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SEMI F62-0701 © SEMI 2001 7 Figure 4 Gas Temperature Test Procedure Flow Chart Te=25 O C Tg=Te N=1 Record Tg, Te, Qa Tg=Te+10 O C Record Tg, Te, Qa N=5 N=N+1 End MFC Setpoint N=1 0% N=2 25% N=3 50% N=4 75% N=5 100% No Ye…

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SEMI F62-0701 © SEMI 2001 6
Figure 3
Ambient Temperature Test Procedure Flow Chart
Install DUT
M=1
Tem=Tmin
MFC Setpoint
N=1 0%
N=2 25%
N=3 50%
N=4 75%
N=5 100%
Record Tem &
Qam @ time
intervals 10 Times
N=5
Setpoint=0
N=N+1
Set
Te=Te(M+1)
Record Te and Qind for zero
setpoint @ time intervals
Te Stable?
M=8 ?
END
M=M+1
No
Yes
No
Yes
Yes
No
SEMI F62-0701 © SEMI 20017
Figure 4
Gas Temperature Test Procedure Flow Chart
Te=25
O
C
Tg=Te
N=1
Record Tg, Te, Qa
Tg=Te+10
O
C
Record Tg, Te, Qa
N=5N=N+1
End
MFC Setpoint
N=1 0%
N=2 25%
N=3 50%
N=4 75%
N=5 100%
No
Yes
SEMI F62-0701 © SEMI 2001 8
Figure 5
Steady State Ambient Temperature Effects
Figure 6
Transient Ambient Temperature Effects
100
∆=
% Reading
-100
100
0
∆=
Temp
O
C
Time (Hr)
+100
0
-100
1
Tmin
Tmax