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SEMI F97-0305 © SEMI 2005 24 Data Info rmat ion FPU System Output Data Analog Data Set Data Possible (yes/no) Tag Data Type Update Cycle Time Value Range Value Step Polarity Alarm Levels Warning Levels Discrete Data Set …

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SEMI F97-0305 © SEMI 2005 23
Tag:
Field Bit Meaning Issue Comment/Value
Alarm-Mode 5 0: No_Alarm
1: Alarm
Variable supported? Yes / No
State-Transitions supported? Yes / No
Type of acknowledgement?
Warning-Mode 6 0: No_Warning
1: Warning
Variable supported? Yes / No
State-Transitions supported? Yes / No
Error-Mode 7 0: No_Error
1: Error
Variable supported? Yes / No
State-Transitions supported? Yes / No
Maintenance-Mode 8 0: No_Maintenance
1: Maintenance
Variable supported? Yes / No
State-Transitions supported? Yes / No
Simulation-Mode 9 0 : No_Simulation
1 : Simulation
Variable supported? Yes / No
State-Transitions supported? Yes / No
Initial state when started?
No_Simulation
Simulation
Means provided to switch between states?
Lock-Mode 10 0: Not_Locked
1: Locked
Variable supported? Yes / No
List critical failures which cause FPU to
leave locked state:
Others
(Describe)
SEMI F97-0305 © SEMI 2005 24
Data Information
FPU System Output Data
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
FPU Subcontrol Level Data
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
Subsystem/Component:
Analog Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Value
Range
Value Step Polarity Alarm
Levels
Warning
Levels
Discrete Data Set Data
Possible
(yes/no)
Tag Data
Type
Update
Cycle
Time
Meaning
SEMI F97-0305 © SEMI 2005 25
R2-1.2 SEMI E6 recommends data to be supplied in the semiconductor equipment installation documentation
including their units of measurement. It is recommended that FPUs and FMCS use the same units of measurement
for the data to be exchanged between them.
R2-2 Example
R2-2.1 The tables below give examples of the template tables listed in R2-1.
Table R2-2 Example of the Use of the Tables R2-1 for One Particular FPU
General Information
Project: Fab XXX, Purchaser Name, Location
FPU: UPW (Ultra Pure Water)
FPU Model: YYY-ZZZ
Supplier: Supplier Name
Protocol FPU/FMCS: PROFIBUS-DP
Status Information
Tag: CUB_UPW_STATUS
Field Bit Meaning Issue Comment/Value
Watchdog-Toggle 0 0/1 Supported? Yes / No
Frequency?
60 seconds
OP-Mode 1 0: Manual
1: Automatic
Supported? Yes / No
Initial state when started?
⌧Manual
Automatic
Restrictions to switch between states?
None
Control-Mode 2 0: Local
1: Remote
Supported? Yes / No
Initial state when started?
⌧Local
Remote
Run-Mode 3-4 0: Down
(unscheduled)
1: Down (scheduled)
2: Stand-by
3: Run
Supported? Yes
/ No
Initial state when started?
Down (unscheduled)
Down (scheduled)
⌧Stand-by
Run
Alarm-Mode 5 0: No_Alarm
1: Alarm
Supported? Yes / No
Type of acknowledgement?
Operator must
acknowledge at FPU
Warning-Mode 6 0: No_Warning
1: Warning
Supported? Yes / No
Error-Mode 7 0: No_Error
1: Error
Supported? Yes / No
Maintenance-Mode 8 0: No_Maintenance
1: Maintenance
Supported? Yes / No