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SEMI F96-0704 © SEMI 2004 1 SEMI F96-0704 SPECIFICATION FOR PORT CONF IGURATION OF CANISTERS TO CONTAIN LIQUID CVD PRECURSORS This specification was technically approved b y the Globa l Gases Com mittee and is the direct…

SEMI F95-0304

R1-4 Design Example 4

R1-4.1 Seal Design — See Figure R1-4.

R1-4.2 Surface Hardness — The sealing surface (the bottom of the counterbore) has a minimum hardness of 300

Vickers. The hardness may be tested per ISO 6507.

R1-4.3 Surface Roughness — The sealing surface (the bottom of the counterbore) has a surface roughness of 0.2

micrometers Ra max. The surface roughness may be tested per SEMI F37-0299.

R1-4.4 Surface Scratches — The sealing surface (the bottom of the counterbore) is without any lateral scratches

which are visible to non-magnified normal vision.

Figure R1-4

Design Example 4

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer' s instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F96-0704 © SEMI 2004 1

SEMI F96-0704

SPECIFICATION FOR PORT CONFIGURATION OF CANISTERS TO

CONTAIN LIQUID CVD PRECURSORS

This specification was technically approved by the Global Gases Committee and is the direct responsibility of

the North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on April 22, 2004. Initially available at www.semi.org June 2004; to be published July 2004.

1 Purpose

1.1 This document specifies the type, size and spacing

of connectors to be used on metal (e.g. stainless steel)

canisters for liquid chemical precursors, solutions and

solvents.

2 Scope

2.1 This document applies to metal (e.g. stainless steel)

canisters to be used for “liquid precursors” (see

definition) including solutions of precursors in solvents.

It also applies to containers for solvents used for in situ

cleaning of delivery system.

2.2 The liquid connection ports (inlet and outlet) are

included, as are pneumatic connections to valves.

2.3 Parameters such as overall canister dimensions are

expected to be specified by other standards.

NOTICE: This document does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standard

SEMI F66 — Specification for Port Marking and

Symbol of Stainless Steel Vessels for Liquid Chemicals

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 canister — a metal (usually stainless steel)

container in which a liquid precursor is supplied.

Canisters are also known as “ampoules”, “shuttle

drums”, “ tanks”, etc.

4.1.2 liquid precursor — a liquid precursor is a

chemical supplied as a liquid and used in Chemical

Vapor Deposition (CVD). Many liquid precursors are

toxic, reactive and air-sensitive.

5 Ports

5.1 A canister has a gas inlet port and a liquid outlet

port. The outlet port is equipped with a dip-tube,

marked according to SEMI F66. Note that a canister

may be used as a bubbler, by using the dip-tube port as

the gas inlet. In this standard however, liquid delivery

is assumed and the dip-tube port will be referred to as

the “outlet”.

5.2 Canisters up to 100 liters in volume:

5.2.1 The ports will be located with the dip tube at the

3 o’clock position and the gas inlet at the 9 o’clock

position, as illustrated in Figure 1.

Figure 1

Port Configuration

5.2.2 Both ports shall be fitted with ¼” O.D. face-seal

connectors.

5.2.3 The port separation (L in the Figure) shall be

76 mm or 146 mm, + /- 4 mm, the value to be chosen

according to the diameter of the canister.

5.3 For canisters greater than 100 liters in volume, the

outlet port shall be in the center, the port separation 152

+ /- 4 mm, and the port connections ½” O.D. face-seal.

5.4 The connector shall be male on the gas inlet port

and female on the dip tube port.

5.5 The height difference between the tops of the ports

will be no more than 0.5 mm.

5.6 Additional ports may be provided so long as they

do not interfere with the above specifications.

NOTE 1: The user of this standard should evaluate the

consequences of connecting a given precursor to a point

intended for other precursors. The nature of the precursor

itself and of the other precursors expected to be in use at the

same location should be taken into account. Consider

packaging precursors with a non-standard connector on the

canister outlet if necessary to avoid a dangerous situation.

6 Valves

6.1 The inlet and outlet port are each provided with a

valve but the details of those valves are not specified

here. If pneumatic valves are provided, the pneumatic

connection shall be a 1/8” quick-connect type.

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.