semi合集-English.pdf - 第2314页

SEMI E82-0705 © SEMI 1999, 2005 10 7.4.3 Vehicle State Definitions 7.4.3.1 INSTALLED — The vehicle i s available or being used for TRANSFER comma nds. All enabled coll ection events and alarms will be sent to the Ho st f…

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SEMI E82-0705 © SEMI 1999, 2005 9
Transition # Previous State Trigger New State Actions Comments
11 ACTIVE The TRANSFER
command has
completed by the
transport system and
TSC (either successfully
or unsuccessfully).
None S6F11
TransferComplete
d sent to Host with
appropriate
ResultCode
ResultCode = 0 if
successful
ResultCode Not =
0 if unsuccessful
Carrier(s) could be located at
any location or port located
along the path of the transfer
if the TRANSFER command
completed unsuccessfully.
The location of the carrier(s)
associated with an
unsuccessful transfer
command must be legal
SourcePort(s) for a new
TRANSFER command.
12 ABORTING Transport system is
physically unable to
abort the TRANSFER
command.
Previous ACTIVE
sub-state
S6F11
TransferAbort-
Failed
The ability of the equipment
to successfully complete an
ABORT of the TRANSFER
command is specific to the
IBSEM equipment supplier.
13 CANCELING Transport system is
unable to cancel the
TRANSFER command
because the transfer is
now ACTIVE.
TRANSFERRING S6F11
Transferring
The ability of the equipment
to successfully complete a
cancel of the TRANSFER
command is specific to the
IBSEM equipment supplier.
7.4 Vehicle State Model
7.4.1 Vehicle State Model Requirements
7.4.1.1 The purpose of the vehicle state model is to provide information to the host for use of transport vehicle
information and metric tracking (i.e., the Host will not control vehicles). Each vehicle must individually comply
with the vehicle state model. Implementation of this state model, along with associated events and variables, is not a
requirement for Transport Systems which do not have vehicles. An example of such a Transport System is a DWC.
The Host should not be dependent on any events from the vehicle state model.
7.4.2 Vehicle State Model
Figure 4
Generic IBSEM Vehicle State Model Diagram
SEMI E82-0705 © SEMI 1999, 2005 10
7.4.3 Vehicle State Definitions
7.4.3.1 INSTALLED — The vehicle is available or being used for TRANSFER commands. All enabled collection
events and alarms will be sent to the Host for vehicles in this state.
7.4.3.2 REMOVED — The vehicle is not available for Host initiated TRANSFER commands. No collection events
or alarms will be sent to the Host for vehicles in this state.
7.4.3.3 ASSIGNED (INSTALLED sub-state) — Vehicle is allocated to a TRANSFER command.
7.4.3.4 NOT ASSIGNED (INSTALLED sub-state) — Vehicle is not allocated to a TRANSFER command. The
vehicle may contain a carrier as the result of a command being aborted.
7.4.3.5 ENROUTE (ASSIGNED sub-state) — The vehicle is on its way to a transfer port. This is the default entry
into the ASSIGNED state since it must be entered for the host to track vehicle metrics completely and adequately.
7.4.3.6 PARKED (ASSIGNED sub-state) — This state occurs when the vehicle is in the following conditions:
After the arrival of the vehicle is completed and before the action of the transfer agent is started.
After the action of the transfer agent has completed and before the departure of the vehicle.
After continuous actions of the transfer agent (e.g., acquire/acquire and deposit/deposit) are completed.
7.4.3.7 ACQUIRING (ASSIGNED sub-state) — The vehicle is currently involved in carrier acquire (one or more
carriers possible depending on vehicle limitations).
7.4.3.8 DEPOSITING (ASSIGNED sub-state) — The vehicle is currently involved in carrier deposit (one or more
carriers possible depending on vehicle limitations).
7.4.4 Vehicle State Transition Table
Table 3 Vehicle State Transition Table
Transition # Previous State Trigger New State Actions Comment
1 ENROUTE Vehicle arrives at a
transfer port associated
with an ACTIVE transfer
command.
PARKED S6F11
VehicleArrived
TransferPort may be an
internal transfer port.
2 PARKED Vehicle departs a transfer
port associated with an
ACTIVE transfer
command.
ENROUTE S6F11
VehicleDeparted
TransferPort may be an
internal transfer port.
3 PARKED The carrier handoff
parallel I/O starts for the
vehicle to acquire (load)
the transfer unit.
ACQUIRING S6F11
VehicleAcquire-
Started
If the vehicle is a passive
type then the acquire
occurs by the robot on the
other equipment loading
the transfer unit to the
vehicle.
4 ACQUIRING The carrier handoff
parallel I/O completes for
the vehicle to acquire
(load) the transfer unit.
PARKED S6F11
VehicleAcquire-
Completed
5 PARKED The carrier handoff
parallel I/O starts for the
vehicle to deposit (unload)
the transfer unit.
DEPOSITING S6F11
VehicleDeposit-
Started
If the vehicle is a passive
type then the deposit
occurs by the robot on the
other equipment unloading
the transfer unit from the
vehicle.
6 DEPOSITING The carrier handoff
parallel I/O completes for
the vehicle to deposit
(unload) the transfer unit.
PARKED S6F11
VehicleDeposit-
Completed
SEMI E82-0705 © SEMI 1999, 2005 11
Transition # Previous State Trigger New State Actions Comment
7 ACQUIRING The carrier handoff
parallel I/O completes for
the vehicle to acquire
(load) the transfer unit and
starts for the vehicle to
deposit (unload) the
carrier.
DEPOSITING S6F11
VehicleDeposit-
Started
Carrier Replace
See scenario for an
example.
8 DEPOSITING The carrier handoff
parallel I/O completes for
the vehicle to deposit
(unload) the transfer unit
and starts for the vehicle
to acquire (load) the
carrier.
ACQUIRING S6F11
VehicleAcquire-
Started
Carrier Replace
See scenario for an
example.
9 ASSIGNED Vehicle is no longer being
utilized for the specified
command.
NOT ASSIGNED S6F11
Vehicle-Unassigned
This could be the result of
the command being
completed or aborted. It
could also be the result of
the TSC scheduling
algorithms assigning this
vehicle to another
command and/or another
vehicle being assigned to
this command.
10 NOT
ASSIGNED
Vehicle is allocated to a
TRANSFER command.
ASSIGNED S6F11
VehicleAssigned
11 INSTALLED Vehicle is removed from
use of transfer commands.
REMOVED S6F11
VehicleRemoved
12 REMOVED Vehicle is installed for use
of transfer commands.
INSTALLED S6F11
VehicleInstalled
7.5 IBSEM Carrier State Model
7.5.1 IBSEM Carrier State Model Requirements
7.5.1.1 The purpose of the carrier state model is to provide information to the host regarding carrier tracking (the
Host will not control carriers). Each carrier must comply with the carrier state model.
7.5.2 IBSEM Carrier State Model
INSTALLED
12
Figure 5
Generic IBSEM Carrier State Model Diagram
7.5.3 Carrier State Definitions
7.5.3.1 INSTALLED — The carrier is in the physical domain of the TSC.