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SEMI E90.1-0705 © SEMI 2001, 2005 4 Table 5 Variable Data Item Mapping Variable Name Class Format BatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.) BatchLocID i SV A[1..80] (Conforms to ObjID in SEMI E39.1.) B…

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SEMI E90.1-0705 © SEMI 2001, 2005 3
Parameter Name Range SECS-II Data Item
STStatus STAcknowledge and Status. L,2
1. <STAcknowledge>
2. <Status>
SubstID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstIDList
(ordered list of)
List of Substrate IDs. L,n n = number of substrate identifiers
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstLocID 1–80 characters (Conforms to ObjID in SEMI E39.1) OBJID
SubstLocIDList
(ordered list of)
List of Substrate Location ID’s corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstLocID
1
>
.
.
n. <SubstLocID
n
>
SubstProcState Enumerated per Variable SubstProcState. U1
SubstProcStateList
(ordered list of)
List of Substrate Processing States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifiers in
SubstIDList (ordered list of)
1. <SubstProcState
1
>
.
.
n. <SubstProcState
n
>
SubstrateObject-
Attributes
(List of) substrate object attribute names and values. L,n
1. L,2
1. SPNAME
1
2. SPVAL
1
:
n. L,2
1. SPNAME
n
2. SPVAL
n
SubstState Enumerated per Variable SubstState. U1
SubstStateList
(ordered list of)
List of Substrate Transport States corresponding to the
SubstIDList (ordered list of).
L,n n = number of substrate identifers in
SubstIDList (ordered list of)
1. <SubstState
1
>
.
.
n. <SubstState
n
>
4.4 SECS-II Data Items without Corresponding SEMI E90 Parameters — Table 4 contains the SECS-II data items
that do not correspond to SEMI E90’s service parameter.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
“TimeIn” from SubstHistory variable data definition TIMESTAMP
“TimeOut” from SubstHistory variable data definition TIMESTAMP
5 Variable Data Item Mapping
5.1 Table 5 shows the specific SECS-II data classes, and formats needed for SECS-II implementations of SEMI
E90 variable data items.
SEMI E90.1-0705 © SEMI 2001, 2005 4
Table 5 Variable Data Item Mapping
Variable Name Class Format
BatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
BatchLocState DVVAL 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchLocState
i
SV 51(U1)
Enumerated as:
0-UNOCCUPIED
1-OCCUPIED
BatchSubstIDMap DVVAL L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
BatchSubstIDMap
i
SV L,n n = number of positions in a batch
1. <SubstID
1
>
.
.
n. <SubstID
n
>
SubstBatchLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstDestination DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstHistory DVVAL L,n n = number of substrate locations visited by the substrate
1. L,3
1. <SubstLocID
1
>
2. <TimeIn
1
>
3. <TimeOut
1
>
.
.
n. L,3
1. <SubstLocID
n
>
2. <TimeIn
n
>
3. <TimeOut
n
>
SubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocState DVVAL 51 (U1 )
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocState
i
SV 51 (U1)
Enumerated as:
0 – UNOCCUPIED
1 – OCCUPIED
SubstLocSubstID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLocSubstrID
i
SV A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstLotID DVVAL A[1..80]
SubstMtrlStatus DVVAL U1 (equipment dependent enumeration)
SEMI E90.1-0705 © SEMI 2001, 2005 5
Variable Name Class Format
SubstPosInBatch DVVAL A (range is equipment dependent)
SubstProcState DVVAL 51 (U1 )
Enumerated as:
0 – NEEDS PROCESSING
1 – IN PROCESS
2 – PROCESSED
3 – ABORTED
4 – STOPPED
5 – REJECTED
6 – LOST
7 – SKIPPED
SubstrateReaderEnabled EC Binary
0 = Disabled
1 = Enabled
SubstSource DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstState DVVAL 51 (U1 )
Enumerated as:
0 – AT SOURCE
1 – AT WORK
2 – AT DESTINATION
SubstSubstLocID DVVAL A[1..80] (Conforms to ObjID in SEMI E39.1.)
SubstType DVVAL 51 (U1 )
Enumerated as:
0 – WAFER
1 – FLAT PANEL
2 – CD
3 – MASK
SubstUsage DVVAL 51 (U1)
Enumerated as:
0 – PRODUCT
1 – TEST
2 – FILLER
6 SECS-II Attribute Definitions
6.1 Substrate Object SECS-II Attributes Definitions — The following are the SECS-II structure definitions for the
SEMI E90 Substrate Object.
Table 6 Substrate Object SECS-II Attribute Definitions
Attribute Name Attribute Date Form: SECS-II Structure
“BatchLocID” <OBJID> BatchLocID
“ObjType” “Substrate”
“ObjID” <OBJID> SubstID (Conforms to the restrictions of ObjID as specified in SEMI E39.1,
§6.)
“LotID” 20 (A) LotID
“MaterialStatus” 51 (U1) MaterialStatus
MaterialStatus is an equipment specific enumerated value
“SubstDestination” <OBJID> SubstLocID