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SEMI E42-0704 © SEMI 1995, 2004 121 Other exam ples would be sim ilar. Interactions are primarily with external service users of namespace and recipe execution capabilities, and between namespace managers and recipe exec…
SEMI E42-0704 © SEMI 1995, 2004 120
BAKE;2.3 BakeTime undefined for unlinked recipe
R1-6 Applications of Object Services
Object Services are defined in SEMI E39 (Object Services Standard (OSS): Concepts, Behavior, and Services). This
section provides a description of how these services may be applied for RMS.
R1-6.1 Scope — Scope may be used to specify the namespace of interest. It may also be used to specify a
namespace or recipe execution resource belonging to a component agent of the service provider. For example, scope
allows a factory host to ask a cluster tool for the attributes of a cluster module.
Scope may be used to point to one of several namespaces supported by an agent.
R1-6.2 Filter — A filter may be used when asking a namespace for a list of recipe identifiers to limit the number of
identifiers returned. For example, the service user may ask a namespace for a list of recipe identifiers that were
edited by “Tom” (Attribute name = “EditedBy”, Attribute value = “Tom”, Attribute Relation = “is equal to”) and
that are linked (Attribute name = “Linked”, Attribute value = “TRUE”, Attribute Relation = “is equal to”).
R1-6.3 Complex Attributes — Object Services do not provide a way to change individual elements in an attribute
with a structure or list form. To add, delete, or modify items in a list or structure, it is necessary to first get the
current attribute value for the object of interest using the GetAttr service, to make the desired changes externally to
the value, and then to write the new value using the SetAttr service.
R1-7 Examples of RMS Application
Figure R1-2 illustrates possible interactions between a namespace and namespace manager implemented on a
factory system, a diskless equipment with a recipe executor, and an operator.
Figure R1-2
Example of RMS Applications
SEMI E42-0704 © SEMI 1995, 2004 121
Other examples would be similar. Interactions are primarily with external service users of namespace and recipe
execution capabilities, and between namespace managers and recipe executors.
Namespaces do not interact with one another. To copy a recipe from one namespace to another, an intermediary is
required. This is not covered by RMS.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer's instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
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the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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SEMI E42.1-0704 © SEMI 1996, 2004 1
SEMI E42.1-0704
STANDARD FOR SECS-II PROTOCOL FOR RECIPE MANAGEMENT
STANDARD (RMS)
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be
published July 2004. Originally published in 1996; previously published September 1997.
1 Purpose
1.1 This document maps the services and data of the
parent document to SECS-II streams and functions and
data definitions.
2 Scope
2.1 This document applies to all implementations of
Recipe Management that use the SECS-II message
protocol (SEMI E5).
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E42 — Recipe Management Standard: Concepts,
Behavior, and Message Services
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 Terminology
None.
5 Service Mapping
5.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the services defined in RMS.
5.2 Request and notification messages are mapped to
primary (odd-numbered) SECS-II functions and
response messages are mapped to secondary (even-
numbered) SECS-II functions.
5.3 In several cases, a common set of parameters
allows more than one RMS services to be mapped to a
single stream and function, with an additional SECS-II
data item used to differentiate between the two services.
RMNCreateNS and RMNDeleteNS both map to
S15,F3/F4, RMNCreate and RMNUpdate both map to
S15,F13/14, and RMNCopy and RMNRename both
map to S15,F19/20.
5.4 In addition, the notification messages RMNCom-
plete, RMEComplete, RMEChange, RMDComplete,
and RMDNotify all map to S6,F25/F26.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Name
RMNCreateNS S15,F3/F4 Recipe Namespace Action Request/Acknowledge
RMNDeleteNS S15,F3/F4 Recipe Namespace Action Request/Acknowledge
RMNRenameNS S15,F5/F6 Recipe Namespace Rename Request/Acknowledge
RMNSpaceInquire S15,F7/F8 Recipe Space Request/Data
RMNRcpStatInquire S15,F9/F10 Recipe Status Request/Data
RMNVersionInquire S15,F11/F12 Recipe Version Request/Data
RMNCreate S15,F13/F14 Recipe Create Request/Acknowledge
RMNUpdate S15,F13/F14 Recipe Create Request/Acknowledge
RMNStore S15,F15/F16 Recipe Store Request/Acknowledge
RMNRetrieve S15,F17/F18 Recipe Retrieve Request/Data
RMNCopy S15,F19/F20 Recipe Rename Request/Acknowledge
RMNRename S15,F19/F20 Recipe Rename Request/Acknowledge