semi合集-English.pdf - 第4274页

SEMI F79-0703 © SEMI 2003 11 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 160 Difluoromethane 4 CH2F2 CH 2 F 2 Methylene Fluoride 75 Ethyl Chloride 4 C2H5Cl C 2 H 5 Cl Chloroethane or Ethane, Chloro 221 Ethy…

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SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
69 Propylene 3 C3H6 CH
3
CH=CH
2
Propene
319 Styrene 3 C8H8 C
8
H
8
Ethenylbenzene; Un 2055
337 Tertiary Butyl Alcohol 3 C4H10O (CH
3
)
3
COH
182 Tetrahydrofuran 3 C4H8O C
4
H
8
O
181 Toluene 3 C7H8 C
6
H
5
CH
3
Methylbenzene
98 Transbutene 3 C4H8 CH
3
CH=CHCH
3
264 Xylene p- 3 C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene
263 Xylene m- 3 C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene
6.4 Halogenated Hydrocarbons 4
186
2,2 Dichloro 1,1,1
Trifluoroethane
4 C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123
199 Bromochlorodifluoromethane 4 CBrClF2 BrClCF
2
105 Bromotrifluoroethylene 4 C2BrF3 CF
2
CFBr
80 Bromotrifluoromethane 4 CBrF3 BrCF
3
F-13B1, R-13B1
200 Carbon Tetrabromide 4 CBr4 CBr
4
101 Carbon Tetrachloride 4 CCl4 CCl
4
Tetrachloromethane
63 Carbon Tetrafluoride 4 CF4 CF
4
Tetrafluoromethane
46 Carbonyl Fluoride 4 CF2O CF
2
O
172 Chlorobenzene 4 C6H5Cl C
6
H
5
Cl Chlorobenzol, Phenylchloride
203 Chlorodifluoroethane 4 C2H3ClF2 CH
3
-CF
2
Cl R-142b
204
Chlorodifluoroethylene (FREON-
1122)
4 C2HClF2 CF
2
=CHCl R-1122, FREON-1122
57 Chlorodifluoromethane 4 CHClF2 CClHF
2
F-22, R-22
71 Chloroform 4 CHCl3 CHCl
3
Trichloromethane
119 Chloropentafluoroethane 4 C2ClF5 ClCF
2
CF
3
F-115, R-115
206
Chlorotrifluoroethylene (FREON-
1113)
4 C2ClF3 FCCl=CF
2
R-1113, FREON-1113
74 Chlorotrifluoromethane 4 CClF3 ClCF
3
F-13, R-13
209 Dibromodifluoromethane 4 CBr2F2 Br
2
CF
2
R-12B2, FREON-12B2
130 Dibromotetrafluorethane 4 C2Br2F4 BrF
2
CCF
2
Br F-114B2, R-114B2
84 Dichlorodifluoromethane 4 CCl2F2 CCl
2
F
2
F-12, R-12
210 Dichloroethylene 4 C2H2Cl2 CH
2
=CCl
2
Vinylidene Chloride
211 Dichloroethylene -cis 4 C2H2Cl2 CHCl=CHCl
191 Dichloroethylene -trans 4 C2H2Cl2 CHCl=CHCl
65 Dichlorofluoromethane 4 CHCl2F CHCl
2
F F-21, R-21
265 Dichloromethane 4 CH2Cl2 CH
2
Cl
2
125 Dichlorotetrafluoroethane 4 C2Cl2F4 F
3
CCCl
2
F F-114, R-114
103 Difluorochloroethane 4 C2H3ClF2 CF
2
ClCH
3
F-142B, R-142B
82 Difluoroethane 4 C2H4F2 CH
3
CHF
2
Ethylidene Fluoride, R-152A
64 Difluoroethylene 4 C2H2F2 CH
2
=CF
2
G-1132A,Vinylidenefluoride
SEMI F79-0703 © SEMI 2003 11
SEMI Gas # Chemical Name Category Symbol Formula Synonym
160 Difluoromethane 4 CH2F2 CH
2
F
2
Methylene Fluoride
75 Ethyl Chloride 4 C2H5Cl C
2
H
5
Cl Chloroethane or Ethane, Chloro
221 Ethyl Fluoride (FREON 161) 4 C2H5F CH
3
CH
2
F
Fluoroethane, R-161, FREON-
161
222 Ethylene Dichloride 4 C2H4Cl2 ClCH
2
CH
2
Cl 1,2 Dichloroethane
223 Fluoroacetylene 4 C2HF
FC≡CH
49 Fluoroform 4 CHF3 CHF
3
Trifluoromethane,F-23, R-23
137 Halothane 4 C2HBrClF3 BrClHCCF
3
295 Heptafluoropropane 4 C3HF7 C
3
HF
7
Freon 227
272 Hexafluoro Acetylacetone 4 C5H2F6O2 C
5
H
2
F
6
O
2
297 Hexafluoro butadiene-1,3 4 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3;
267 Hexafluoro Propane 4 C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane
270 Hexafluoro-2-Butyne 4 C4F6
CF
3
C≡CCF
3
Bis(trifluoromethyl)acetylene
225 Hexafluoroacetone 4 C3F6O (CF
3
)
2
CO
192 Hexafluorobenzene 4 C6F6 C
6
F
6
296 Hexafluorocyclobutene 4 C4F6 C
4
F
6
Perfluorocyclobutene
118 Hexafluoroethane 4 C2F6 F
3
CCF
3
F-116, Perfluoroethane
138 Hexafluoropropylene 4 C3F6 CF
3
CF=CF
2
Perfluoropropylene
286 Hexafluoropropylene oxide 4 C3F6O C
3
F
6
O Hexafluoroepoxypropane
323 Iodomethane 4 CH3I CH
3
I Methyl iodide; Un 2644
44 Methyl Bromide 4 CH3Br CH
3
Br Bromomethane
36 Methyl Chloride 4 CH3Cl CH
3
Cl Chloromethane
33 Methyl Fluoride 4 CH3F CH
3
F Fluoromethane
268 Methylene Bromide 4 CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide
236 Octafluorobutane 4 C4F8 C
4
F
8
129 Octafluorocyclobutane 4 C4F8 (CF
2
)
4
Perfluorocyclobutane
266 Octafluorocyclopentene 4 C5F8
CF
2
=C(CF
3
)-
CF=CF
2
155 Pentafluoroethane 4 C2HF5 CF
3
CHF
2
F-125, R-125
288 Pentafluoropropanol 4 C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol
241 Perfluorobutane 4 C4F10 C
4
F
10
128 Perfluoropropane 4 C3F8 CF
2
(CF
3
)
2
168 Tetrachloroethylene 4 C2Cl4 Cl
2
C=CCl
2
Perchloroethylene
94 Tetrafluorethylene 4 C2F4 F
2
C=CF
2
156 Tetrafluoroethane 4 C2H2F4 CH
2
FCF
3
R-134A, F-134A
83 Tribromomethane 4 CHBr3 CHBr
3
112 Trichloroethane 4 C2H3Cl3 CH
3
CCl
3
TCA, Methylchloroform
91 Trichlorofluoromethane 4 CCl3F CCl
3
F F-11, R-11
126 Trichlorotrifluoroethane 4 C2Cl3F3 CF
2
ClCCl
2
F F-113, R-113
SEMI F79-0703 © SEMI 2003
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SEMI Gas # Chemical Name Category Symbol Formula Synonym
321 Trifluoromethylhypofluorite 4 CF4O CF
4
O CF3OF; Hypofluorous acid
290 Trifluoropropane 4 C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane
56 Vinyl Bromide 4 C2H3Br CH
2
=CHBr
55 Vinyl Chloride 4 C2H3Cl CH
2
=CHCl Chloroethylene
51 Vinyl Fluoride 4 C2H3F H
2
C=CHF
6.5 Hydrides 5
35 Arsine 5 AsH3 AsH
3
244 Deuteriumsilane 5 SiD4 SiH
4
2
58 Diborane 5 B2H6 B
2
H
6
217 Digermane 5 Ge2H6 Ge
2
H
6
97 Disilane 5 Si2H6 Si
2
H
6
43 Germane 5 GeH4 GeH
4
24 Hydrogen Cyanide 5 HCN HCN
23 Hydrogen Selenide 5 H2Se H
2
Se
22 Hydrogen Sulfide 5 H2S H
2
S
229 Hydrogen Telluride 5 H2Te H
2
Te
185 Methylsilane 5 CH6Si CH
3
SiH
3
Monomethylsilane
142 Pentaborane 5 B5H9 B
5
H
9
239 Pentaborane(11) 5 B5H11 B
5
H
11
31 Phosphine 5 PH3 PH
3
39 Silane 5 SiH4 SiH
4
245 Stibine 5 SbH3 SbH
3
253 Tetrasilane 5 Si4H10 Si
4
H
10
328 Trisilane 5 Si3H8 Si
3
H
8
Silicopropane; Trisilicane;
H
8
Si3
6.6 Halogens, other than
Fluorine
6
21 Bromine 6 Br2 Br
2
19 Chlorine 6 Cl2 Cl
2
6.7 Halides, other than
Fluorides
7
193 Arsenic Tribromide 7 AsBr3 AsBr
3
216 Arsenic Trichloride 7 AsCl3 AsCl
3
196 Arsenic Triiodine 7 AsI3 AsI
3
79 Boron Tribromide 7 BBr3 BBr
3
70 Boron Trichloride 7 BCl3 BCl
3
201 Chlorine Dioxide 7 ClO2 ClO
2
205 Chlorosilane 7 SiH3Cl SiH
3
Cl
67 Dichlorosilane 7 SiH2Cl2 SiH
2
Cl
2
113 Germanium Tetrachloride 7 GeCl4 GeCl
4
Tetrachlorogermane