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SEMI D18-0299 E © SEMI 19 99, 2001 3 grooves) placed on the botto m of the cassette that mate with three coupling pins located on the tool interface. The couplin g pins are located by dimensions x 14 and y 13 relative to…

SEMI D18-0299

4.11 cassette top domain — volume (higher than z9

above the top substrate) that contains the top of the

cassette.

4.12 conveyor rails — features on the bottom of the

cassette for supporting the cassette on roller conveyors.

4.13 conveying surface



entire bottom surface of

cassette (z15 above the horizontal datum plane),

excluding the V-rail, V-groove, and float roller zones,

for supporting the cassette on roller conveyors

4.14 facial datum plane — a vertical plane that

equally bisects the substrates when the centers of the

substrates are aligned and that is parallel to the front

side of the carrier (where substrates are removed or

inserted) and is perpendicular to the bilateral datum

plane. On tool load ports, it is also parallel to the load

face plane (as defined in SEMI E15) on the side of the

tool where the carrier is loaded and unloaded.

4.15 first substrate end-effector clearance — the

distance (dimension z9) between the top of the cassette

bottom domain and the first nominal substrate seating

plane.

4.16 first nominal substrate height — the distance

(dimension z5) from the horizontal datum plane to the

first nominal substrate seating plane.

4.17 horizontal datum plane — load height as defined

in SEMI E15.

4.18 mizo plate — a plate that contains mizo teeth and

may provide structure to the cassette.

4.19 mizo teeth — elements that support the substrates

in the cassette.

4.20 nominal center line — the intersection of the

facial and bilateral datum planes.

4.21 nominal substrate seating plane — a horizontal

plane that contains the nominal bottom surface of the

substrate as it rests on the mizo teeth.

4.22 optical substrate sensing paths — lines of sight

for optically sensing the positions of the substrates.

4.23 robotic handling flanges — projections on the

cassette for handling of the cassette.

4.24 substrate extraction volume — the open space

for extracting a substrate from the cassette.

4.25 substrate pitch — the distance between adjacent

nominal substrate seating planes.

4.26 substrate set-down volume — the open space for

inserting and setting down a substrate in the cassette.

4.27 substrate pick-up volume — the space that

contains entire bottom of a substrate if the wafer is

pushed to the rear of the cassette.

5 Ordering Information

5.1 Intended Use — This standard is intended to

specify cassettes over a reasonable lifetime of use, not

just those in new condition. The purchaser needs to

specify the time period, the number of cycles and any

special conditions to which the cassettes will be

exposed. It is under these conditions that the cassettes

must remain in compliance with the requirements listed

in Section 6.

5.2 Temperature Ranges — The purchase of the

cassettes needs to specify three sets of temperatures to

which the cassettes might be exposed. An operating

temperature range is the set of environmental

temperatures in which the cassettes will remain in

compliance with the requirements listed in Section 6

(e.g. 23°C ± 5°C). A temporary temperature range is

the set of environmental temperatures to which the

cassettes can be exposed such that when the cassettes

return to the operating temperature range, the cassettes

will be in compliance with the requirements listed in

Section 6 (e.g. 90°C maximum during cleaning of the

cassette). Also, the purchaser needs to specify a range

of temperatures for the substrates that might be inserted

in the cassettes.

5.3 Pitch and Capacity Options — The purchaser

needs to specify the pitch and capacity of the cassettes.

Table 2 provides two options of pitch and capacity.

Additional pitch and capacity options are not yet

defined, but should be specified in the same manner.

5.4 Material — To be agreed upon between supplier

and user. Construction may be of one or more molded

or machines parts.

6 Requirements

6.1 Dimensions — Most of the dimensions of the

cassette are determined with respect to the three

orthogonal datum planes defined in that standard: the

horizontal datum plane, the facial datum plane, and the

bilateral datum plane (see Figure 1).

6.2 Cassette Physical Alignment Interface — The

cassette should be registered to the tool interface by one

of the three following types of registrations (Type A, B

or C). The locations of the registration features have

been chosen such that all three types may coexist on the

same cassette

6.2.1 Cassette Physical Alignment Interface-Type A —

This registration consists of three features (not

specified, but recommended to be inverted V-shaped

SEMI D18-0299

grooves) placed on the bottom of the cassette that mate

with three coupling pins located on the tool interface.

The coupling pins are located by dimensions x14 and

y13 relative to the bilateral and facial datum planes

respectively.

6.2.1.1 Coupling Pin Shapes — The physical

alignment mechanism on the bottom of the wafer

carrier consists of features (not specified in this

standard) that mate with three pins underneath. As

shown in Figure 5 and defined in Table 3, each pin is

radially symmetric about the vertical center axis line

and can be seen as the intersection of a cylinder of

diameter d1 and a sphere of radius r3 (which might

contact a flat plate). An additional rounding radius r5

provides contact with angled mating surfaces, and blend

radii r4 and r6 smooth the resulting edges. The final

roughness height of the over-all surface finish must be

less than or equal to r7. Dimensions r2 and z13 have

zero tolerance because they only give a distance to

another toleranced dimension. (Dimensions in

parenthesis are not part of the requirements in this

standard but are intended to clarify the preparation of

manufacturing instructions.)

6.2.1.2 The three features on the bottom of the cassette

that mate with the coupling pins must provide a lead-in

capability that corrects a cassette misalignment of up to

10 mm (0.4 in.) in any horizontal direction, although 15

mm (0.6 in.) is recommended. The exclusion zones for

the three coupling features on the cassette is shown in

Figure 3 and Table 1 and specified by dimensions x14,

z9 and r1.

6.2.2 Cassette Physical Alignment Interface-Type B —

Consists of three features, a V-rail, float surface, and

facial datum plane V-groove. The V-rail and float

surface are located on the bottom of the cassette and

mate with the two V-rail rollers and one float surface

roller, respectively, mounted on the tool interface. The

facial datum plane V-groove is located about the facial

datum plane through the bottom surface of the cassette

and mates with the facial datum plane lock pin located

on the tool interface shown in Figure 3. The V-rail

roller and the float surface roller are located by

dimensions x15 and x16 relative to the bilateral datum

plane respectively shown in Figure 6. The dimension

relative to the facial datum plane for the V-rail rollers

are not specified but recommended to be located

furthest from and symmetrical about the facial datum

plane as shown in Figure 3 and 6. The float surface

roller revolute axis must lie on the facial datum plane.

6.2.2.1 The V-rail and float surface rollers are defined

in Figure 7 and Table 4. Each roller is radially

symmetric about the revolute axis. The rollers are

circumferentially radiused of dimension r8. The

diameter of the rollers is not specified but the tangential

surface created by dimension r8 must lie on the

horizontal datum plane. The facial datum plane lock pin

radius is equal to r8 and must be positioned into the

facial datum plane V-groove to fully constrain the

cassette to the facial datum plane. The facial datum

plane lock pin is translated out of the facial datum plane

V-groove to allow the cassette to be rolled in and out of

the tool interface. Although only three rollers are

specified it is recommended to increase the total

number of rollers so that the cassette is fully supported

while being loaded and unloaded to the tool interface.

All rollers except for the V-rail and float roller must be

positioned so that the tangent of the r8 dimension lies

below the horizontal datum plane.

6.2.2.2 The three features on the bottom of the cassette

that mate with the rollers and lock pin must provide a

lead-in capability that corrects a cassette misalignment

of up to 10 mm (0.4 in.) in any horizontal direction,

although 15 mm (0.6 in.) is recommended. The V-rail

and facial datum plane V-groove are not specified but

recommended to be inverted V-shaped grooves. The V-

rail is recommended to extend the full length of the

cassette from the cassette front to the cassette rear. The

float surface is not specified but recommended to be a

flat surface extending the full length of the cassette

from the cassette front to the cassette rear. The

exclusion zones for these features are shown in Figure 3

and 6 and specified by dimensions x15, x16 through

x22.

6.2.3 Cassette Physical Alignment Interface-Type C —

to be developed.

6.3 Conveyor Rails — If the cassette is to be used on

roller conveyors, each conveyor rail should extend the

maximum distance from front to back. The exclusion

zones for conveyor rails are shown in Figure 3 and 6

and specified by dimensions x13 and x22 and extends to

the outer boundary of the cassette.

6.4 Conveying SurfaceIf the cassette is to be

transported on roller conveyors that support the entire

bottom of the cassette, the bottom surface excluding the

V-rail, V-groove, and float roller zones is to be used.

The location of this surface with respect to the

horizontal datum plane is specified by dimension z3.

6.5 Substrate Orientation and Numbering — The

substrates must be horizontal when the carrier is placed

on the coupling, and the substrates are numbered in

increasing order from bottom to top (so the bottom

substrate is substrate number 1, the next substrate up is

substrate number 2, etc.)

6.6 Cassette Sides and Rear — Figure 2 shows a top

view of the boundaries of the cassette side domains

(which contain the parts of the cassette higher than z4

above the horizontal datum plane and lower than z9

SEMI D18-0299

above the top substrate). Table 1 defines the dimensions

shown in this and following figures.

6.7 Cassette Top — The boundaries of the cassette top

domain contain any part of the cassette higher than z9

above the top substrate.

6.8 Cassette Bottom — Figure 3 shows a bottom view

of the boundaries of the cassette bottom domain (which

contains any part of the cassette lower than z4 above the

horizontal datum plane). When the cassette is fully

down, the cassette placement sensing pads must be z2

above the horizontal datum plane.

6.9 Vertical Dimensions — Figure 4 shows the

vertical dimensions of the left half of the cassette as

viewed from the rear. Note that z5 (the height of the

bottom nominal substrate seating plane above the

horizontal datum plane) and z8 (the distance between

adjacent nominal substrate seating planes) are given as

reference dimensions with no tolerance. This means

that the sum of actual height variations in the cassette

from the horizontal datum plane to the mizo tooth or

slot holding each substrate must be contained within the

tolerance of z6 with no further stack-up at each higher

substrate.

6.9.1 The open space for the substrate extraction

volume is indicated by dimensions x6 and y7 and is

symmetric about the bilateral and facial datum planes,

respectively. The top of the extraction volume is z7

above the nominal substrate seating plane and its

bottom is half of the minimum z7 dimension above the

nominal substrate seating plane. The cassette must give

extra horizontal clearance once the substrate is picked

up from wherever it ends up (within the bounds of the

substrate pick-up volume) after transport in the cassette.

6.9.2 The open space for the substrate set-down

volume is indicated by dimensions x5 and y6 and is

symmetric about the bilateral and facial datum planes,

respectively. The top of this volume is half of z7 above

the nominal substrate seating plane and its bottom is z6

above the nominal substrate seating plane. The

substrate should be placed within the bounds of the

substrate set-down volume to avoid touching the edge

of the substrate to the side of the cassette.

6.9.3 The substrate pick-up volume is defined by an

area indicated by dimensions x5 and y5 and is

symmetric about the bilateral and facial datum planes,

respectively. Its top and bottom are the upper and

lower tolerance of z6 around the nominal substrate

seating plane. If a substrate is placed in the substrate

set-down volume and is then pushed to the rear of the

cassette, then the entire bottom of the substrate must be

contained in the substrate pick-up volume.

6.10 Pitch and Capacity — Table 2 shows the

different options with regard to the substrate pitch

(spacing) and the cassette capacity.

6.11 Inner and Outer Radii — All concave features

may have as much as a 1 mm (0.04 in.) radius to allow

for cleaning and to prevent contaminant build-up. All

required convex features (such as the robotic handling

flanges, and the corners of the cassette top and bottom

domains) must also have a minimum radius of 1 mm

(0.04 in.) to prevent small contact patches with large

stresses that might cause wear and particles.

Table 1 Cassette Side Domains

Symbol Used Shown in Datum Measured From Boundary or Feature Measured To: Algebraic Relation or Value

r1 Figure 3 center of coupling

exclusion zone

outside edge of coupling exclusion

zone

<15

x1 Figure 2 bilateral datum plane encroachment of cassette side

domains on substrate extraction

volume

57.0×

≥

x2 Figures 2 bilateral datum plane outside edge of cassette side domains

371 +≤ W

x3 Figures 2 bilateral datum plane inside edge of rear cassette domains

401 −≥ x

x4 Figures 2 bilateral datum plane outside edge of rear cassette domains

57.0×

≥

x5Figures 2

and 4

nominal substrate

center line

outside edge of substrate pick-up

volume

21 +≥ W

x6Figures 2

and 4

nominal substrate

center line

encroachment of cassette side

domains on substrate extraction

volume

5x≥

x7 Figures 2 nominal substrate

center line

outside edge of cassette top and

bottom domain

37+

1W≤