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SEMI 30.1-0200 © SEMI 1998, 2000 22 As in dicated in Table 5, th e SEMI M21 anomaly defi nition table “TABLE-M 21-A NOM ALY- DEF” is optional. The others are requ ired. ISEM requires that the f ollo wing columns be in cl…

SEMI 30.1-0200 © SEMI 1998, 200021

An example of usage of S13,F13 to transfer data sets is shown below:

L,7

1. <DATAID>

2. <OBJSPEC>

3. “TableDef” <TBLTYP>

4. “TableName” <TBLID>

5. L,n # of table attributes

1. L,2

1. “NumRows” <ATTRID1>

2. <m> <ATTRDATA1>

2. L,2

1. “NumCols” <ATTRID2>

2. <n> <ATTRDATA2>

3. L,2

1. “DataLength” <ATTRID3>

2. <table length> <ATTRDATA3>

4. L,2

1. “LotID” <ATTRID4>

2. “ABC123” <ATTRDATA4>

n. L,2

1. “ProductID” <ATTRIDn>

2. “CPUTYPE” <ATTRDATAn>

6. L,n # of columns

1. “AREANAME” <COLHDR1>(1st column description)

n. “ATTRIBUTE5” <COLHDRn>(nth column description)

7. L,m # of rows

1. L,n # of columns

1. <Item 1,1> table item in row 1, column 1

n. <Item 1,n> table item in row 1, column n

m. L,n # of columns

1. <Item m,1> table item in row m, column 1

n. <Item m,n> table item in row m, column n

Figure 6

S13,F13 with ISEM TABLE-DEF Data

11.3 Required ISEM Tables — ISEM equipment shall support all three table types: area, align, and anomaly. SEMI

M21 anomaly table type may be supported, but it is optional. The ISEM equipment shall be able to store

simultaneously at least 3 (three) defined tables of each type supported to guarantee the validity of any table while

that table is being transferred (a table transfer transaction is in process).

ISEM align and area tables are stored by the equipment during the current inspection or review run (i.e., until a new

remote command PP-SELECT or PP-ASSIGN is sent, or until they are modified with PP-UPDATE).

Table 5 ISEM Table Types (TABLE-DEFs)

Table Type Req/Opt Description

“TABLE-AREA-DEF” R Area Definition — A set of areas and their attributes, typically the list of areas to

be inspected.

“TABLE-ALIGN-DEF” R Alignment Site Definition — A set of alignment sites and their attributes.

“TABLE-ANOMALY-DEF” R Anomaly Coordinate Data Definition — A set of anomalies and their attributes,

with coordinates given in the SEMI M20 or M20P coordinate system.

“TABLE-M21-ANOMALY-DEF” O Anomaly SEMI M21 Coordinate Data Definition — A set of anomalies and their

attributes, with coordinates given in the SEMI M21 coordinate system.

SEMI 30.1-0200 © SEMI 1998, 2000 22

As indicated in Table 5, the SEMI M21 anomaly definition table “TABLE-M21-ANOMALY-DEF” is optional. The

others are required.

ISEM requires that the following columns be included in the TABLE-DEFs. Table 6 defines the column headers and

the allowed formats. Anomaly attributes and attribute headings are defined by the supplier, based on equipment

capability.

11.3.1 “TABLE-AREA-DEF”

TableType: “TableAreaDef” TableID: <AreaTableName>

Area Name Coordx Coordy Coordsys Xtentx Xtenty Attribute (1) … Attribute

11.3.2 “TABLE-ALIGN-DEF”

TableType: “TableAlignDef” TableID: <AlignTableName>

AlignName Coordx Coordy Coordsys Attribute (1) … Attribute(N)

11.3.3 “TABLE-ANOMALY-DEF”

TableType: “TableAnomalyDef” TableID: <AnomalyTableName>

Anomalyid Coordx Coordy Coordsys AnomalyAttribute … AnomalyAttribute

11.3.4 “TABLE-M21-ANOMALY-DEF”

TableType = “TableM21AnomalyDef” TableID = <M21AnomalyTableName>

Anomalyid Coordx Coordy Elementid AnomalyAttribute … AnomalyAttribute

Defect data shall be transferred between the host and inspection/review/analysis equipment using SEMI E5, S13,F13. Columns in the table are

defined by Table 11.3.5 below.

11.3.5 TABLE-STANDARD-DEFECT-DATA-SET-DEF

NOTE 1: Data for each substrate should be reported in column order shown below. Inspection tools should support relevant

columns (see NOTE 6). Review and analysis tools should support all columns. Multiple data entries (list format data items) are

allowed for a given attribute on a single defect.

NOTE 2: The inspection equipment must add a table attribute called “Substrate Header” (ATTRID). It must be a list that includes

the following items in the given order: LotID (A[1..16]), SubstrateID (A[1..16]), ProcessEquipmentID (A[1..16]), substrate

center

(L[2], CoordX (F4), CoordY (F4)) and centering method

(A[1..16]). Refer to Table 4, Variable Item Dictionary for

descriptions of these items.

NOTE 3: See SEMI M21 for (0,0) die location methodology.

1 Vector from the origin of the substrate coordinate system to nominal substrate center location.

2 CoordSys (e.g., “SEMI M20”, “SEMI M21”, “M21P”, etc).

NOTE 4: Die origin is located at lower left-hand corner (LLHC).

NOTE 5: Data format must comply with the ISEM standard.

NOTE 6: In order to signify tool context, anomaly attributes are labeled as follows:

Column name starts with “insp*_” for inspection data, “rev*_” for defect review data, “and “anal*_” for analysis data, where “*”

is a numeric string that ensures each set of columns added is uniquely named (e.g., “rev1_” and “rev2_”).

NOTE 7: Inspection, review and analysis tools must add a table attribute called “insp*_ Header,” “rev*_Header” and

“anal*_Header” respectively (ATTRID) each time they add data to the table.

It must be a list that includes the following items in

the given order: EquipmentID (A[1..16]), EquipmentType (A[1..16]), OperatorID (A[1..16]), and CLOCK

(A[16]).

Column # Column Name Description

1 Insp_Anomaly ID ID # for the defect

2 Insp_Table specifier Specifies table with other relevant information

3 Insp_Coordinate X Intra die X Coordinate wrt LLHC of die in um

4 Insp_Coordinate Y Intra die Y Coordinate wrt LLHC of die in um

5 Insp_X index X axis die index wrt center of wafer (COW)

6 Insp_Y index Y axis die index wrt center of wafer (COW)

7 Insp_X size Defect size along X axis in microns

8 Insp_Y size Defect size along Y axis in microns

9 Insp_Defect area Defect area in square microns

10 Insp_Defect size Linear measure of defect size in microns

11 Insp_Scatter intensity Anomaly scattering intensity

12 Insp_Defect class number Previously defined class number assigned to the defect

13 Insp_Test number Inspection test in which defect was found

14 Insp_# Optical image count Number of optical images stored for a given defect

15 Insp_Optical image data Optical image data specifier

16 Insp_Cluster = 1 if defect is part of a systematic defect cluster

17 Insp_Cluster class Systematic defect class name

18 Sampled for SEM = 1 if defect chosen for SEM review

19 Rev_SEM image data SEM image data specifier

20 Rev_SEM class SEM defect class name

21 Rev_Defect height Defect height in microns

22 Sampled for analysis = 1 if defect chosen for EDX,

= 2 if defect chosen for FIB or other analysis

23 Anal_EDX data EDX data specifier

24 Anal_FIB data FIB data specifier

3 Where “*” is a numeric string that corresponds to the one in the column names the header refers to.

4 Date and time of the start of inspection, review, or analysis per SEMI E5 CLOCK data item variable.