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SEMI M55-0705 © SEMI 2003, 2004 9 Figure 3 SEMI Wafer Edge Profile Template NOTE 13: For the exact dimensions and co ordinates of points A to D see the appropriate sili con carbide wafer standard. Figure 4 Examples of Ac…

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SEMI M55-0705 © SEMI 2003, 2004 8
DIN 50445 — Testing of materials for semiconductor technology; Contactless determination of the electrical
resistivity of semiconductor slices with the eddy current method; Homogeneously doped semiconductor wafers
13.3 ISO Standards
ISO 4287 — Geometrical Product Specifications (GPS) -- Surface texture: Profile method -- Terms, definitions and
surface texture parameters
7
Primary Flat
Secondary Flat
Wafer Periphery
Fixed Quality Area Boundary
X = Nominal Edge Exlusion
Figure 1
Fixed Quality Area
Vector Normal to
Wafer Surface
Orthogonal
Misorientation
Crystallographic c-Axis
<0001>
Tilt Angle
{0001} -Plane
Projection of Wafer Surface Normal
on the {0001} -Plane
Specified Direction of Tilt
(in {0001} -Plane)
Tilt Angle
{0001} Plane
Wafer
Figure 2
Orthogonal Misorientation
7 International Organization for Standardization, ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20, Switzerland.
Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30 Website: www.iso.ch
SEMI M55-0705 © SEMI 2003, 2004 9
Figure 3
SEMI Wafer Edge Profile Template
NOTE 13: For the exact dimensions and coordinates of points A to D see the appropriate silicon carbide wafer standard.
Figure 4
Examples of Acceptable and Unacceptable Wafer Edge Profiles
SEMI M55-0705 © SEMI 2003, 2004 10
a
a
a
1
2
3
Primary Flat
Secondary Flat
Trace of (1120) plane
in (0001) plane
[1120] direction
[1120] direction
[1100] direction
Trace of (1100) plane
in (0001) plane
-
-
-
-
-
Silicon Face
Figure 5
Relation of Lattice Sites, Crystallographic Planes and Flats (flat length not to scale)
The position of the secondary flat is shown for view on the Silicon face.
NOTE 14: For the exact dimensions and tolerances of primary and secondary flats see the appropriate polished silicon carbide
wafer standard.
Secondary Flat
Secondary
Flat
Length
Primary
Orientation
Flat
Primary Flat Length
Figure 6
Flat Length of Primary Orientation Flat and Secondary Flat