semi合集-English.pdf - 第240页

SEMI E35-0305 © SEMI 1995, 2005 9 where i and k are the number of prim ary ca tegories and cost elements, respectively, in Tables 1 and 2. F ij and R km are the detailed elements, each of whic h is defined in Tables 1 an…

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SEMI E35-0305 © SEMI 1995, 2005 8
For CEO calculations, ER is a whole number. Thus, a fractional result from Equation 5 is increased to the next
larger whole number to represent whole pieces of equipment.
7 Reporting Results
7.1 Reports on COO should always show the following items. Other data items should be reported as required by
clarity.
7.1.1 Input Items
7.1.1.1 Identification of standard conformance
7.1.1.2 Identification of constraint conditions
7.1.1.3 Declarations
7.1.1.3.1 Summed categories: all or enumerate
7.1.1.3.2 Volume requirement
7.1.1.3.3 Operational uptime
7.1.1.3.4 Equipment throughput
7.1.1.3.5 Number of pieces of equipment and chambers
7.1.2 Output Items
7.1.2.1 Cost per unit
7.1.2.2 Cost distribution
7.1.2.3 Related statistics
8 Procedures
8.1 COO Calculation
8.1.1 The COO algorithm requires the specification or calculation of the volume level, the determination of the
number of pieces of equipment required to process the volume, the enumeration of all fixed and recurring costs
associated with processing the volume by the equipment, and the yield-related costs. The COO metric is a function
defined by Equation 6 to be:
COO = CEO + CYL (6)
The CYL is given by Equation 7. The CEO component is described in Equation 8 and is expressed in Equation 9 as
the sum of a number of cost categories. Constrained versions of COO exclude certain cost categories from the
calculation.
8.2 Cost of Yield Loss
where the recurring scrap cost elements are given in Table 3.
8.3 Cost of Equipment Ownership
annualized annualized ER
CEO = fixed cost per + recurring cost per × (8)
e
q
ui
p
ment units lost to DYL GUE
p
er
y
ear
annualized annualized annualized 1
CYL = cost of units + attributed cost of + attributed cost of × (7)
lost to EY units lost to DYL units lost to PYL GUE
p
er
y
ear
SEMI E35-0305 © SEMI 1995, 2005 9
where i and k are the number of primary categories and cost elements, respectively, in Tables 1 and 2. F
ij
and R
km
are the detailed elements, each of which is defined in Tables 1 and 2.
9 Cost Elements
9.1 Cost elements are expanded into further items and then summed.
9.2 Constrained versions of the COO calculation are created by defining a modification of the calculation such as
the way yield is included or in restricting the items in a cost element that are used. This set is similar to the original
Sematech COO model.
NOTE 6: Default values for some cost elements are given in Related Information 2.
Table 1 Elements of Fixed Cost by Category
Category (i) Cost Element (j) Description Method
Equipment Acquisition Costs of acquiring the piece of
equipment.
Expressed in terms of equipment cost (i.e., purchase
price), transportation, taxes, duties, actual burdened
costs for labor-hours of effort multiplied by the
number of hours for each equipment user’s
personnel type, etc. May be allocated to annual
costs using any accepted depreciation schedule
(e.g., straight-line, double declining balance).
Equipment Installation Costs of installing the piece of
equipment for production.
Expressed in terms of actual burdened costs for
labor-hours of effort multiplied by the number of
hours for each equipment user’s personnel type and
cost of materials.
Equipment Training Costs of the initial training
requirements for the new piece of
equipment for operators,
supervision, engineers, and
maintenance personnel.
Expressed in terms of actual burdened costs for
labor-hours of training multiplied by the number of
training hours and training course costs, if
applicable, for each equipment user’s personnel
type. Note that depending on accounting rules,
some training may be included as part of the
equipment acquisition cost.
Equipment Qualification Costs of qualifying the piece of
equipment for production
including acceptance testing
Expressed in terms of actual burdened costs for
labor-hours of effort multiplied by the number of
hours for each equipment user’s personnel type and
cost of materials.
Equipment Decommissioning Costs of removing the piece of
equipment from production.
Expressed in terms of actual burdened costs for
labor-hours of effort multiplied by the number of
hours for each equipment user’s personnel type and
costs of transportation and materials. May deduct
the salvage value from the fixed costs.
Facilities Moves and
Rearrangements
Costs of displacing an existing
piece of equipment in order to
install the new piece of
equipment.
Expressed in terms of actual burdened costs for
labor-hours of effort multiplied by the number of
hours for each equipment user’s personnel type and
costs of transportation and materials.
Facilities Floor Space Costs of the cleanroom overhead
allocated to the piece of
equipment.
Multiply the cost footprint of the piece of
equipment by the cost of cleanroom space for each
class of cleanroom space used.
#1
#1
The cost of cleanroom space per unit area of effective usable production space includes both the fixed and recurring operations costs as
determined by a separate COO analysis outside the scope of this document.
ER
= F + R × (9)
GUE
p
er
y
ear
ij
ij
km
km
SEMI E35-0305 © SEMI 1995, 2005 10
Table 2 Elements of Recurring Costs by Category
Category (k) Cost Element (m) Description Method
Consumable Consumable Parts Cost of all parts of the piece of
equipment that are worn out by
the process operation of the piece
of equipment and require
replacement after less than 1 year
of operation.
Expressed in terms of cost per piece of equipment
per year.
Consumable
Monitor Units Costs of all test and filler units
consumed in the support of the
piece of equipment.
Multiply the number of monitor units consumed per
piece of equipment by the cost of each type of
monitor unit.
#1
Consumable
Utilities Costs of all utilities (e.g.,
electricity, city water, ultrapure
water, process cooling water,
natural gas) used by the piece of
equipment.
Multiply the annual amount of each utility used per
piece of equipment by the unit cost of each type of
utility.
Consumable
Supplies Cost of all supplies used by, or in
support of, the piece of equipment
(e.g., bulk gases, specialty gases,
specialty chemicals).
Multiply the annual amount of each supply used per
piece of equipment by the unit cost of each type of
supply.
Consumable
Waste Disposal Costs of removing and treating
spent chemical or effluent.
Multiply the annual amount of each spent chemical
or effluent produced per piece of equipment by the
unit cost of disposal of each type of spent chemical
or effluent. Equipment user may need to deduct the
salvage value, if any, from the costs.
Maintenance
Labor Costs of equipment user’s internal
repair and maintenance labor to
maintain the piece of equipment.
Calculate the number of maintenance labor hours
required for scheduled and unscheduled downtime
based on using SEMI E10 metric inputs. Multiply
the actual burdened costs for labor-hours of effort
multiplied by the number of hours for each
equipment purchaser’s personnel type. Equipment
user may need to adjust actual hours required due to
warranty and service contract coverage. Note that
operation labor hours are not included in this
category.
Maintenance
Spare Parts Costs of spare parts inventory for
equipment user.
Expressed in terms of cost per piece of equipment
per year. Note that depending on accounting rules,
an initial set of spare parts may be included as part
of the equipment acquisition cost, a fixed cost.
Maintenance
Repair Parts Costs of repair parts charged to
the equipment user.
Expressed in terms of cost per piece of equipment
per year. Equipment user should not double count
the cost of a part as both a spare part and a repair
part.
Maintenance
Service Contract Costs of service contract charged
to the equipment user.
Expressed in terms of cost per piece of equipment
per year.
Labor
Operation Costs of the operator labor
required to support the equipment
set needed to meet the wafer start
requirements of the equipment
user.
Calculate the number of operator labor hours
required based on equipment and manufacturing
specifications. Multiply the actual burdened costs
for labor-hours of effort by the total number of
hours for equipment purchaser’s operators.
Labor
Supervision Costs of the supervision labor
required to support the equipment
set needed to meet the wafer start
requirements of the equipment
user.
Calculate the number of supervision labor hours
required based on equipment and manufacturing
specifications. Multiply the actual burdened costs
for labor-hours of effort by the total number of
hours for equipment purchaser’s supervisors.