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SEMI E94-0705 © SEMI 2000, 2005 17 Table 15 Variable Da ta Definitions Table Variable Name Description Type Acc ess Comment CtrlJobID Control job identifier, availab le to be used in control job related event reports. Te…

SEMI E94-0705 © SEMI 2000, 2005 16

12.3.8 CJDeselect — Shall only succeed for jobs in the SELECTED state. Deselected jobs must trade places with

the job that is currently at the head of the queue. If the job at the head of the queue cannot transition to the

SELECTED state, then the deselect request shall be rejected. See the section on Control Job Queue Model for

information on breaking possible deadlocks.

Table 11 CJDeselect Service Parameter Definitions Table

Parameter Req/Ind Rsp/Cnf Comment

CtrlJobID M M Indicate which job

Status - M Success or failure

12.3.9 CJStop — Stops the ControlJob from initiating any more process jobs. Equipment should issue a STOP

command to all running process jobs. When the currently running process jobs have stopped, the ControlJob will

send a complete event with a status code indicating the ControlJob has stopped. ControlJobStop shall only succeed

on a job in the ACTIVE or QUEUED states. When CJStop is issued in the QUEUED state, its affect will be

identical to that of CJCancel.

Table 12 CJStop Service Parameter Definitions Table

Parameter Req/Ind Rsp/Cnf Comment

CtrlJobID M M Indicate which job

Action M -

Status - M Success or failure

12.3.10 CJAbort — Stops the control job from initiating any more process jobs. The currently running process jobs

are sent the Abort command by the equipment. When the equipment has detected the successful ABORT of

currently running process jobs, the ControlJob shall send a complete event with a status code indicating the job was

aborted. ControlJobAbort shall only succeed on a job in the ACTIVE or QUEUED states. When CJAbort is issued

in the QUEUED state, its affect will be identical to that of CJCancel. The equipment due to a serious alarm situation

(operator risk) may internally generate this command.

Table 13 CJAbort Service Parameter Definitions Table

Parameter Req/Ind Rsp/Cnf Comment

CtrlJobID M M Indicate which job

Action M -

Status - M Success or failure

12.3.11 CJHOQ — The other jobs in the queue are pushed back (rest of queue order remains unchanged).

Table 14 CJHOQ Service Parameter Definitions Table

Parameter Req/Ind Rsp/Cnf Comment

CtrlJobID M M Indicate which job

Status - M Success or failure

13 Variable Data

13.1 For objects defined by Control Job Management, the identifiers of the objects and all of the attributes of the

objects shall be available for inclusion in event reports associated with those objects. The following attribute is the

most likely to be used: CtrlJobID.

13.2 The following table provides the definition of additional Variable Data that equipment shall support for

Control Job Management.

SEMI E94-0705 © SEMI 2000, 2005 17

Table 15 Variable Data Definitions Table

Variable Name Description Type Access Comment

CtrlJobID Control job identifier, available to be used

in control job related event reports.

Text RO

QueuedCJobs This is an ordered list of control jobs

currently in the Queue. The first job in the

list is the job at the head of the Queue.

(list of)

Text

RO Each list item is a control job identifier.

QueueAvailableSpace Indicates number of jobs which the Queue

can accept.

Numeric RO This value cannot be negative. When it

is zero it indicates that the queue is full.

SetUpName Host sets this to define the operational

condition of the equipment.

Text RW If the equipment is manipulated locally,

it should set this variable to

“unknown”, otherwise it returns the

value set by the host (when requested).

14 Additional Requirements

14.1 Serial Execution of Control Jobs

14.1.1 Control jobs are initiated in sequential order by the equipment. The order is based on the queue. A

ControlJob shall not issue a complete event (message) until all substrates have been placed in destination carriers.

However, in many cases equipment must support multiple control jobs running at once; in order to support the

factory requirement for equipment productivity. This will be particularly true for multi-module equipment. The

next ControlJob in the queue shall start as soon as possible after processing has begun for the last ProcessJob in the

previous ControlJob’s processing control specification.

14.2 Parallel Execution of Control Job

14.2.1 Some equipment may be able to support parallel execution of control jobs. The supplier must fully

document this behavior and any additional services needed to manage it.

14.3 Modifying Control Jobs

14.3.1 Control jobs shall be modifiable if and only if they are not in either the EXECUTING or COMPLETED

states. Jobs shall be modified by using OSS to change their attributes. Modifications shall be rejected if the

equipment is in the wrong state or requested value changes are out of range.

14.4 Set-up, Pre- and Post-Conditioning

14.4.1 Whenever equipment has completed some processing work, with or without material, the equip-ment can be

considered to be “set-up” for a certain process capability. Information about the equipment’s set-up is important to

the factory in determining the best material routing. The SetupName variable defined in this standard is set by the

host after host directed processing or changes to equipment constants. If the equipment is used for processing while

off-line or not under host command, the value of the variable shall be set to “unknown”. It shall also be set to

“unknown” immediately after any changes to equipment constants.

14.5 Event Relationships

14.5.1 This section is reserved for specification of the relationship between process job events and control job

events.

14.5.2 PRJob Paused

14.5.3 PRJob Aborted or Stopped

15 Compliance

15.1 Implementations compliant to this standard shall implement all the messages as specified in §12. All

mandatory parameters must be supported. The supplier shall document support for any of the optional parameters.

Any additional parameters and messages shall be fully documented by the supplier. Additional messages shall be

used to support additional functionality and not as a replacement for any of messages specified herein.

15.2 Table 16 provides a checklist for Control Job Mangement (CJM) compliance.

Table 16 CJM Compliance Statement

Fundamental CJM Requirements CJM Section Implemented CJM Compliant

Control Job Object 8  Yes  No  Yes  No

Control Job State Model 9  Yes  No  Yes  No

Control Job Queue Model 10  Yes  No  Yes  No

Carrier Properties 11  Yes  No  Yes  No

Service Message Implementation 12  Yes  No  Yes  No

Variable Data 13  Yes  No  Yes  No

Events 7.3.2  Yes  No  Yes  No

Additional Requirements 14  Yes  No  Yes  No

Additional CJM Capabilities CJM Section Implemented CJM Compliant

none