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SEMI E30-1103 © SEMI 1992, 2003 1 SEMI E30-1103 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) This standard was technically approved by the Globa l Information & Control Committee and …

SEMI E5-1104 © SEMI 1982, 2004 268

S6,F3: Discrete Variable Data Send may be used to

transfer data to the host.

R1-5.6.5 Typical Tasks for Material Control and

Transport

R1-5.6.5.1 Material Status Information — The host

may query the equipment for material-in-process

information. The information is transmitted only as a

answer to a host request.

The equipment recognizes:

S3,F1: Material Status Request.

The equipment transmits:

S3,F2: Material Status Data.

R1-5.6.5.2 Material Transport Control — The SECS-

II protocol includes the means to affect automated

transfer of material from one SECS-compatible device

to another. Baseline compatibility requires the

equipment to perform a simple material transfer

process, an actual implementation may require means

for graceful error recovery as well. This

recommendation does not include messages to handle

error conditions.

Receiving Material:

Equipment Recognizes S4,F1:

Ready to Send Material

Equipment Transmits:

S4,F3: Send Material,

S4,F5: Handshake

Sending Material:

Equipment Transmits:

S4,F1: Ready to Send Material

Equipment Recognizes:

S4,F3: Send Material,

S4,F5: Handshake Complete

Equipment Recognizes:

S4,F2: RTS Acknowledge

R1-5.7 Conclusion — The baseline requirements for

equipment using the SECS standards includes all of

SECS-I and a limited selection of messages from

SECS-II. The choice of SECS-II messages, and data

contained therein, is dictated by the equipment and

system requirements. The benefits in using the

standards are many, including support for growth in

equipment function, and standardization needed for

effective automation. The results include automated

process monitoring and all of the associated benefits.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standard set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

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consent of SEMI.

SEMI E30-1103 © SEMI 1992, 2003

SEMI E30-1103

GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF

MANUFACTURING EQUIPMENT (GEM)

This standard was technically approved by the Global Information & Control Committee and is the direct

responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese

Regional Standards Committee on August 8, 2003. Initially available at www.semi.org October 2003; to be

published November 2003. Originally published in 1992; previously published July 2003.

CONTENTS

1 Introduction

1.1 Revision History

1.2 Scope

1.3 Intent

Figure 1.1, GEM Scope

1.4 Overview

Figure 1.2, GEM Components

1.5 Applicable Documents

2 Definitions

3 State Models

3.1 State Model Methodology

3.2 Communications State Model

Figure 3.0, Example Equipment Component Overview

Figure 3.2.1, Communications State Diagram

Table 3.2, Communications State Transition Table

3.3 Control State Model

Figure 3.3, Control State Model

Table 3.3, CONTROL State Transition Table

3.4 Equipment Processing States

Figure 3.4, Processing State Diagram

Table 3.4, Processing State Transition Table

4 Equipment Capabilities and Scenarios

4.1 Establish Communications

4.2 Data Collection

Figure 4.2.1, Limit Combination Illustration: Control

Application

Figure 4.2.2, Elements of One Limit

Figure 4.2.3, Limit State Model

Table 4.2, Limit State Transition Table

4.3 Alarm Management

Figure 4.3, State Diagram for Alarm ALIDn

Table 4.3.1, Alarm State Transition Table

Table 4.3.2

4.4 Remote Control

4.5 Equipment Constants

4.6 Process Program Management

4.7 Material Movement

4.8 Equipment Terminal Services

4.9 Error Messages

4.10 Clock

4.11 Spooling

Figure 4.11, Spooling State Diagram

Table 4.11, Spooling State Transition

4.12 Control

5 Data Items

5.1 Data Item Restrictions

5.2 Variable Item List

6 Collection Events

Table 6.1, GEM Defined Collection Events

7 SECS-II Message Subset

STREAM 1: Equipment Status

STREAM 2: Equipment Control and Diagnostics

STREAM 5: Exception (Alarm) Reporting

STREAM 6: Data Collection

STREAM 7: Process Program Load

STREAM 9: System Errors

STREAM 10: Terminal Services

STREAM 14: Object Services

STREAM 15: Recipe Management

8 GEM Compliance

8.1 Fundamental GEM Requirements

Figure 8.1, GEM Requirements and Capabilities

Table 8.1, Fundamental GEM Requirements

8.2 GEM Capabilities

Table 8.2, Section References for GEM Capabilities

8.3 Definition of GEM Compliance

8.4 Documentation

Figure 8.2, Host View of GEM

Table 8.3, GEM Compliance Statement

Table 8.4, SML Notation

A. Application Notes

A.1 Factory Operational Script

A.1.1 Anytime Capabilities

A.1.2 System Initialization and Synchronization

A.1.3 Production Set-Up

A.1.4 Processing

A.1.5 Post-Processing

A.2 Equipment Front Panel

A.2.1 Displays and Indicators

A.2.2 Switches/Buttons

A.3 Examples of Equipment Alarms

Table A.3, Alarm Examples Per Equipment Configura-

tion

A.4 Trace Data Collection Example

A.5 Harel Notation

Figure A.5.1, Harel Statechart Symbols

Figure A.5.2, Example of OR Substates

Figure A.5.3, Example of AND Substates

A.5.1 State Definitions

A.5.2 Transition Table

Table A.5, Transition Table for Motor Example

A.6 Example Control Model Application

A.7 Examples of Limits Monitoring

A.7.1 Introduction

A.7.2 Examples

Figure A.7.1, Valve Monitoring Example

Figure A.7.2, Environment Monitoring Example

Figure A.7.3, Calibration Counter Example

A.8 Recipe Parameter Modification for Process and

Equipment Control

A.8.1 Introduction

A.8.2 Equipment Constants

A.8.3 Example

Figure A.8.1, CMP Single Wafer “Polishing” System

with Host Recipe Parameter Modification Capability

Index