semi合集-English.pdf - 第1994页
SEMI E54.5-0997 © SEMI 1997, 2004 10 NOTICE: These standards do not purport to address sa fety issues, if any, associated w ith their use. It is the responsibility of the user of these standards to establish appropriate …
SEMI E54.5-0997 © SEMI 1997, 2004 9
APPENDIX 1
STATEMENT OF COMPLIANCE
NOTE: This appendix was approved as an official part of SEMI E54.5 by full letter ballot procedure.
This form is used to specify conformance options with respect to the SDS and common device model SEMI E54
specifications.
Fill in the blank or the appropriate box. ❑ ❑
Conforms to Smart Distributed
System Specification: Release ___________
Vendor Name ___________________
Vendor Partner ID# ___________________
Catalog Listing ___________________
Object Type ___________________
General
Device
Data
Software Version ___________________
Network Power Consumption ___________mA @
18 VDC
Smart
Distributed
System
Physical
Conformance
Data
Connector Style Open-Hardwired ❑ Sealed-Mini ❑
Open-Pluggable ❑ Sealed-Micro ❑
9 Pin ❑
Isolated Physical Layer Yes No ❑
Opto ❑
Transformer ❑
Default Device Address ___________
Communication Data Rates Supported 125K bits/s ❑ 500K bits/s ❑
250k bits/s ❑ 1M bits/s ❑
Device Type Master ❑
Slave ❑
Peer-to-Peer ❑
Smart
Distributed
System
Logical
Device &
Object
Data
Number of Logical Devices Default = 1
Object Class(es) on Logical Device #0 Minimum = 1
Object #0 ___________
Object #1 ___________
Object #2 ___________
Object #3 ___________
...
Object #31 __________
If there are additional logical devices, they should be documented as above.
SEMI E54.5-0997 © SEMI 1997, 2004 10
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E54.6-0997 © SEMI 1997, 2004 1
SEMI E54.6-0997 (Withdrawn 0704)
STANDARD FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR LONWORKS
NOTE: This document was previously designated SEMI E61. Because this document is part of a suite of documents, its
designation has been reassigned for ease of reference. Please note that the technical content of this document is unchanged from
the 0697 version.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Purpose
This standard defines a communication specification
based on the LonWorks technology specification to
enable communications between intelligent devices on
a sensor/actuator network (SAN) that operate according
to SEMI-specified device models (common and device
specific) in a semiconductor manufacturing tool.
This document specifies a mapping of the SEMI
common device model (CDM) onto LonWorks
technology using the LonMark Interoperability
Guidelines established for LonWorks devices. The
LonMark Interoperability Association may incorporate
into the Interoperability Guidelines any enhancements
presented in this document.
1.1 Background and Motivation — The LonWorks
communications system provides interconnection of
smart control devices such as sensors, actuators, and
controllers in a fast-response time, low-cost network for
industrial use. LonWorks enables multiple devices to
share a single network, thereby significantly reducing
the point-to-point wiring between controllers, sensors,
and actuators. The LonWorks network communications
standard (NCS) is based on the seven-layer LonTalk
Protocol, implemented by the Neuron Chip, a physical
layer transceiver, and an optional host processor. The
LonTalk Protocol was developed by Echelon and may
be freely licensed for implementation on any hardware
platform. The SEMI NCS for LonWorks is based on the
LonMark interoperability guidelines, which provide a
framework for interoperable use of the LonTalk
Protocol at layers 1-6, as well as at the application
layer. Where the LonMark interoperability guidelines
do not provide the functionality required by the SEMI
CDM, the guidelines are extended with SEMI-specific
requirements.
2 Scope
This document specifies a SAN communications
standard, based on the LonWorks specification, that
enables communication with SAN devices configured
according to the SEMI SAN Common Device Model
and appropriate Specific Device Model (SDM)
specifications.
2.1 This document specifies the use of LonWorks
technology for services that compliant intelligent
devices must support in order to exchange information
over this semiconductor equipment sensor/actuator
network.
2.2 This document specifies the utilization of
LonWorks technology to present externally visible
device structure and behavior, specified in the CDM
and appropriate SDMs, on a LonWorks network.
2.3 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification
and one or more SEMI standard Specific Device Model
specifications (e.g., for a mass flow controller).
Together, the model documents describe the externally
visible data structures and behavior of devices using
LonWorks technology in a SEMI-compliant SAN
system.
2.4 This standard, together with a sensor/actuator
network interoperability guideline, the sensor/actuator
network common device model, one or more sensor/
actuator network specific device model documents, the
LonTalk protocol specification, and the LonMark
interoperability guidelines, specifies requirements for
SEMI SAN implementations based on LonWorks
technology. The general sensor/actuator network
document architecture is shown in the Sensor/Actuator
Network Common Device Model document in Figure 1.