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SEMI E98.1-1102 © SEMI 2001, 2002 2 5 Service Parameter Mapping 5.1 Table 2 shows the m apping between service parame ters define d by OBEM and the data items defined by SEMI E5. All OBEM messages map to St ream 14 Funct…

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SEMI E98.1-1102 © SEMI 2001, 2002 1
SEMI E98.1-1102
PROVISIONAL SPECIFICATION FOR SECS-II PROTOCOL FOR THE
OBJECT-BASED EQUIPMENT MODEL
This specification was technically approved by the Global Information and Control Committee and is the
direct responsibility of the North American Information and Control Committee. Current edition approved by
the North American Regional Standards Committee on August 29, 2002. Initially available at www.semi.org
September 2002; to be published November 2002. Originally published March 2002.
1 Purpose
1.1 This document maps the services and data of SEMI
E98 Object-Based Equipment Model (OBEM) to
SECS-II streams and functions and data definitions.
2 Scope
2.1 This document applies to all implementations of
OBEM that use the SECS-II message protocol (SEMI
E5).
2.2 This specification is provisional. To remove the
provisional status, the SECS-II format for the attributes
of the remaining object defined in OBEM must be
included in Section 6:
• EquipmentIODevice
2.3 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E39.1 — SECS-II Protocol for Object Services
Standard (OSS)
SEMI E98 — Provisional Standard for the Object-
Based Equipment Model (OBEM)
NOTE 1: Unless otherwise indicated, all documents cited
shall be the latest published versions.
4 Services Mapping
4.1 Table 1 shows the specific SECS-II streams and
functions that shall be used for SECS-II
implementations of the services defined in OBEM.
Table 1 Services Mapping Table
Message Name Stream, Function SECS-II Message Name
Abort S14,F19/20 Generic Service Request/Acknowledge
AddElement S14,F19/20 Generic Service Request/Acknowledge
AddProcessCapability S14,F19/20 Generic Service Request/Acknowledge
ChangeService S14,F19/20 Generic Service Request/Acknowledge
Cleanup S14,F19/20 Generic Service Request/Acknowledge
GetDateTime S14,F19/20 Generic Service Request/Acknowledge
GetProgramDirectory S14,F19/20 Generic Service Request/Acknowledge
Pause S14,F19/20 Generic Service Request/Acknowledge
RemoveProcessCapability S14,F19/20 Generic Service Request/Acknowledge
RemoveElement S14,F19/20 Generic Service Request/Acknowledge
Resume S14,F19/20 Generic Service Request/Acknowledge
SelectProgram S14,F19/20 Generic Service Request/Acknowledge
SetDateTime S14,F19/20 Generic Service Request/Acknowledge
Shutdown S14,F19/20 Generic Service Request/Acknowledge
Start S14,F19/20 Generic Service Request/Acknowledge
Startup S14,F19/20 Generic Service Request/Acknowledge
Stop S14,F19/20 Generic Service Request/Acknowledge
SEMI E98.1-1102 © SEMI 2001, 2002 2
5 Service Parameter Mapping
5.1 Table 2 shows the mapping between service parameters defined by OBEM and the data items defined by SEMI
E5. All OBEM messages map to Stream 14 Functions 19 and 20. The data item SVCNAME is the text string
representation of the service name found in Table 1 and should be assumed as case-sensitive. The name of each
parameter is the text string representation of the parameter name as it appears in Table 2. The SECS-II Data Item
Reference, where different from SPVAL, provides additional information and restrictions for the value.
Table 2 Service Parameter Mapping Table
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
DateTime A valid date and time. L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “DateTime”
SPVAL = (20,34,30)
DeviceProgramID 0–65,535 L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “DeviceProgramID”
SPVAL = (51,52)
ErrorCode Enumerated as defined
in SEMI E5 or by
supplier.
ERRCODE 5()
ErrorText 1–80 characters ERRTEXT 20
ObjSpec 0–80 characters OBJSPEC 20
ProcessCapability 1–80 characters L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “ProcessCapability”
SPVAL = (20)
Property Each property is an
attribute name/value pair
for some object
indicated in ObjSpec.
Each attribute name
maps directly to
ServiceParameterName
and each attribute value
maps directly to
ServiceParameterValue.
L,2
1. <SPNAME>
2. <SPVAL>
—
RequestStatus Structure L,2
1. <SVCACK>
2. Status
RequestAcknowledge Enumerated:
0 = Request performed
1 = Invalid request
2 = Can not perform
now
4 = Will perform when
able and report results
when complete.
SVCACK 10
Service Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “Service”
SPVAL = (51)
ServiceParameterName Text SPNAME 20
ServiceParameterValue Depends on parameter
used.
SPVAL 10, 20, 34, 40, 51, 52
SEMI E98.1-1102 © SEMI 2001, 2002 3
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
Status (list of) Structure L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
5.2 Table 3 shows the data items in SECS II messages that do not have a corresponding service parameter.
Table 3 Additional Data Item Requirement Table
Function SECS-II Data Item
Used to satisfy SECS-II conventions for linking a multi-block inquiry with
subsequent multi-block message.
DATAID
Name of OBEM service. Enumerated:
“Abort”
“Add Element”
“AddProcessCapability”
“ChangeService”
“Cleanup”
“GetDateTime”
“GetProgramDirectory”
”Pause”
“RemoveProcessCapability”
“RemoveElement”
“Resume”
“SelectProgram”
“SetDateTime”
“Shutdown”
“Start”
“Startup”
“Stop”
SVCNAME
A unique number generated by the service requestor to identify a specific
operation and connect it to a later completion confirmation.
OPID
NOTE 1: The text strings specified in Table 3 for SVCNAME shall be recognized by the equipment as vaild, whether the equipment is or is not
case-sensitive.
6 Object Attribute Form
6.1 Section 6 defines the SECS-II form of the attributes of objects defined in OBEM, presented in alphabetical
order. Note that attribute names in this section indicate the literal text string that shall be accepted in string
comparisons for attribute names in Stream 14 messages.
6.1.1 By convention, all tables include ObjID as well as ObjType as the two attributes required by SEMI E39.
6.2 AbstractEquipmentElement
6.2.1 Table 5 specifies the attributes of the AbstractEquipmentElement.
Table 4 AbstractEquipmentElement Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“Cycles” 0+. 54
“Description” 20
“Function” 20
“ImmutableID” 20