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SEMI F16-94 © SEMI 1994, 2004 3 1/2" 1.32 mm (0.052" ) 3/4" , 1" , 1 1/2" , 2" , 3" 1.75 mm (0.069" ) 4" , 6" 2.11 mm (0.083" ) 16 Quality Assurance Requ irements Th…
SEMI F16-94 © SEMI 1994, 2004 2
7 Manufacture
7.1 Tubing shall be made by the seamless process for
all sizes, except that welded tubing may be acceptable
for nominal sizes 3 inches and above in diameter if the
permissible variations in outside diameter are in
accordance with Table 2 of ASTM A 270 and the other
criteria specified herein are met.
7.2 Tubing must be cold finished.
8 Heat Treatment
8.1 All tubing shall be furnished in the heat treated
condition in accordance with the section on Heat
Treatment in ASTM A 269. If grain size is restricted by
the supplementary requirement specified in Section
17.2 of this specification, the minimum annealing
temperature shall not apply, provided that the tubing
passes the intergranular corrosion test of Section 13 of
this specification.
8.2 All tubing shall be vacuum annealed, or bright
annealed in an undiluted hydrogen atmosphere,
followed by rapid cooling. The adequacy of the cooling
rate shall be confirmed by the intergranular corrosion
test of Section 13 of this specification.
9 Surface Condition
The surface condition of tubing shall be in accordance
with the requirements of the section on Finish of ASTM
A 270.
10 Cleanliness
10.1 Tubing shall be supplied in accordance with the
supplementary requirement for Cleanliness of ASTM A
632.
10.2 Tubing surface shall be sealed with polyethylene
caps after being purged with nitrogen or a suitable inert
gas. Capped tubing shall be heat sealed in a single 0.15
mm (6 mil) polyethylene bag.
11 Chemical Composition
11.1 Chemical composition of the steel shall conform
to the requirements of the section on Chemical
Composition in ASTM A 269 for nominal sizes 1/2
inch diameter and larger and to the section on Chemical
Composition in ASTM A 632 for nominal sizes smaller
than 1/2 inch diameter.
11.2 Sulfur content shall be from 0.003% to 0.010%
for all nominal sizes.
12 Mechanical Properties
12.1 Tubing shall conform to the applicable
requirements of ASTM A 450/A 450M unless
otherwise provided herein.
12.2 Hardness of all sizes shall conform to the section
on Hardness Requirements of ASTM A 269.
12.3 Tensile properties of all sizes shall conform to the
section on Mechanical Properties of ASTM A 632.
13 Metallurgical Requirements
Tubing shall pass an intergranular corrosion test
conducted in accordance with the supplementary
requirement for Intergranular Corrosion Test of ASTM
A 262. A minimum of two samples per lot shall be
tested.
14 Nondestructive Testing Requirement
14.1 Eddy current testing shall be performed in
accordance with the procedure and evaluation outlined
in the section on Nondestructive Electric Test of ASTM
A 450/A 450M except that the calibration reference
notches shall not exceed 10% of the specified wall
thickness of the tubing or 0.075 mm (0.003 inches),
whichever is greater. If the form of product supplied
makes this test technically infeasible, alternative non-
destructive testing methods shall be agreed upon by the
purchaser and supplier.
14.2 At the option of the purchaser, hydrostatic testing
shall be conducted and evaluated in accordance with the
requirements of the section on Hydrostatic Test of
ASTM A 450A/450M.
15 Permissible Variations in Dimensions
15.1 Sampling for dimensional variations shall be
performed in accordance with MIL-STD-105 with
double normal sampling and a 2 1/2% Acceptable
Quality Level (AQL).
15.2 The permissible variations in dimensions shall be
as outlined in Table 2 of ASTM A 270 for all sizes.
15.3 Nominal wall thickness for tubing to be finished
as shown in Table 1. The finished thicknesses must also
comply with ANSI/ASME B31.1 and B31.3
specifications for the intended service temperature and
pressure. A tolerance of ± 10% shall apply to the wall
thicknesses specified.
Table 1 Nominal Wall Thickness for Various Tube
Nominal Sizes
Nominal O.D. Tube Wall Thickness
1/4" , 3/8" 1.02 mm (0.040" )
SEMI F16-94 © SEMI 1994, 2004 3
1/2" 1.32 mm (0.052" )
3/4" , 1" , 1 1/2" , 2" , 3" 1.75 mm (0.069" )
4" , 6" 2.11 mm (0.083" )
16 Quality Assurance Requirements
The supplier’s quality assurance program shall meet the
requirements of the ASME Boiler and Pressure Vessel
Code, Section III, NCA-3800 or of ISO 9000.
17 Supplementary Requirements
The following supplementary requirements shall apply
only when specified by the purchaser on the inquiry,
contract, or order.
17.1 Alternative Finish (Inside Surface) — The
purchaser may specify alternate chemical treatment for
the inside surface. Such treatment shall not promote
grain boundary attack; the intergranular corrosion test
requirement of Section 13 shall apply after chemical
treatment.
17.2 Restricted Grain Size — At the option of the
purchaser, ASTM grain size number may be restricted
to 7 or finer, per ASTM E 112, provided that a
maximum hardness lower than that given in the section
on Hardness Requirements of ASTM A 269 is not also
imposed.
18 Certification
18.1 The supplier shall provide the following reports
and certifications with all shipments of tubing:
18.1.1 Type of tubing (seamless or welded)
18.1.2 Size (nominal outside diameter and nominal
wall thickness)
18.1.3 Material composition report shall be provided to
verify the above required grade, sulfur content, and
grain size
18.1.4 Tubing provided in accordance with this
specification shall be mill and heat traceable and
permanently etched for correspondence to the
applicable mill test reports.
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI F17-95 © SEMI 1995, 2004 1
SEMI F17-95 (Withdrawn 0704)
SPECIFICATION FOR HIGH PURITY QUALITY ELECTROPOLISHED
316L STAINLESS STEEL TUBING, COMPONENT TUBE STUBS, AND
FITTINGS MADE FROM TUBING
This specification was technically reapproved by the Global Gases Committee and is the direct responsibility
of the North American Gases Committee. Current edition approved by the North American Regional
Standards Committee on October 25, 2002. Initially available at www.semi.org December 2002; to be
published March 2003. Originally published in 1995.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Purpose
1.1 The purpose of this specification is to define the
ordering, surface condition, and quality assurance
requirements for high purity quality electropolished
316L stainless steel tubing, component tube stubs, and
fittings made from tubing.
2 Scope
2.1 This specification defines the special criteria for
nominal sizes of electropolished 316L stainless steel
tubing, component tube stubs, and fittings made from
tubing for use in high purity chemical (gas or liquid)
distribution systems in semiconductor manufacturing
facilities.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Referenced Standards
3.1 SEMI Standard
SEMI F16 — Specification for 316L Stainless Steel
Tubing Which Is to Be Finished and Electropolished for
High Purity Semiconductor Manufacturing
Applications
3.2 ANSI/ASME Standards
1
B31.1 — Power Piping
B31.3 — Chemical Plant and Petroleum Refinery
Piping
B46.1 — Surface Texture: Surface Roughness,
Waviness, and Lay
1 American Society of Mechanical Engineers, United Engineering
Center, 345 East 47th Street, New York, NY 10017
3.3 ASTM Standards
2
A 269 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing for General Service
A 632 — Specification for Seamless and Welded
Austenitic Stainless Steel Tubing (Small Diameter) for
General Service
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
4 General Requirements
4.1 The finished tubing, component tube stubs, and
fittings made from tubing furnished under this
specification shall use the tubing governed by SEMI
F16 and shall meet the additional finish requirements
herein.
5 Ordering Information
5.1 Orders for finished tubing, component tube stubs,
or fittings made from tubing under this specification
shall include the following, as a minimum, to describe
the item:
• Quantity (meters, feet, number of items, or number
of lengths),
• Type of tubing (seamless or welded),
• Size (nominal outside diameter and wall thickness),
• Length (specific or random), and
• Other specific dimensions (such as for fittings).
6 Surface Condition
6.1 The internal surface of all finished tubing,
component tube stubs, and fittings made from tubing
shall be electropolished.
2 American Society for Testing and Materials International, 100 Barr
Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555 Website:
http://www.astm.org