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SEMI E58-0703 © SEMI 1997, 2003 23 Attribute Name Definition Access Reqd Form ARAMSTimestamp Timestamp of last ARAMS st ate change. RO N Form atted numeric text : timestamp format. Clock (See NOTE 1.) Current time and da…

SEMI E58-0703 © SEMI 1997, 2003

11.4.10 UDTime — Time in UNSCHEDULED

DOWNTIME.

12 Events and Pre-Defined Event Reports

1.18 Each transition in the ARAMS State Model, with

the exception of Transitions 2 and 11, represents a

unique collection event that shall be reportable to the

host. A generic collection event ARAMS State Change

shall be provided that corresponds to any ARAMS state

change. This allows greater efficiency for common data

to be placed in a single report.

1.19 The equipment shall support one of the two

following requirements:

• The capability of allowing the host to define

reports associated with each ARAMS state change

event, or

• A set of pre-defined (default) event reports for the

ARAMS State Change Event, equipment-initiated

transitions to UNSCHEDULED DOWNTIME

(Transitions 5 and 7, and Transition 1 as

appropriate), and user-initiated transitions to

UNSCHEDULED DOWNTIME.

1.20 The pre-defined reports, defined below, are

labeled “A”, “B”, and “C”, for ease of reference only.

Report “A” represents the information required for

every ARAMS State Change Event. Implementations of

these reports shall provide, at a minimum, the updated

values of the indicated variables.

Report “A”

ARAMS State Change Event

EqpModel

EqpSerialNum

EqpName

Clock

ARAMSState

PrevARAMSState

Report “B”

Equipment-Initiated Transitions to

UNSCHEDULED DOWNTIME Event

DowntimeAlarm

DowntimeAlarmText

DowntimeData

Report “C”

User-Initiated Transition

SymptomID

SymptomText

DowntimeData

13 Object Services Compliance

This section provides information required for

equipment that is OSS-compliant. OSS compliance is

not required for ARAMS compliance.

13.1 Equipment Object — ARAMS-compliant

equipment (equipment subsystems) that are compliant

to OSS (SEMI E39) and that provide an object

representing the equipment (equipment subsystems)

shall include as attributes of that object the attributes

listed in Table 6.

1.20.1 The data element Clock may be represented by

a Clock object. In this case, Clock is not an attribute of

the Equipment object but is a component of the

Equipment object and is accessible through OSS

services.

1.20.2 Table 6 defines the variables specified in earlier

sections as object attributes conformant with the

requirements of OSS. The column labeled “Access”

indicates whether the attribute is read-only (RO) or

read-write (RW), and the column labeled “Reqd”

indicates if the attribute is required for ARAMS

compliance.

Table 6 Table 6 ARAMS Object Attribute Definitions

Attribute Name Definition Access Reqd Form

ARAMSAccumReset Timestamp for when time-in-state accumulators were last

reset to zero. Required if accumulators are supported.

RO N Formatted numeric text:

timestamp format.

ARAMSInfo Additional information set by the equipment at the time of

an ARAMS state transition.

RO N Text. 0–80 characters.

ARAMSState Code corresponding to currently selected ARAMS

state/substate.

RO Y Formatted alphanumeric

text. 4 characters.

ARAMSText Descriptive text corresponding to code in ARAMSState. RO Y Text. 5–80 characters.

SEMI E58-0703 © SEMI 1997, 2003 23

Attribute Name Definition Access Reqd Form

ARAMSTimestamp Timestamp of last ARAMS state change. RO N Formatted numeric text:

timestamp format.

Clock (See NOTE 1.) Current time and date. RW Y Formatted numeric text:

timestamp format.

CycleCtr Non-resettable counter of equipment run cycles. RO Y Unsigned integer.

DowntimeAlarm Identifier of last alarm or exception triggering an

equipment-initiated transition to a downtime state and/or

substate.

RO Y Text. Conforms to

ObjID.

DowntimeAlarmText Text associated with DowntimeAlarm. RO Y Text. 0–80 characters.

DowntimeData Equipment-defined text associated with transitions to

downtime state and/or substate.

RO Y Text. 0–256 characters.

EngInterrupt Enables (TRUE) or disables (FALSE) an equipment-

initiated transition from ENGINEERING to

UNSCHEDULED DOWNTIME. Required in EngRecovery

is supported.

RW N Boolean.

EngRecovery Enables (TRUE) or disables (FALSE) automatic recovery

from UNSCHEDULED DOWNTIME to ENGINEERING.

RW N Boolean.

EngTime Accumulated minutes in the ENGINEERING state/substate.

Required if accumulators are supported.

RW N Unsigned integer.

EqpModel The equipment model. RO Y Text. 1–80 characters.

EqpSerialNum Equipment serial number. RO Y Text. 1–80 characters.

InterruptionPrd Counts number of transitions from PRODUCTIVE to

UNSCHEDULED DOWNTIME. Required if accumulators

are supported.

RW N Unsigned integer.

InterruptionTotal Counts total number of transitions to UNSCHEDULED

DOWNTIME. Required if accumulators are supported.

RW N Unsigned integer.

LastPowerdown Estimate of last powerdown time. RO Y Formatted numeric text:

timestamp format.

NSTime Accumulated minutes in NON-SCHEDULED TIME

state/substate. Required if accumulators are supported.

RW N Unsigned integer.

PowerdownTime Estimate of powerdown time. RO Y Formatted numeric text:

timestamp format.

PowerupState Indicates the powerdown state when powerdown occurs

during manufacturing time.

RW N Text digit:

“2” = standby,

“5” =unscheduled

downtime.

PrdRecovery Enables (TRUE) or disables (FALSE) the equipment-

initiated return to PRODUCTIVE from UNSCHEDULED

DOWNTIME. Required for support of automatic

equipment-initiated recovery.

RW N Boolean.

PrdState The last ARAMS code specified by the user for

PRODUCTIVE.

RO Y Formatted alphanumeric

text. 4 characters.

PrdTime Accumulated minutes in PRODUCTIVE state/substate.

Required if accumulators are supported.

RW N Unsigned integer.

PrevARAMSState ARAMS Substate Code corresponding to state prior to last

state transition.

RO Y Formatted alphanumeric

text. 4 characters.

SDTime Accumulated minutes in SCHEDULED DOWNTIME

state/substate. Required if accumulators are supported.

RW N Unsigned integer.

SbyRecovery Enables or disables the equipment-initiated return to

STANDBY from UNSCHEDULED DOWNTIME.

Required for support of automatic equipment-initiated

recovery.

RW N Boolean.

SbyTime Accumulated minutes in STANDBY state/substate.

Required if accumulators are supported.

RW N Unsigned integer.

Attribute Name Definition Access Reqd Form

SubstateSelect Enables (TRUE) or disables (FALSE) equipment-initiated

selection of substates in PRODUCTIVE and STANDBY.

RW N Boolean.

SymptomID The identifier of a symptom selected by the user when

requesting a state change.

RO Y Text. Conforms to

ObjID.

SymptomText The descriptive text of the symptom selected by the user

when requesting a state change.

RO Y Text. 0–80 characters.

UDTime Accumulated minutes in UNSCHEDULED DOWNTIME

state/substate. Required if accumulators are supported.

RW N Unsigned integer.

NOTE 1: The Clock attribute may be replaced by a Clock object having a DateTime attribute, as defined in SEMI E38.

1.21 Table Objects — Table 7 defines the attributes of a generic table. This is an abstract type of object that is not

itself directly implemented. Specific table types, which require definitions of their row formats (Section 10.2), are

subtypes of the generic table supertype and inherit all of the attributes of the supertype (see SEMI E39, Appendix).

Table 7 Table 7 Table Object Attribute Definition

Attribute Name Definition Access Reqd Form

ObjType The object type. RO Y Text = “Table”.

ObjID The object’s identifier. RO Y Text. 1–80 characters.

NumCols Number of columns. RO Y Unsigned integer.

NumRows Number of rows. RO Y Unsigned integer.

DataLength Total number of bytes required to store the table elements,

exclusive of any formatting required for storage or transfer.

RO Y Unsigned integer.

1.22 Different applications may define additional table attributes for specific table types. The subtypes defined by

ARAMS (Sections 10.3 and 10.4) are “TableARAMSCode” and “TableARAMSSymptom” and have no additional

attributes.

2 Human Interface Requirements

This section provides a central location for requirements affecting the human interface. It specifies the functions that

shall be available to the operator through the equipment’s console (human interface), where the equipment provides

such an interface. Applications that do not otherwise provide such an interface (e.g., cluster modules) are exempted

from these requirements.

13.2 Data Access — All supported data elements defined in Section 11 shall be accessible to the operator.

Specifically, the operator shall be able to view all ARAMS data provided by the equipment and shall be able to

modify the values of all data defined in Section 11.4.

2.1.1 Where the accumulators defined in Section 11.5 are supported, the operator shall be able to change their

individual values, with the exception of ARAMSAccumReset, and to reset the entire set together.

13.3 Selection of an ARAMS State/Substate — The operator shall be able to select any of the standard ARAMS

states and substates defined in Section 9.2, exclusive of those definitions with a “Reserved” substate that are

reserved for future standards. The operator shall also be able to select MANUFACTURING.

2.1.2 Where ARAMS Substate Tables are provided with user-defined or supplier-defined extensions, these

extensions shall also be available to the operator for selecting a change in the current ARAMS state and /or substate.

2.1.3 When selecting a SCHEDULED DOWNTIME or UNSCHEDULED DOWNTIME state/substate, the

operator shall be able to enter a comment to be stored in DowntimeData (Section 11.2.10).