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SEMI F47-0200 © SEMI 199 9, 2000 3 8 Test Methods 8.1 Qualificatio n tes t s are conduct e d o n samples of production articles, n ot each ite m produced. Qualification testing of equipme nt to requirements i n this spec…

SEMI F47-0200 © SEMI 1999, 2000 2

other related standards.

3.4 This standard is intended to be a performance

specification, it is not intended to address design issues

related to safety which are covered elsewhere in the

SEMI Standards (see SEMI S2).

NOTE 1: Safety related systems may require ride-through

capability for conditions up to and including full power

failure. Further, if hazards could result from voltage sags

greater than those allowable in Table 1, provisions should be

made to negate or eliminate such hazards.

3.5 International, national and local codes, regulations

and laws should be consulted to ensure that the equip-

ment meets regulatory requirements in each location.

4 Referenced Standards

4.1 SEMI Standards

SEMI E10 — Standard for Definition and Measurement

of Equipment Reliability, Availability, and

Maintainability (RAM)

SEMI E51 — Guide for Typical Facilities Services and

Termination Matrix

SEMI F42 — Test Method for Semiconductor

Processing Equipment Voltage Sag Immunity

SEMI S2 — Environmental, Health, and Safety

Guideline for Semiconductor Manufacturing Equipment

4.2 IEEE Standards

IEEE 446 — IEEE Recommended Practice for

Emergency and Standby Power Systems for Industrial

and Commercial Applications (IEEE Orange Book)

IEEE 1100 — IEEE Recommended Practice for

Powering and Grounding Sensitive Electronic

Equipment (IEEE Emerald Book)

IEEE 1250 — IEEE Guide for Service to Equipment

Sensitive to Momentary Voltage Disturbances

NOTE 2: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

5 Terminology

5.1 assist — an unplanned interruption that occurs

during an equipment cycle where all three of the

following conditions apply:

• The interrupted equipment cycle is resumed

through external intervention (e.g., by an operator

or user, either human or host computer).

• There is no replacement of a part, other than

specified consumables.

1 The Institute of Electrical and Electronic Engineers, Inc., 345 East

47th Street, New York, NY 10017-2394, USA

• There is no further variation from specification of

equipment operation [SEMI E10].

5.2 failure — any unplanned interruption or variance

from the specifications of equipment operation other

than assists [SEMI E10].

5.3 interrupt — any assist or failure [SEMI E10].

5.4 ride-through capability — the ability of equipment

to withstand momentary interruptions or sags [IEEE

1250]. Also known as voltage sag immunity.

5.5 voltage sag — an rms reduction in the ac voltage

at power frequency for durations from half-cycle to a

few seconds [IEEE 1250]. Also known as voltage dip.

6 Ordering Information

6.1 Semiconductor manufacturers may use this

standard when procuring processing equipment to

specify equipment ride-through requirements capability

to the equipment supplier. This document may also be

used by semiconductor processing equipment suppliers

to specify ride-through requirements to component and

module suppliers.

6.2 Orders for equipment in accordance with this

standard shall include:

a) This specification number and date of issue.

b) Requirements for qualification testing per SEMI

F42.

c) Any certification showing passage of qualification

tests required to be provided (optional).

d) Any test results required to be included in reports

to be provided (optional).

7 Requirements

7.1 Semiconductor processing, metrology, and

automated test equipment must be designed and built to

conform to the voltage sag ride-through capability

shown in Figure 1. Equipment must continue to operate

without interrupt (see Terminology) during conditions

identified in the area above the defined line.

7.2 The requirements defined in this specification

apply to two phase (phase-to-phase) and single phase

(phase-to-neutral) voltage incidents.

7.3 The performance curve is defi ned by values shown

in Table 1—voltage sag duration and percent deviation

from equipment nominal voltage.

NOTE 3: For recommendations on equipment ride-through

capability below 0.05 seconds (50 milliseconds) and above

1.0 seconds, see Related Information at the end of this

document.

SEMI F47-0200 © SEMI 1999, 20003

8 Test Methods

8.1 Qualification tests are conducted on samples of

production articles, not each item produced.

Qualification testing of equipment to requirements in

this specification should be performed per SEMI F42.

9 Related Documents

9.1 SEMI Standard

SEMI S9 — Electrical Test Methods for Semiconductor

Manufacturing Equipment

9.2 CENELEC Standard

EN 50082-2 — Electromagnetic Compatibility —

Generic Immunity Standard, Part 2: Industrial

Environments

9.3 IEC Standard

IEC 61000-4-11 — Electromagnetic Compatibility

(EMC) — Part 4: Testing and Measuring Techniques

— Section 11: Voltage Dips, Short Interruptions and

Voltage Variations Immunity Tests

9.4 IEEE Standard

IEEE 1346 — Electric Power System Compatibility

with Electronic Process Equipment

NOTE 4: As listed or revised, all documents cited shall be the

latest publications of adopted standards.

2 European Committee for Electrotechnical Standardization, Rue de

Stassart, 35, B – 1050, Brussels

3 International Electrotechnical Commission, 3, rue de Varembé, P.O.

Box 131, 1211 Geneva 20, Switzerland

Table 1 Voltage Sag Duration and Percent Deviation from Equipment Nominal Voltage

VOLTAGE SAG DURATION VOLTAGE SAG

Seconds (s) Milliseconds (ms) Cycles at 60 hz Cycles at 50 hz

Percent (%) of

Equipment Nominal

Voltage

< 0.05 s < 50 ms < 3 cycles < 2.5 cycles Not specified

0.05 to 0.2 s 50 to 200 ms 3 to 12 cycles 2.5 to 10 cycles 50%

0.2 to 0.5 s 200 to 500 ms 12 to 30 cycles 10 to 25 cycles 70%

0.5 to 1.0 s 500 to 1000 ms 30 to 60 cycles 25 to 50 cycles 80%

> 1.0 s > 1000 ms > 60 cycles > 50 cycles Not specified

Percent of Equipment Nominal Voltage

0.2 0.50.1 1.0

0.05

Duration of Voltage Sag in Seconds

100

NOTE: Equipment must continue to operate without interrupt during voltage sags above the line.

Figure 1

Required Semiconductor Equipment Voltage Sag Ride-Through Capability Curve

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature

respecting any materials mentioned herein. These

standards are subject to change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.