semi合集-English.pdf - 第5607页

SEMI P10-0705 © SEMI 1990, 2005 102 < x s : e l e m e n t n a m e = " Cd F e a t u r e " t y p e = " x s : s t r i n g " m i n Oc cu r s = " 0 " / > < x s : e l e m e n t n a m e = …

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SEMI P10-0705 © SEMI 1990, 2005 101
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Mea sur edClosure Loca t ion"
type
= " xs:st r ing" m inOccurs= " 0 " / >
< / xs: sequence>
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use
= "r e quir ed"
fixed
= "St a rt ClosureM e asur em ent s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndClosur e M ea su re m e nt s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "CdGroupMe a sure m e nt sType">
- < xs: sequence>
< xs: elem ent nam e= "CdQua lityI d" t ype= "x s:st r ing"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdToneClea r" t ype= "xs:boolea n"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdM orph ogra ph y" t ype= "
xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdPerce nt Clea r " t ype= "x s:double"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "CdPerce nt Clea r W indow "
m inOccurs
= " 0 " >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "W indow Type ">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " xs:in t e ger " use= " required"
fixed
= "4 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "CdTa rge t " t ype= " xs:dou ble"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "CdOr ient a t ion" m inOccurs= " 0 " >
- < xs: sim pleType>
- < xs: rest riction base= " x s:string">
< xs: enum erat ion value= "VERTI CAL" / >
< xs: enum erat ion value= "H ORI ZON TAL" / >
< / xs: restrict ion>
< / xs: sim pleType>
< / xs: elem ent>
< xs: elem ent nam e= "CdPit ch" type= "
xs:dou ble"
m inOccurs= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 102
< xs: elem ent nam e= "CdFea t ure " t ype= " x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdRefe rence On ly" t ype= "x s:boolea n"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdToler a nce" type= "x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdRa n ge" t ype= "x s:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdThr eeSigm a " t ype= "x s:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e
= "CdDevia t ionFrom Tar get "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdDevia t ionFrom Mea n"
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "CdSt d" t ype= "xs:st ring" m inOccurs= "0 "
/ >
< xs: elem ent nam e= "CdCor r e la t ionI d" type= " xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdEquipRe qd" type= "xs:st rin g"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "EquipSit e Reqd
" type= "xs:st r ing"
m inOccurs
= " 0 " m axOccurs= " unbounded" / >
< xs: elem ent nam e= "CdEquipUse d" t ype= "x s:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "EquipSit e Use d" type= "xs:st r in g"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdMea surem ent Da t e "
type
= " x s:dat eTim e" m inOccurs= " 0 " / >
< xs: elem ent nam e= "N um be r OfCds" type= "xs:unsignedI nt "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "CdMea sur em ent "
type
= " CdM e a su r em ent Type " m inOccurs= "0 "
m axOccurs
= "u nbounde d" / >
< xs: elem ent nam e= "Mea su re dCdM e an" t ype= "xs:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdM in" type= " xs:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdM a x" type= " x s:double"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea su re dCdTole r ance "
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdRan ge" t ype= "
xs:double "
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Mea sur e dCdThr e e Sigm a "
type
= " x s:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdD evia t ionFrom Ta rge t "
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sur edCdD evia t ionFrom Mea n"
type
= " xs:dou ble" m inOccurs= " 0 " / >
< xs: elem ent nam e= "Mea sure dCdFileN a m e " t ype= "x s:st r ing"
m inOccurs= " 0 " / >
SEMI P10-0705 © SEMI 1990, 2005 103
< xs: elem ent nam e= "Ope ra t or" t ype= "xs:st r ing"
m inOccurs
= " 0 " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdGroupM e a sur em e nt s" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndCdGr oupMea sure m en t s" / >
< / xs: com plexType>
- < xs: com plexType nam e= "
CdMe a sur em en t Type">
- < xs: sequence>
- < xs: sequence m inOccurs= " 0 ">
< xs: elem ent nam e= "CdSit eI d" type= "x s:st ring"
m inOccurs
= " 0 " / >
- < xs: elem ent nam e= "CdLoca t ion" >
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iV alue "
type
= " x s:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< / xs: sequence>
< xs: elem ent nam e= "Mea sure dCdSiteI d" type= "x s:st ring" / >
- < xs: elem ent nam e= "Mea sure dCdLoca t ion">
- < xs: com plexType>
- < xs: com plexCont ent>
- < xs: ext ension base= "XYCoordType">
< xs: at t ribut e nam e= "p1 0 Mult iValue "
type
= " xs:in t e ger " use= " required"
fixed
= "2 " / >
< / xs: ext ension>
< / xs: com plexCont ent>
< / xs: com plexType>
< / xs: elem ent>
< xs: elem ent nam e= "Mea su re dCd" t ype= "x s:double " / >
< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
= " requir e d" / >
< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt CdMea sur em ent " / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "En dCdM e a sur e m e nt " / >
< / xs: com plexType>
- < xs: com plexType nam e
= "CdSet Re sult sType">
- < xs: sequence>