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SEMI E92-0302 E © SEMI 1999, 2003 5 loading slider area should be op en z112 under the bottom interface planes. 7.4.3 Lo ader Locating Pins — Equipm ent must have two Loader locating pins to locate the box opener/loade r…

SEMI E92-0302

7.2 BOLTS/Light Exclusion Volume — Equipment or

loadport unit compliant with this standard must provide

a BOLTS/Light exclusion volume defined in this

section. BOLTS/Light exclusion volume consists of

multiple sub-volumes and spaces defined in this

section. The box opener/loader compliant with this

standard must be compatible with BOLTS/Light

exclusion volume. Bolts/Light exclusion volume is

shown in Figure 2.

7.2.1 Loader Exclusion Volume — Loader exclusion

volume is an exclusion volume for the main part of box

opener/loader that is defined by x108, y101, y110, y111,

and z107. y111 is intentionally shorter than SEMI

E15.1 D dimension in order to allow the equipment

integrators to place a safety door, a carrier ID

reader/writer, and/or any other features required by the

user. An additional removable cover can be mounted on

the box opener/loader if it is to be supplied as a

complete unit compliant with the SEMI E15.1 D

dimension.

7.2.2 Door Seal Exclusion Volume — Door seal

exclusion volume is an exclusion volume for the door

seal portion of box opener/loader that is defined by the

distance between the plane at the SEMI E15.1 D1 and

y101, x108, and z109.

7.2.3 BOLTS/Light Opening Exclusion Volume —

BOLTS/Light opening exclusion volume is an exclu-

sion volume for the box opener/loader encroachment of

equipment from BOLTS/Light plane at portion above

the permanent reserved space. There should be an

opening when the door is opened. Through this opening

substrates may be moved between the box on the

BOLTS/Light compliant box opener/loader and the

equipment by a wafer handler in the equipment.

BOLTS/Light opening exclusion volume is defined by

x102, y103, z103, and z108.

7.2.4 Permanent Reserved Space — Space that is

reserved permanently in the equipment defined by

x102, y102, z105, and z108.

7.2.5 Temporarily Reserved Space — Space that is

reserved temporarily during a door open/close motion is

being done and when the door is closed. The

temporarily reserved space during a door open/close is

defined by x102, y102, y103, z103, and z108. The

temporarily reserved space when a door is closed is

defined by x102, y103, y112, z103, and z108.

7.2.6 The Loader Bottom Flange Exclusion Volume —

The loader bottom flange exclusion volume is an

exclusion volume for fixing the box opener/loader to

bottom interface plane. Loader bottom flanges are

located on the both bottom side of the box

opener/loader and directly mounted on bottom interface

plane. The loader bottom flange exclusion volume is

defined by x108, x109, y115, y116, and z113 measured

from the bottom end of z107.

NOTE 3: The spaces to access the fixing bolt should be

reserved by equipment side. This document does not define

these spaces.

7.3 Side Interface Features — This standard defines

the equipment side of the side interface features. Side

interface features are defined with respect to “Docked

facial datum plane” instead of “Facial datum plane”.

The box opener/loader should mate with these features

to provide the seal to the equipment. The side interface

features are shown in Figure 2.

7.3.1 BOLTS/Light Plane — The BOLTS/Light plane

is defined to be parallel to and at a distance y101 from

the docked facial datum plane. The Seal Zone is on this

plane.

7.3.2 Cycle-to-Cycle Repeatability — The cycle-to-

cycle repeatability of y101 must be within y113.

7.3.3 Seal Zone — The equipment side of the

BOLTS/Light plane specified by x101, x103, z101,

z102, z104, and z106 must be a flat area for sealing

between the equipment and the box opener/loader.

7.3.3.1 The flatness of the seal zone must be within

y114 and the perpendicularity of the seal zone to the

facial and horizontal datum planes must be within

σ1

7.3.3.2 This standard only defines the seal zone on the

equipment side. The actual seal is not defined in this

standard, but should be mounted on the box

opener/loader.

7.3.4 Wafer Position — This standard defines a typical

wafer position when the box opener/loader positions the

wafers to the equipment. The facial datum plane of a

docked carrier is defined by y110 from the facial datum

plane. This provides compatible wafer center positions

from the facial datum plane.

NOTE 4: This means that this standard defines a specified

typical docking stroke.

7.4 Bottom Interface Features — This standard defines

mainly the equipment side of the bottom interface

features. Bottom Interface Features are shown in

Figure 3.

7.4.1 Regarding the box opener/loader, parallelism of

the bottom interface feature and the horizontal datum

plane must be within

σ2

7.4.2 Bottom Interface Planes — The Bottom Interface

Feature should have two Bottom Interface Planes

defined by x104, x105, y104, y105, and z107. Nothing

other than locating pins can protrude above these

planes. During maintenance, the front end of the

SEMI E92-0302

loading slider area should be open z112 under the

bottom interface planes.

7.4.3 Loader Locating Pins — Equipment must have

two Loader locating pins to locate the box

opener/loader so as to provide highly repeatable and

quick attachment/detachment. Horizontal locations of

the loader locating pins are defined by x106 and y106.

Height of the loader locating pins is defined by z110.

Diameter of the loader locating pins is defined by d1.

A box opener/loader compatible with this standard must

refer these two Loader Locating pins.

7.4.3.1 Positioning Pin — Loader locating pin on the

left side from operator is a positioning pin that is used

to hold box opener/loader both in x and y directions.

7.4.3.2 Anti-Rotation Pin — Loader locating pin on the

right side from operator is an anti-rotation pin that is

used to hold box opener/loader in y direction only (see

Figure 4).

7.4.4 Locking Screws — Four locking screws defined

by x106, y107, and y108 to tighten the box

opener/loader.

7.4.4.1 The equipment should have M8-16 tapped

holes at these locations.

7.4.5 Control Connection Area — Area used to pass

connectors, wires, and tubes for electrical signals,

power supply and other inlets/outlets.

7.4.5.1 The control connection area is defined at the

same height as the the bottom interface planes by x107

and y109.

NOTE 5: This standard only defines the connection area for

the box opener/loader itself. It is recommended that

connectors will be located above this area for quick

maintainability.

7.4.5.2 Other connections which will possibly be

located in this area for other functions are listed below

and may be defined in separate standards:

• Carrier ID reader/writer head interface (automated

units that read or write to an ID tag defined in

SEMI E15.1)

• Manual operation panel

• Wafer mapper

7.5 Panel Interface Height — This standard defines an

optional panel interface height so as to provide panel

installation height to enclose box opener/loader in the

equipment. Panel interface height is defined by z111

from horizontal datum plane. In case this option is

used, both equipment and the box opener/loader should

have forklifts exclusion volume defined by SEMI E15.1

H0.

SEMI E92-0302

SEMI E15.1 Compatible Equipment

Boundary

SEMI E84

Forklifts exclusion volume

Reduce Reserved

Space

Parallel I/O for AMHS

Communication

BOLTS/M Plane

BOLTS/M image

(Adopter)

Cart to SEMI E15.1

Docking Interface Port

BOLTS/Light Plane

SEMI E15.1 Compliant Load

Port Height

Equipment panel

Slide In/Out

CIDRW

BOLTS/

Light

BOLTS/Light

Shelf

Bottom interface

plane

Figure 1

Diagram Concept of Light-Weight and Compact Box Opener/Loader and Tool-Interoperability Standard

(BOLTS/Light)