semi合集-English.pdf - 第5567页

SEMI P10-0705 © SEMI 1990, 2005 62 <xs:attribute name="p10Start" type="xs:string" use="required" fixed="StartSurfaceDefinition"/> <xs:attribute name="p10End" typ…

SEMI P10-0705 © SEMI 1990, 2005 61

<xs:element name="SurfInspPellTop" type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOnClearPattern"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOnOpaquePattern"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOutsideFrame"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOutsideOnOpaque"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOutsideMembrane"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopInsideMembrane"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopOutsideOnFrame"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellTopInsideOnFrame"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPellBottom"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspGlassSide"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SurfInspPatternSide"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionDefectClear"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="TransmissionDefectDark"

type="xs:double"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

SEMI P10-0705 © SEMI 1990, 2005 62

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartSurfaceDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndSurfaceDefinition"/>

</xs:complexType>

<xs:complexType name="SemPhotoType">

<xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="StartSemPhoto" type="xs:string"/>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoSiteId"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoLocation"

type="XYType"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoMatrixFilename"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdFeature" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdLocationDrawing"

type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="CdDrawing" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoScale"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoTilt"

type="xs:double"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="SemPhotoRotation"

type="xs:double"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartSemPhoto"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndSemPhoto"/>

</xs:complexType>

<xs:complexType name="MaskDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="MaskName" type="xs:string"/>

SEMI P10-0705 © SEMI 1990, 2005 63

</xs:sequence>

<xs:element name="DeliverableMask" type="xs:boolean"/>

<xs:element name="MaskOptions" type="MaskOptionsType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartMaskDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndMaskDefinition"/>

</xs:complexType>

<xs:complexType name="CellDefinitionType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternOptions"

type="PatternOptionsType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="CellInstance"

type="CellInstanceType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="PatternInstance"

type="PatternInstanceType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartCellDefinition"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndCellDefinition"/>

</xs:complexType>

<xs:complexType name="PatternGroupType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternOptions"

type="PatternOptionsType"/>

</xs:sequence>

<xs:sequence minOccurs="0" maxOccurs="unbounded">

<xs:element name="PatternDefinitions"

type="PatternDefinitionsType"/>

</xs:sequence>

<xs:attribute name="groupName" type="xs:string" use="required"/>

<xs:attribute name="p10Start" type="xs:string" use="required"

fixed="StartPatternGroup"/>

<xs:attribute name="p10End" type="xs:string" use="required"

fixed="EndPatternGroup"/>

</xs:complexType>

<xs:complexType name="PatternDefinitionsType">

<xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternName" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">

<xs:element name="PatternVisualId" type="xs:string"/>

</xs:sequence>

<xs:sequence minOccurs="0">