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SEMI E54.3-0698 © SEMI 1998, 2004 16 Table 21 Sensor A I-MF Object Behavior State Transition Matrix # Current State Trigger New State Action Comments 4 NORMAL OPERATING Get Attribute, Set Attribute, Restore Defaults requ…

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8.4.3.2 Sensor-AI-MF OPERATING Application Process–Flow Totalizer — The value of the flow totalizer attribute
is incremented at a rate of once every cubic centimeter of gas flow. Whenever the flow totalizer attribute reaches its
maximum allowed value, it no longer is incremented and remains at the maximum value.
8.4.3.3 Sensor-AI-MF OPERATING Application Process–Flow Hours — The value of the flow hours attribute is
incremented at a rate of once every hour. Whenever the flow hours attribute reaches its maximum allowed value, it
no longer is incremented and remains at the maximum value.
8.4.3.4 Sensor-AI-MF ZEROING Application Process — The Zeroing application process is described as follows:
Certain manufacturer-specified service requests may be sent to other objects. The value of offset is set such that
value is nulled to zero. The Sensor-AI-MF object instance determines, using a manufacturer-specified method, when
a Zeroing application process is completed.
8.4.3.4.1 If a Perform Zero Offset: Command = 2 (cancel) service request is received while in the ZEROING state,
the original value of the offset attribute is restored, and the process is considered Failed. If a Perform Zero Offset:
Command = 0 (set offset attribute to zero) service request is received while in the ZEROING state, the offset
attribute is set to zero, and the process is considered Failed. If a Perform Zero Offset: Command = 1 (calculate
offset) service request is received while in the ZEROING state, the process is simply restarted.
8.4.3.4.2 Upon completion, the appropriate Pass or Fail service response is reported to the requesting object
instance, and an internal Operate service request to this object is generated.
8.4.3.4.3 The Sensor-AI-MF object instance supports the additional behavior sub-states (defined in Figure 3) within
the OPERATING state. Table 20 defines the additional sub-states, and Table 21 defines the additional state
transitions specified for this object.
NOT
ZEROING
ZEROING
OPERATI NG
13
14
15
Figure 3
Sensor-AI-MF Object Behavior Additional Sub-States
Table 20 Sensor-AI-MF Object Behavior State Descriptions
State Description
NOT ZEROING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
ZEROING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
Additionally, the Sensor-AI-MF object instance is running the Sensor-AI-MF ZEROING application process.
SEMI E54.3-0698 © SEMI 1998, 2004 16
Table 21 Sensor AI-MF Object Behavior State Transition Matrix
# Current State Trigger New State Action Comments
4 NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults request,
Perform Zero Offset request
(command ≠ 1)
NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults appropriate
response
Valid for all sub-
states of NORMAL
OPERATING.
13 NOT ZEROING Perform Zero Offset request
(command = 1)
ZEROING Run the ZEROING application
process. Set zeroing status to
Zeroing.
14 ZEROING Operate request or Perform
Zero Offset request
(command ≠ 1)
NOT ZEROING Resume the OPERATING
application process. Set zeroing
status to Not Zeroing. Report
appropriate service response.
The mechanism for
reporting is
network-specific.
15 ZEROING Perform Zero Offset request
(command = 1)
ZEROING Restart the ZEROING
application process.
8.4.3.5 Sensor-AI-MF AUTORANGING Application Process — The Sensor-AI-MF object instance supports the
additional behavior sub-states (defined in Figure 4) within the OPERATING state. Table 22 defines the additional
sub-states, and Table 23 defines the additional state transitions specified for this object.
8.4.3.5.1 The object instance is automatically selecting gas calibrations based on a manufacturer's specified method.
This method may include a determination based on the value of the value attribute and/or on the value of the
setpoint value attribute.
NOT
AUTORANGING
AUTORANGING
OPERATING
16
17
18
Figure 4
Sensor-AI-MF Object Behavior Additional Sub-States
Table 22 Sensor-AI-MF Object Behavior State Descriptions
State Description
NOT AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
AUTORANGING The Sensor-AI-MF object instance is running the Sensor-AI-MF OPERATING application process.
Additionally, the Sensor-AI-MF object instance is running the Sensor-AI-MF AUTORANGING
application process (defined above).
SEMI E54.3-0698 © SEMI 1998, 2004 17
Table 23 Sensor-AI-MF Object Behavior State Transition Matrix
# Current State Trigger New State Action Comments
4 NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults request,
Autorange request
(command = 0)
NORMAL
OPERATING
Get Attribute, Set Attribute,
Restore Defaults appropriate
response
Valid for all sub-
states of
NORMAL
OPERATING.
16 NOT
AUTORANGING
Autorange request
Command = 1
AUTORANGING Run AUTORANGING
application process. Set
Autoranging status to
Autoranging.
17 AUTORANGING Autorange request
Command = 0
NOT
AUTORANGING
Halt the Autoranging application
process. Set Autoranging status to
Not Autoranging.
18 AUTORANGING Autorange request
Command = 1
AUTORANGING No change.
8.5 Sensor-AI-AT Object — The Sensor-AI-AT object is an Ambient Temperature object instance which inherits
attributes, services, and behavior from the Sensor-AI object as defined in SEMI E54.1. The Sensor-AI-AT object
instance is the device component responsible for retrieving a reading from a physical temperature sensor and making
the value available to the network.
8.5.1 Sensor-AI-AT Object Attributes — The inherited value attribute represents the ambient temperature
measurement. There are no additional attributes defined for this object in this document.
8.5.2 Sensor-AI-AT Object Services — There are no additional services defined for this object in this document.
8.5.3 Sensor-AI-AT Object Behavior — The behavior exhibited by the Sensor-AI-AT object instance is defined in
SEM E54.1. Additional specific behavior associated with the Sensor-AI-AT object is defined below.
8.5.3.1 Sensor-AI-AT OPERATING Application Process — A reading is retrieved from a physical temperature
sensor. This reading may be corrected with a manufacturer-specified algorithm. This corrected reading becomes the
input to the offset and gain formula to generate the value attribute as referenced in SEMI E54.1.
8.6 Assembly-MFM Object — The Assembly-MFM object inherits attributes, services, and behavior from the
Assembly object. The Assembly object instance is the device component which provides a mechanism of grouping
more than one attribute from one or more object instances into a single data structure for access over the network.
8.6.1 Assembly-MFM Object Attributes
Table 24 Assembly-MFM Object Attributes
Attribute Name
Attribute
Identifier
Access Network
Required
Form
Data A1 R Yes Structure as defined below.
8.6.1.1 Data — An attribute with the following list of attributes within its structure:
Table 25 Assembly-MFM Data List
Data Index Source Object ID Source Attribute ID Description
1 DM1 A12 Device Manager
Exception Status
2 MFD3 A4 Sensor-AI-MF
Value