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SEMI C32-0699 © SEMI 1978, 1999 3 Previ ous SEMI Reference # C1 .11-95 Grade 1 (Specificatio n) Phospha te ( PO 4 ) 1 pp m ma x Heavy Metals (as Pb) 1 ppm max Alum inum (A l) 1 ppm m ax Arse nic and Antim ony (as As) 0.0…

100%1 / 7923
SEMI C32-0699 © SEMI 1978, 1999 METHYL ETHYL KETONE2
8.6 Phosphate — To 12.5 mL (10 g) of sample, add 10
mL of sodium carbonate reagent solution and evaporate
to dryness on a steam bath in a hood. Carefully dissolve
the residue in 25 mL of 0.5 N sulfuric acid. Add 1 mL
of ammonium molybdate reagent solution and 1 mL of
p-(methylamino)phenol sufate reagent solution. Allow
to stand at room temperature for 2 hours. Any blue
color should be no greater than that produced when
0.01 mg of phosphate ion (PO
4
) is treated as the sample.
8.7 Heavy Metals (as Pb) — Evaporate 25 mL (20 g)
of sample to dryness on a steam bath in a hood.
Dissolve the residue in 3 mL of dilute hydrochIoric acid
(1 + 1) and dilute with water to 15 mL. If necessary,
filter through a small filter, and wash the evaporating
dish and the filter with 10 mL of water. Dilute to 25 mL
with water. For the standard, dilute a solution
containing 0.02 mg of lead ion (Pb) and 3 mL of dilute
hydrochloric acid (1 + 1) to 25 mL with water. Adjust
the pH of both solutions to between 3 and 4 with dilute
ammonium hydroxide (10% NH
3
) or with acetic acid,
and dilute with water to 40 mL. To each solution, add
10 mL of freshly prepared hydrogen sulfide water and
compare. The sample solution should be no darker than
the standard.
8.8 Arsenic and Antimony (as As) — Evaporate 250
mL (200 g) of sample in a 400 mL beaker to a small
volume in a hood. Add 50 mL of water and again
evaporate to a small volume. Repeat the evaporation
with water addition. Do not allow to go to dryness. Add
5 mL of nitric acid and 5 mL of sulfuric acid and
evaporate to dense fumes of sulfur trioxide. Cool and
cautiously add 10 mL of water, and again evaporate to
dense fumes of sulfur trioxide. Cool and cautiously
wash into a generator flask with water to make a
volume of 35 mL. Proceed as described in the General
Method for Arsenic (and Antimony) under SEMI C1,
Section 3.4.5, starting with the sentence which begins,
"Swirl the flask...." Any red color in the silver
diethyldithiocarbamate solution of the sample should be
no greater than that of the standard containing 0.002 mg
of arsenic (As).
8.9 Trace Element Contents — By a suitable emission
spectrographic procedure, determine for each of the
specified trace elements that its content is not greater
than the stated specification limit (see SEMI C1,
Section 3.5, Guidelines for Determination of Trace
Elements by Emission Spectrography).
9 Grade 2 Procedures
9.1 This section does not apply to this chemical.
10 Grade 3 Procedures
10.1 This section does not apply to this chemical.
11 Grade 4 Procedures
11.1 This section does not apply to this chemical.
12 Grade 5 Procedures
12.1 This section does not apply to this chemical.
13 VLSI Grade Procedures
13.1 This section does not apply to this chemical.
14 Tier A Procedures
14.1 This section does not apply to this chemical.
15 Tier B Procedures
15.1 This section does not apply to this chemical.
16 Tier C Procedures
16.1 This section does not apply to this chemical.
17 Tier D Procedures
17.1 This section does not apply to this chemical.
Table 1 Impurity Limits and Other Requirements for Methyl Ethyl Ketone
Previous SEMI Reference # C1.11-95
Grade 1
(Specification)
Assay (CH
3
COCH
2
CH
3
) 99.5% min
Color (APHA) 15 max
Acidity
0.6 µeq/g max
Residue after Evaporation 20 ppm max
Water (H
2
O) 0.2% max
SEMI C32-0699 © SEMI 1978, 19993
Previous SEMI Reference # C1.11-95
Grade 1
(Specification)
Phosphate (PO
4
) 1 ppm max
Heavy Metals (as Pb) 1 ppm max
Aluminum (Al) 1 ppm max
Arsenic and Antimony (as As) 0.01 ppm max
Barium (Ba) 1 ppm max
Boron (B) 0.2 ppm max
Cadmium (Cd) 1 ppm max
Calcium (Ca) 1 ppm max
Chromium (Cr) 0.5 ppm max
Cobalt (Co) 0.1 ppm max
Copper (Cu) 0.1 ppm max
Gallium (Ga) 0.5 ppm max
Germanium (Ge) 1 ppm max
Gold (Au) 0.5 ppm max
Iron (Fe) 1 ppm max
Lithium (Li) 1 ppm max
Magnesium (Mg) 1 ppm max
Manganese (Mn) 1 ppm max
Nickel (Ni) 0.1 ppm max
Potassium (K) 1 ppm max
Silicon (Si) 1 ppm max
Silver (Ag) 0.5 ppm max
Sodium (Na) 1 ppm max
Strontium (Sr) 1 ppm max
Tin (Sn) 1 ppm max
Zinc (Zn) 1 ppm max
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
n-METHYL 2-PYRROLIDONE SEMI C33-0301 © SEMI 1986, 20011
SEMI C33-0301
SPECIFICATIONS FOR n-METHYL 2-PYRROLIDONE
These specifications were technically approved by the Global Process Chemicals Committee and are the
direct responsibility of the North American Process Chemicals Committee. Current edition approved by the
North American Regional Standards Committee on October 17, 1999. Initially available at www.semi.org
February 2001; to be published March 2001. This document replaces SEMI C1.25, C7.16, and C8.11 in their
entirety. Originally published in 1986, 1992, and 1998 respectively; previously published June 1999.
1 Purpose
1.1 The purpose of this document is to standardize
requirements for n-methyl 2-pyrrolidone used in the
semiconductor industry and testing procedures to
support those standards. Test methods have been shown
to give statistically valid results. This document also
provides guidelines for grades of n-methyl 2-
pyrrolidone for which a need has been identified. In the
case of the guidelines, the test methods may not have
been statistically validated yet.
2 Scope
2.1 The scope of this document is all grades of n-
methyl 2-pyrrolidone used in the semiconductor
industry.
2.2 These standards do not purport to address safety
issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 None.
4 Referenced Standards
4.1 SEMI Standards
SEMI C1 — Specifications for Reagents
4.2 ASTM Standards
1
ASTM D5127 — Standard Guide for Ultra Pure Water
Used in the Electronics and Semiconductor Industry
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
5 Terminology
5.1 None.
1 American Society for Testing and Materials, 100 Barr Harbor
Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555. Website:
www.astm.org
6 Physical Property (for information only)
Density at 25°C
1.03 g/mL
7 Requirements
7.1 The requirements for n-methyl 2-pyrrolidone for
Grades 1, 2, and 3 are listed in Table 1.
8 Grade 1 Procedures
NOTE 2: Due to the uncertainty of acid concentration in the
liquid residue, the final concentration can be estimated to be
approximately 2% (v/v).
NOTE 3: Each laboratory is responsible for verifying the
validity of the method within its own operation.
8.1 Assay — Analyze the sample by gas
chromatography (see SEMI C1, Section 3.1, Guidelines
for Assay by Wide Bore Column Gas
Chromatography). The parameters cited have given
satisfactory results.
Column: 30 × 530 micron I.D. fused silica capillary,
coated with 5 micron film of DB-1 or equivalent (100%
methyl silicone which has been surface bonded and
cross linked).
Column Temperature:
100°C isothermal
Injector Temperature:
250°C
Detector Temperature:
300°C
Sample Size:
0.2 µL splitless
Carrier Gas: Helium at 5 mL/min
Detector: Thermal
Conductivity
Approximate Retention Times (min):
Butyrolactone 15.2
1-Methyl 2-Pyrrolidone 20.2
Methyl Homologue 21.2
Methyl Homologue 23.0
8.2 Color — Dilute 10.0 mL of platinum-cobalt stock
solution (APHA No. 500) with water. Compare this
standard (APHA No. 50) with 100 mL of sample in
Nessler tubes. View vertically over a white background.
The sample must be no darker than the standard.