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SEMI F59-0302 © SEMI 2000, 2002 2 5.1.15 s  second 5.1.16 scfm  standard cubic feet per m inute 5.1.17 slpm  standard liters per minute 5.1.18 T  (K) temperature in Kelv in 5.1.19 ∆ P  differential pressure in k P a…

SEMI F59-0302 © SEMI 2000, 2002 1

SEMI F59-0302

TEST METHOD FOR DETERMINATION OF FILTER OR GAS SYSTEM

FLOW PRESSURE DROP CURVES

This test method was technically approved by the Global Facilities Committee and is the direct responsibility

of the North American Facilities Committee. Current edition aproved by the North American Regional

Standards Committee on November 27, 2001. Initially available at www.semi.org December 2001; to be

published March 2002. Originally published October 2000.

NOTE: This document was entirely rewritten for

publication in 2002.

1 Purpose

1.1 The purpose of this document is to define a method

for testing filters or gas systems being considered for

installation into a high-purity gas distribution system or

on semiconductor manufacturing equipment,

respectively. Application of this test method is

expected to yield comparable data among filters or gas

systems.

1.2 This document establishes a test method for

preparing a pressure drop versus flow rate curves for

filters and gas systems.

2 Scope

2.1 This procedure applies to clean filters including

those cartridges of metal, ceramic and membrane

construction. The pressure drops for integral

housing/cartridge combination units are determined as a

single set of values. For housings with removable filter

cartridges, the flow curves of the housing and

housing/cartridge combination are determined

separately.

2.2 This procedure applies to high-purity gas systems.

This procedure applies to face-seal, surface mount—

modular, and monolithic integrated gas systems.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate and safety health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 For separable filtration units, a single cartridge

pressure drop value cannot be combined to give the

pressure drop value for an extended length cartridge,

because of the limitations imposed by a common outlet

port for the assembly.

3.2 This method is written with the assumption that the

operator understands the use of the apparatus at a level

equivalent to six months of experience.

3.3 This method is written to test a filter under normal

operating conditions. It does not prescribe a procedure

for reverse flow testing since operation of the filter in

this manner is not recommended by the manufacturers.

3.4 Components that induce line pressure changes on a

system such as pressure regulators, and MFCs are not

considered in this test method.

3.5 Proper flow of low vapor pressure gases can be

effected by small pressure drops and may need to be

evaluated independently.

4 Referenced Standards

NOTE 1: As listed or revised, all documents cited shall be

the latest publications of adopted standards.

4.1 ASME Performance Test Code PTC 19.5, 1972 

“Applications.” Part II of “Fluid Meters, Interim

Supplement on Instruments and Apparatus.”

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CDA  clean, dry air

5.1.2 °C  degrees Celsius

5.1.3 DUT  device under test

5.1.4 kg  kilogram

5.1.5 kPa  kilopascals, (kNm

-2

)

5.1.6 m  meter

5.1.7 MFC  mass flow controller

5.1.8 N  Newton (kg m/s

)

5.1.9 P  pressure in kiloPascal (kPa)

5.1.10 POC — point of connection

5.1.11 psi  pounds per square inch

5.1.12 psia  pounds per square inch absolute

5.1.13 psid  pounds per square inch differential

5.1.14 psig  pounds per square inch gauge

1 American Society of Mechanical Engineers (ASME) International,

3 Park Avenue, New York, NY 10016-5990

SEMI F59-0302 © SEMI 2000, 2002 2

5.1.15 s second

5.1.16 scfm  standard cubic feet per minute

5.1.17 slpm  standard liters per minute

5.1.18 T  (K) temperature in Kelvin

5.1.19

∆

P  differential pressure in kPa

5.1.20

∆

P(Housing)  (kPa, differential) differential

pressure of housing in kiloPascal, differential

5.1.21

∆

P(Unit)  (kPa, differential) differential

pressure of filtration unit in kiloPascal, differential

5.1.22

∆

P(cartridge)  (kPa, differential) differential

pressure of cartridge element in kiloPascal, differential

5.2 Definitions

5.2.1 filter cartridge  the filtration element.

5.2.2 filter housing  the shell that contains the filter

cartridge.

5.2.3 filtration unit  the assembly consisting of a

filter cartridge and housing.

5.2.4 gas box — a gas distribution subsystem which

generally contains the final shut-off valve(s) prior to the

POC.

5.2.5 gas pallet — individual gas distribution

subsystems within a gas box that control flow of gas to

individual process chambers.

5.2.6 gas stick — a series of components for an

individual gas within a gas box. It may contain valves,

a regulator, a pressure transducer, a purge line, an

MFC, and a filter.

5.2.7 integral unit  the filter cartridge and housing

are not separable.

5.2.8 normal conditions  101.3 kPa (14.7 psia) and

ambient temperature conditions 293.15 K (20

C).

5.2.9 separable unit  the filter cartridge and housing

can be disassembled.

5.2.10 spool flow through component — a null

component consisting of an electropolished flow

passage and appropriate fittings used in place of the test

component.

5.2.11 standard conditions  101.3 kPa, 273.15 K

(14.7 psia, 0

C).

6 Summary of Method

6.1 This test method describes the test equipment and

procedures for determining the flow pressure drop of

filters or gas systems. The differential pressure is

measured across a DUT at various inlet pressures and

flows. If the filtration unit is separable the individual

contributions from the housing and cartridge are

determined.

7 Interferences

7.1 Test stand must be of adequate dimensions so that

it does not limit the flow through the test DUT. The

pressure drop for the test stand must be insignificant

compared to the pressure drop for a DUT at the test

flow rate.

8 Apparatus

8.1 pressure regulator

8.2 downstream flow regulating valve

8.3 flow meter capable of measuring flow rates to

better than 5% full scale and of appropriate range.

8.4 several pressure transducers or gauges

8.5 differential pressure transducer (0.67 kPa, (0.1 psi)

sensitivity)

8.6 Test stand

8.7 Temperature measuring device (

9 Reagents and Materials

9.1 Test Gas nitrogen or CDA filtered to < 0.02

micrometer with a dew point of less than or equal to –

10 Safety Precautions

10.1 Safety Precautions  This test method may

involve hazardous materials, operations, and

equipment. This test method does not purport to

address all of the safety problems associated with its

use. It is the responsibility of the user to establish

appropriate safety and health practices and to determine

the applicability of regulatory limitations prior to its

use.

10.2 The user must have a working knowledge of the

respective instrumentation, must practice proper

handling of test components, and must understand good

laboratory practices. The user should not operate the

components in such a manner as to exceed the ratings

(i.e., pressure, temperature, flow and voltage).

11 Test Specimen

11.1 A gas box may consist of several gas pallets that

uniquely control flow of gases to a specific process

chamber. More than one gas stick layout is possible on

the pallet. The user shall test only one stick at a time

SEMI F59-0302 © SEMI 2000, 2002 3

for pressure drop measurement. The gas stick may be

removed from the pallet to attach to the test fixture.

11.2 Pressure regulators and MFCs shall be maintained

in their fully open position during testing.

11.3 When comparing different gas system designs, it

is useful to use components of similar design.

11.4 If the stick design contains a filter that dominates

the pressure drop on the system, such filters shall be

replaced by spool flow through components

12 Preparation of Apparatus

12.1 Construct a test stand for the measurement of gas

flow rates and pressure drop across a DUT. Examples

of such a test stand are shown in Figures 1a or 1b as

schematic drawings.

12.2 The gas supply is filtered by an electronics grade

high purity point-of-use gas filter before it is delivered

to the DUT through a pressure regulator.

12.3 A flow meter can be installed either upstream or

downstream of the DUT. See Figures 1a or 1b. The

test filter is upstream of a throttle valve to allow for

control of the flow through the DUT.

12.4 Inlet pressure is measured immediately upstream

of the DUT by a pressure gauge or pressure transducer.

12.5 Pressure drop across the test specimen is

measured by an electronic differential pressure

transducer capable of reading 0.67 kPa (0.1 psid) across

the test device.

12.6 Flow measurements are carried out through a flow

meter installed upstream or downstream of the test

filter. See Figures 1a or 1b.

NOTE 2: The flow measurement can be influenced by both

upstream and downstream pressure fluctuations. It is

necessary to verify the accuracy of any flow measurement

under the test conditions used to complete this testing.

12.7 A temperature measurement device can be

installed in the test stand to measure the gas stream

temperature.

12.8 Figure 2 gives the piping requirements for the test

stand configuration.

12.9 Figure 3 gives the recommended pressure

connection to be followed in constructing the test

apparatus.

13 Calibration and Standardization

13.1 For each test, verify that calibration of test

equipment is up-to-date.

13.2 A series of flow meters should be used to cover

the full range of flows that will be tested.

14 Procedure

14.1 Integral Filtration Unit

14.1.1 Assemble the filtration unit into the test

apparatus. (See Figure 1.)

14.1.2 Set the inlet pressure using the pressure

regulator to 10% of the filter’s maximum rated inlet

pressure or to 205 kPa (29.7 psia) whichever is less.

Pressure is read on the inlet pressure gauge.

14.1.3 Adjust the flow rate using the regulating valve

to give 10 % of the maximum rated flow. Adjustments

to the inlet pressure regulator may be required to

maintain a constant inlet pressure of 205 kPa (29.7

psia). The flow and pressure adjustments can be an

iterative process requiring several iterations to achieve

the desired flow rate and inlet pressure. The flow rate

is read on the flow meter and recorded.

14.1.4 Read and record the ambient temperature, inlet

pressure, pressure drop across the test filter, ambient

pressure, and flow rate corrected for upstream pressure

based on manufacturer’s recommendation.

14.1.5 Repeat steps in Sections 14.1.3 and 14.1.4 at

25%, 50%, 75% and 100% of the maximum rated flow.

14.1.6 Repeat steps in Sections 14.1.2 through 14.1.5

at several inlet pressures: 309 kPa (44.7 psia), 516 kPa

(74.7 psia), and 723 kPa (104.7 psia).

14.1.7 Additional testing of the filter at higher

pressures can be completed up to the maximum rated

pressure.

14.1.8 When the filter has a lower maximum pressure

rating than 90 psig, it is recommended that the filter be

tested at pressures of 33%, 67% and 100% of the

filter’s maximum pressure rating, with tests being

limited by the sensitivity of the differential pressure

device.

14.2 Separable Filtration Unit - Filter Housing

14.2.1 Assemble the empty filter housing into the test

apparatus.

14.2.2 Set the inlet pressure using the pressure

regulator to 10% of the housing’s maximum rated inlet

pressure or to 205 kPa (29.7 psia) whichever is less.

The inlet pressure is read on the inlet pressure gauge

and recorded.

14.2.3 Adjust the flow rate using the regulating valve

to give 10% of the maximum rated flow. Adjustments

to the inlet pressure regulator may be required to

maintain a constant inlet pressure of 205 kPa (29.7

psia). The flow and pressure adjustments can be an

iterative process requiring several iterations to achieve