semi合集-English.pdf - 第4948页
SEMI M11-0704 © SEMI 1988, 2004 5 Figure 3 The Epi Stac king Fault (ESF) defect is a grown - in defe ct with 1 t o 4 sides of a square visi ble. Magnifi cation 1500 times using Nomarski Interference Microscop y. Approxim…
SEMI M11-0704 © SEMI 1988, 2004 4
Figure 2
This is a mound that does not have the sharp edges of an Epitaxial Stacking Fault, but is not as high as a
Bump. They are typically sized much smaller in a SSIS than their actual size, but some have facets that
scatter enough light to be more easily detected. Some people refer to this feature as a hillock which is a type
of mound. The shape can be either circular or square. Magnification 500 times using Nomarski Interference
Microscopy. Approximate SSIS event size: 0.15 µm
20
µ
m
SEMI M11-0704 © SEMI 1988, 2004 5
Figure 3
The Epi Stacking Fault (ESF) defect is a grown-in defect with 1 to 4 sides of a square visible. Magnification
1500 times using Nomarski Interference Microscopy. Approximate SSIS event size: 0.165 µm
5
µ
m
SEMI M11-0704 © SEMI 1988, 2004 6
Figure 4
Epitaxial Stacking Fault. Atomic Force Microscope (AFM) Image. Approximate SSIS scattering event size
0.12 µm.