semi合集-English.pdf - 第2977页

SEMI E120-0705 © SEMI 2003, 2005 13 IO De v i ce Su b sy s t e m Equipme nt Mo d u l e +s u b sy s t e m s + io D ev ic es 0..* 0. . * 0..* 0. . * +su bsys t e m s + sub syst ems E quipme nt E le ment 0. . * 0. . * 0. . …

100%1 / 7923
SEMI E120-0705 © SEMI 2003, 2005 12
Table 6 Attributes of Equipment
Attribute Name Definition Access Reqd Form
<<none defined>>
8.5.4.2 Module — This class models major subsystems of the equipment, such as process chambers. Module is a
subclass of ExecutionElement (see Figure 11).
8.5.4.2.1 A Module is capable of having (zero or more) MaterialLocations and is capable of processing material. A
Module or one of its aggregated Subsystem or Module objects must contain at least one MaterialLocation.
8.5.4.2.2 A Module must be a component part of Equipment or another Module and may be shared by multiples of
these. It may also be an aggregation of Subsystem, IODevice, and/or other Module instances (zero or more each).
8.5.4.2.3 Module has no additional attributes defined in the Common Equipment Model (see Table 7).
IODeviceSubsystem
Equipment
+modules
0..*
0..*
0..*
0..*
+ioDevices
+modules
+subsystems
ExecutionElement
0..*
0..*
0..*
0..*
MaterialLocation
0..*
+materialLocations
Module
0..1
Figure 9
Module Class
Table 7 Attributes of Module
Attribute Name Definition Access Reqd Form
<<none defined>>
8.5.4.3 Subsystem — This class models subsystem and subassembly components of the equipment (see Figure 12).
Subsystem is a subclass of EquipmentElement.
8.5.4.3.1 A Subsystem may be capable of having (zero or more) MaterialLocations, but is not capable of processing
material.
8.5.4.3.2 A Subsystem must be a component part of Equipment, Module, or another Subsystem and may be shared
by multiples of these. It may also be an aggregation of Subsystem, or IODevice instances (zero or more each).
8.5.4.3.3 Subsystem has no additional attributes defined in the Common Equipment Model (see Table 8).
SEMI E120-0705 © SEMI 2003, 2005 13
IODevice
Subsystem
Equipment
Module
+subsystem s
+ioDevices
0..*
0..*
0..*
0..*
+subsystems
+subsystems
EquipmentElement
0..*
0..*
0..*
0..*
MaterialLocation
0..*
+ma teria lL ocati ons
0..1
Figure 10
Subsystem Class
Table 8 Attributes of Subsystem
Attribute Name Definition Access Reqd Form
<<none defined>>
8.5.4.4 IODevice — This class models sensors, actuators, or intelligent actuator/sensor devices. Suppliers shall
model this EquipmentElement on equipment if it is practical and useful to do so for the purposes of process control
and technical support. IODevice is a subclass of EquipmentElement and is a component part of zero or more
Equipment, Subsystem, and/or Module instances (see Figure 13). IODevice has no additional attributes defined in
the Common Equipment Model (see Table 9).
IODevice
SubsystemEquipment Module
+ioDevices
0..*
0..*
0..*
+ioDevices +ioDevices
EquipimentElement
0..1 0..*0..*
Figure 11
IODevice Class
Table 9 Attributes of IODevice
Attribute Name Definition Access Reqd Form
<<none defined>>
SEMI E120-0705 © SEMI 2003, 2005 14
8.5.4.5 MaterialLocation — This concrete class models the ability of certain equipment components to hold
material. MaterialLocation is a subclass of Nameable. The attributes of MaterialLocation class are defined in Table
10.
8.5.4.5.1 A MaterialLocation is exclusively related to a single Equipment, Module, or Subsystem in a composite
aggregation (see Figure 14). Each Equipment, Module, and Subsystem may have zero or more MaterialLocations.
Equipment, Modules, and Subsystems may also have indirect access to MaterialLocations if they aggregate a
component that has a MaterialLocation. So, for instance, a Module may not have a MaterialLocation, but may
contain a Subsystem with a MaterialLocation.
materialType:enumeration
MaterialLocation
+materialLocations
0..*
Nameable
SubsystemEquipment Module
+materialLocations
0..*
+materialLocations
0..*
A MaterialLocation is
included in only one o f
these compositions
0..1 0.. 1 0.. 1
Figure 12
MaterialLocation Class
Table 10 Attributes of MaterialLocation
Attribute Name Definition Access Reqd Form
materialType Type of material held. Enumeration value is one of the following:
Carrier, Substrate, ProcessDurable
RO Y Enumeration
8.5.4.6 SoftwareModule — This concrete class is used to describe the existence and version of equipment system
software that is in use on the equipment and on equipment components. Such software might be supplied by the
equipment manufacturer or by third parties. It includes any software that may be changed without affecting the
identity of the hardware. This would cover software stored on disk drives, flash memory, eeproms, and other
memory devices. This class allows the factory host to track changes in the software. See ¶8.5.3.2
EquipmentElement for the definition of the modelRevision attribute that tracks changes in hardware. Tracking
hardware and software revisions together allows better detection of changes in the equipment capability.
8.5.4.6.1 The SoftwareModule class is a component of EquipmentElement in a composite aggregation (see Figure
15). It has four attributes: name, supplier, description, and version (see Table 11). In the case where a
SoftwareModule affects multiple EquipmentElements, each would contain its own separate SoftwareModule
describing the same software.
+name:string
+supplier:string
+description:string
+version:string
SoftwareModule
EquipmentElement
0..*
softwareModules
Figure 13
SoftwareModule Class