semi合集-English.pdf - 第3069页
SEMI E123-0703 © SEMI 2003 10 Variable Name Category Desc ription Format Comments ProcessSiteStatus CV Site n Availability(1 = enabled, 0 = disabled) Enumerated Valid in all stat es. List b y sites. ProcessSiteCount CV T…

SEMI E123-0703 © SEMI 2003 9
8.4 Variable Item Table
Table 5 Variable Item Table
Variable Name Category Description Format Comments
Physical Handler Group
ProcessBuffers CSV ID of all implemented input and
output buffers and their type.
Structure
(List of)
BufferID
BufferType
This is a configuration
specific variable item
(CSV). List by number of
buffers.
BufferID CSV Input or Output Buffer ID, valid in
reports only.
Text
BufferType CSV Input or Output Type, valid in
reports only.
Integer
CategoryID CV List of sort category IDs currently
configured in handler.
(List of)
sort category ID
Valid in all states. List by
category.
CategoryCount CSV Count of units in each sort category. Structure
(List of)
sort category ID
UnitCount
Valid in PROCESS states.
List by category.
EquipSerialID CV Identification of Equipment. Text Valid in all states.
KitID CSV ID of unique tooling unit. Text Valid in all states.
LightPoleStatus CSV Color/status (i.e., Red/flash) Text Valid in all states.
LinkPortStatus CSV (3 = Input/Output linked,
2 = Input linked,
1 = Output linked,
0 = HANDLER not Linked)
Enumerated Valid in all sub-states.
MediaID CV Media Serial Number Text Valid in Executing state.
MediaType CV Media Type Text Valid in Executing state.
OperationType CSV Current Operation Mode (i.e.,
maintenance, production).
Text Valid in all states.
OperatorID CSV Current Operator ID. Text Valid in all states.
QueueStatus CV PPID Queued to be run. Integer Valid in all states.
ReaderType CSV Type of reader installed on handler. Text Supplier defined.
ReaderErrorType CSV Type of error detected by the
material reader.
Text Supplier defined.
Process-Site Components
AlignmentCount CSV Number of units since last alignment
(i.e., Homing/Adjustment).
Integer Valid in all states.
InsertionForce CSV Insertion-Force energy Float Valid in PROCESSING
state.
InsertionForceSetpoint CSV Insertion-Force set point (setpoint). Float Valid in all states.
MediaChangeTime CV Elapsed time to replace media and
send ready.
Text Valid in all states.
MediaCount CV Number of media since last reset. Integer Valid in all states.
MediaCountInterval CV Event generated when number of
media is completed.
Integer Valid in all states.
PresentPositionActual CSV Present position actual. Integer Valid in all states.
PresentPositionSetpoint CSV Present position set points
(setpoint).
Integer Valid in all states.
ProcessSiteTemp CSV Process-site temperature (setpoint). Float Celsius - Set point.
ProcessSiteID CV ID of process-site in configuration. Integer Valid in all states.

SEMI E123-0703 © SEMI 2003 10
Variable Name Category Description Format Comments
ProcessSiteStatus CV Site
n
Availability(1 = enabled, 0 =
disabled)
Enumerated Valid in all states. List by
sites.
ProcessSiteCount CV Total count of process sites. Integer Valid in all states.
ProcessSiteLoaded CV Site
n
loaded status, normally
associated with UnitsReady event.
Integer Valid in EXECUTING
states. List by sites.
SkipCount CSV Number of units skipped since last
reset (Skip + Process = Total).
Integer Valid in all states.
SkipCountInterval CSV Event generated when number of
units is skipped.
Integer Valid in all states.
StartProcessPortID CSV Start process source (i.e., hand,
keyboard, host)
Integer Valid in all states.
UnitCount CV Number of units since last reset. Integer Valid in all states.
UnitCountInterval CV Event generated when number of
units is completed.
Integer Valid in all states.
UnitPosition CSV X, Y, Z media location of a unit. Integer Valid in all states.
UnitStatus CSV (1 = Processed, 0 = Skipped) Integer Valid in all states.
8.5 HSEM Required Reports — The reports below are required as “canned” or preconfigured reports by HSEM.
HSEM does not require the equipment to guarantee the accuracy of data identified in these reports outside the
PROCESSING ACTIVE state defined in the HSEM process state model.
8.5.1 Setup Report — Table 6 contains variables that are required to be available at the setup complete event.
Table 6 Required Variables at Setup Complete Event
Variable Name Notes
KitID Configuration Kit
MediaID Serial # of Media
PPExecName Current value of the selected PPID
EquipID
InsertionForceSetPoint
8.5.2 Process Report — Table 7 contains variables that must be available when the equipment is in the
PROCESSING state.
Table 7 Required Variables for PROCESSING State
Variable Name Notes
AlignmentCount
ProcessSiteTemp
OperatorID
OperationType
8.5.3 SPC Report — The table below contains variables that must be available and reported at the completion of a
unit.
Table 8 Required Variables at Completion of Unit
Variable Name Notes
UnitCount
SkipCount
SkipCountInt

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Variable Name Notes
UnitCountInt
MediaCount
MediaCountInterval
MediaID
OperatorID
8.5.4 Units Ready Report — The table below contains variables that must be available and reported when units are
ready to be processed (i.e. at load complete).
Table 9 Required Variables at Load Complete
Variable Name Notes
ProcessSiteLoaded Site loaded status
ProcessSiteStatus List of sites that are available
ProcessSiteCount Total process site count
9 Process Program Management
9.1 Process Program Requirements
9.1.1 The HSEM requires that the capability of process
program management be fully supported for this class
of equipment. The HSEM also requires that the process
program have a structure that enables the user to build
process programs with default conditions that can be
overridden for a run. The concepts of process program
structure and process program variable parameters are
discussed in the following sections. The HSEM also
requires the following:
• Minimum, maximum, and default parameter values
must be defined for all process programs.
• Verification will occur when a process program is
downloaded to the equipment; the program syntax
must be verified by the equipment manufacturer.
• Parameter validation will occur when a process
program is downloaded. Parameters must be type
and range checked.
• Equipment should provide the functionality to
manually or interactively modify the parameters set
in the process program.
• An error message must be generated from the
handler if the process program parameters are
outside the range of the machine calibration.
9.2 Process Program Structure
9.2.1 A handler process program must contain the
following information:
• Machine-specific configuration parameters,
• Process-Site-specific information section,
• Media-Type-specific information section, and
• Unit (Unit/Package) information section.
9.2.2 When combined, this information constitutes a
complete process program. It is emphasized that the
HSEM does not enforce the exact format and data type
of each section. However, it does provide direction as
to what each section should consist of.
9.2.3 Machine-Specific Configuration Parameters —
Each brand or type of handler may have one or more
machine-specific configuration parameters. Examples
of such parameters would be input configuration,
number of process-sites, and output configuration. Even
though they are supplier-specific, these parameters
nevertheless play a vital role in the overall generation
or creation of a process program. Since the machine-
specific parameters can differ from one equipment
manufacturer to another, the HSEM does not specify
the exact number, data types, and format of these
parameters. These details are left to the sole discretion
of the equipment manufacturer.
9.2.3.1 In addition, handler process program must
support user defined mapping of logical test bin
categories that are specific to test recipes and test
equipment to handler sort categories. The mapping
must be easy to define and flexible allowing ranges to
be specified. Logical bin categories can range from 1–
9999.
9.2.4 Process-Site-Specific Information — This
process-site-specific section contains information
necessary for the configuration and execution of the
various process-sites configured on the equipment.
Each equipment may contain different process-site
configurations. Since these configurations will differ,
the HSEM does not specify the exact number, data