANTITY] [PRODUCT_AS_CHECKPLATE]

[MULTIWRITE]

{WAFER_EXPOSURE_TOOL}

[<wafer_exposure_data> <aerial_image_data>]

[FAB_TECHNOLOGY] [WAFER_FAB]

[JOB_NAME] [JOB_LEVEL]

[RETROFIT_JOB_NAME] [RETROFIT_JOB_LEVEL]

[RETROFIT_MASK_SET_ID] [RETROFIT_MASK_ID]

[RETROFIT_MASK_SET_NAME [RETROFIT_MASK_SET_VERSION]

[RETROFIT_MASK_NAME] ]

title_data>}

barcode_data>}

[JOB_ONLY_APPROVAL_REQD] [JOB_WITH_PATTERNS_APPROVAL_REQD]

{PATTERN_APPROVAL_REQD} [ALL_PATTERNS_APPROVAL_REQD]

{APPROVAL_REQD}{REVIEW_REQD}

[SERIAL_NUMBER]

[MIRROR_MASK] [MASK_ROTATION]

substrate>

phase_shift>]

[UT1X_UNCUT] [PROCESS] [PROCESS_ETCHING_TYPE]