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SEMI E81-0600 © 1999, 2 000 32 Resou rce Control Task Speci fic ation Mat er ial ME S F a cto r y, Area Tra n spo rt and Sto rage Reso urces Fact ory Job, Area Jo b Tra nsp ort Job Tra nsp ort and Sto rag e Jobs Product …

Control/

Requestor

Spec

Resource Material

Requestor

Job

Subjob

Spec

Resource Material

Control

Subjob

Spec

Resource Material

Control

Figure 17

Hierarchical Job Control Pattern

7.3.4.8.2 Placing the job structure template of Figure

13 into the job control hierarchy of Figure 16 results in

the hierarchical job control pattern of Figure 17.

7.3.4.8.3 At each level, the job control

• Receives job requests with associated job

specifications,

• Decomposes the job into subjobs,

• Defines resource relations between the job and

subjob (e.g., selects and schedules resources for

subjobs within the scope of the job supervisor, such

as machines assigned to an area or process

chambers in a production machine),

• Defines material relations between the job and

subjob (e.g. how lots are assigned to transport

groups and process groups, including decisions on

batching, splits, joins, etc.),

• Requests the subjobs and provides associated

subjob specifications,

• Monitors subjob progress,

• Reports job progress to the job requestor and other

interested functions,

• Records job history.

7.3.4.9 CIM Framework Job Structure Summary

7.3.4.9.1 Figure 18 shows the job hierarchy pattern

applied to the material movement resources of Figure 7.

Figure 19 shows the pattern of Figure 17 applied to the

material processing resources of Figure 7 (branching to

multiple lower-level resources is not shown). Figure 20

summarizes how the CIM Framework components

come together into an integrated manufacturing

execution system.

• The product material hierarchy and genealogy is

modeled in the Product Management components

of the CIM Framework Specification.

• The task specification hierarchy is modeled in the

Specification Definition and Recipe Management

components.

• The resource hierarchy is modeled in the Factory

Operations (for Factory and Area levels),

Equipment Tracking and Maintenance, Durables

and Consumables Management, and Factory Labor

components.

• The control hierarchy is modeled in the Factory

Operations (Factory Jobs), Production Machine

(Production Machine Jobs), Material Transport and

Storage (Transport Jobs), and the maintenance job

supervision aspects of the various Resource

Tracking and Maintenance specializations

(Maintenance Jobs).

Resource Control

Task

Specification

Material

MES Factory,

Area

Transport

and Storage

Resources

Factory Job,

Area Job

Transport

Job

Transport

and

Storage

Jobs

Product Group,

Lot,

Process Group

Transport

Group

Container

Destination

Transport

Machine

Equipment

Manufacturing

Execution

Figure 18

Hierarchical Job Control - Material Transport Aspects

Equipment

Enterprise

Manufacturing

Execution

Resource Control

Task

Specification Material

MESFactory

Area

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Process

Resource

Job

ProductGroup,

Lot, LotFamily,

Inventory Region

Inventory Region,

Process Group

Process

Group

Product Request,

ProductSpec.,

ProcessDefinition

Process Operation

Sequence

Process Operation

Sequence

Process Operation

Spec,

Process Operation

Enterprise Job

Enterprise

Order,

OrderItem

Process

Resource

Group

Figure 19

Hierarchical Job Control - Material Processing Aspects

Resource Control

Task

Specification Material

MESFactory

Area

Production

Machine

Process

Resource

Factory Job

Area Job

Production

Machine

Job

Process

Resource

Job

Order,

OrderItem

ProductGroup,

Lot, LotFamily,

Inventory Region

Inventory Region,

Process Group

Process

Group

Process

Resource

Group

Product Request,

ProductSpec.,

ProcessDefinition

Process Operation

Sequence

Process Operation

Sequence

Process Operation

Spec,

Process Operation

Enterprise Job

Enterprise

Product

Management

Specification

Recipe

Management

Factory

Operations

Process Machine,

Advanced Process Control

Factory

Resource,

Tracking and

Maintenance

Equipment,

Durables and

Consumables

Resource, Tracking

and Maintenance

Process Automation

(out of scope)

Enterprise

(out of scope)

Figure 20

Integrated Hierarchical Job Control

7.3.4.9.2 As Section 7.3.3.3 describes, each of these

job control views shows a job supervision function that

performs the tasks for each level of the factory resource

hierarchy.

7.3.4.9.2.1 Factory Job Supervision: Factory

Operations satisfies enterprise product requests. It

releases material and creates Factory Jobs which drive

material work-in-progress through its process flow. The

Factory Job Executor requests, schedules, monitors and

coordinates supporting jobs: production machine jobs,

transport jobs, maintenance jobs, etc.

7.3.4.9.2.2 Area Job Supervision: This optional level

serves Factory Operations and is responsible for

multiple machine activities (areas may map to bays, cell

controllers, linked lithography, etc.). This level is not

required, but is available for organizing large factories.

Area job supervision could support factories that have a

factory within a factory model with separate but

integrated operations management for separate units of

manufacturing capacity. It could also support factories

transitioning from legacy systems, with parts of the

factory under a CIM Framework-conformant MES and

other parts under a legacy MES that is fronted or

wrapped by a CIM Framework conformant Area Job

Supervisor component. Another example could be a

factory that provides a pseudo-cluster cell controller to

group stand-alone process equipment into an integrated

workcell that behaves like a cluster tool. The CIM

Framework does not specify separate Area Job

Supervision interfaces. These functions are met by the

Production Machine Job interfaces with no changethe

same interface serves both functional roles. Areas

typically receive a sequence of process jobs as a request

(implemented by requesting lower-level process jobs

and material transport jobs), whereas simple machines

usually receive a single process job (implemented

through direct interaction with process equipment).

7.3.4.9.2.3 Machine Job Supervision: This level lies

within the CIM Framework Production Machine

component. It accepts activities that apply to a single

Machine. It delegates work directly to the physical

equipment, either through some equipment interface

driver or directly through the GEM/SECS interface.

7.3.4.9.2.4 Transport Job Supervision: This level lies

within the Material Transport and Storage component.

It takes requests to move material from one location to

another. While the CIM Framework provides for layers

of Transport Job Supervisors in a complex interbay and

intrabay material handling system, today’s typical

installation has a single material handling system

controller (a single Transport Job Supervisor). Complex

production machines with internal material handling

and storage may also be Transport Job Supervisors.

7.3.4.9.2.5 Maintenance Job Supervision: Maintenance

is a preventive (scheduled) or reactive (repair on

failure) activity on specific resources (machines,

durables, etc.) using labor resources and materials.

Maintenance job progress is reported and tracked and

maintenance job history is stored. The generic Resource

Tracking and Maintenance component defines the