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SEMI F9-0998 © SEMI 1992 , 1998 3 • 0.5R • 1.0R • 1.5R • 2.0R • 3.0R 9.8 Fill the submersion tank with i s o p ro pyl alcohol to a mi ni mum h e ight 2.5 cm (1 in) above the t op of the test connection. 9.9 P ressurize t…

SEMI F9-0998 © SEMI 1992, 1998 2

5.2.7 subject — To expose to.

5.2.8 submersion tank — A transparent tank, filled

with isopropyl alcohol, to allow observation of air

leakage from a tube fitting connection.

6 Description of Test Equipment

6.1 A supply of compressed air. Pressure to be within

± 2% of specified value.

6.2 Isopropyl alcohol.

6.3 An instrument for measuring lengths of tubing

(e.g., tape measure).

6.4 A special apparatus which has a fixture for

attaching the fitting body, while also providing a means

to clamp the free end of tube, to maintain a tube bend

radius.

6.4.1 The apparatus shall allow the test specimen to be

internally pressurized.

6.4.2 The apparatus shall have a transparent

submersion tank capable of containing a fluid for

observing leakage. The minimum fluid level shall be

2.5 cm (1 in) above the test connection.

6.5 See Figure 1 for a basic side load test apparatus.

Figure 1

Side Load Test Apparatus

7 Safety Precautions

WARNING: This test method will subject test

specimens to conditions that may exceed the

normal performance rating of the products

under evaluation. Adequate precautions must

be taken to prevent injury to the person

conducting the test.

8 Test Specimens and Conditioning

8.1 Sample Size — A minimum of three specimens

shall be tested.

8.2 Tube — The tubing used for this evaluation shall

be of straight lengths, not previously coiled.

8.3 Specimen Surface — All surfaces of the specimens

shall be free of visible flaws, scratches, or other

imperfections, unless typically found on a

representative sample of the product.

8.4 Specimen Conditioning — All specimens must be

conditioned for a minimum of one hour in an air

environment of 23° ± 2.8°C (73° ± 5°F) prior to being

subjected to pressurization and bending of the tube.

9 Test Procedure

9.1 Perform the following calculation to determine the

“R” value.

9.1.1 For a tubing outside diameter (O.D.) of 1.5 cm

(.59 in) or less: R = Tube O.D. × 5.

9.1.2 For a tubing outside diameter (O.D.) greater than

1.5 cm (0.59 in): R = Tube O.D. × 5.

NOTE: The constants (5 and 10) in Sections 9.1.1 and 9.1.2

were derived from the extrapolation of the actual “Minimum

Bend Radius” of tubing from various manufacturers.

9.2 Perform the calculation in Section 9.2.1 to

determine the tube length required to produce a 180°

arc at a tube bend radius of R.

9.2.1 L = R × 3.14

9.3 Cut three tubes of equal length per the following

formula: 3L + 15 cm (6 in).

9.4 Install a fitting body to the test fixture, in the

submersion tank.

9.5 Install a tube into the fitting body and assemble the

connection per manufacturer’s specification.

NOTE: To prevent side loading of the fitting connection prior

to bending of the tube, provide a method of supporting the

tube.

9.6 Measure from the tube end of the fitting

connection and place a mark on the tube (within ± 1%

of calculated value) in five separate locations as

determined below:

• 0.5L

• 1.0L

• 1.5L

• 2.0L

• 3.0L

9.7 Use the following formula to determine the actual

tube bend radius used and record on test data sheet (see

Related Information 1 for a sample):

SEMI F9-0998 © SEMI 1992, 19983

• 0.5R

• 1.0R

• 1.5R

• 2.0R

• 3.0R

9.8 Fill the submersion tank with isopropyl alcohol to

a minimum height 2.5 cm (1 in) above the top of the

test connection.

9.9 Pressurize the test specimen with an internal air

pressure of 250 kPa (36 psig), regardless of tube size.

9.10 Observe the connection for a minimum of one

minute for bubble leakage (bbl/min) and record on test

data sheet under the column entitled “STRAIGHT”.

9.11 Carefully bend the tube in a uniform 180° arc

with a radius of 3R and clamp the free end to the test

fixture. (See Section 9.7 for specific R value.) Proper

tube length at the clamping point is determined in

Section 9.6.

9.11.1 R value tolerances =

• Tubes with 1.5 cm (0.59 in) O.D. or less = ± 5%

• Tubes with greater than 1.5 cm (0.59 in) O.D. = ±

9.12 Observe the connection for a minimum of one

minute for bubble leakage. Record leakage on the

appropriate area of the test data sheet. If no leakage is

observed, note as “None”.

9.13 Repeat Sections 9.11 and 9.12 for the remaining

tube bend radius of 2R, 1.5R, 1R, and 0.5R, in

descending order.

9.13.1 Should any tube kink prior to achieving 0.5R,

testing of that sample will be discontinued. The radius

at which kinking occurred shall be recorded and noted

as “kink”.

9.13.2 To reduce the effects caused by creep of the

material the total time from initial bending of the tube

until achieving the 0.5R value is to be less than ten

minutes.

9.14 After completion of the first sa mple, replace the

fitting and tube with new specimens and repeat Sections

9.4 through 9.13.2 for a total of three samples.

10 Test Data Sheet

The test data sheet shall include the following

information:

10.1 Date tested.

10.2 Operator and test facility.

10.3 Description of items tested, including:

Tubing — Manufacturer, O.D., wall thickness, part

number, and material type.

Fitting — Manufacturer, type, size, part number, and

material type.

10.4 The actual tube bend radius for each nominal

bend radius.

10.5 The leakage rate, in bubbles per minute, for each

sample at each radius.

NOTE: A sample test data sheet is provided as Related

Information 1.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

RELATED INFORMATION 1

SAMPLE TEST DATA SHEET

NOTE: This related information is not an official part of SEMI F9 and is not intended to modify or supercede the official test

method. It has been derived from industry specifications. Publication was authorized by full letter ballot procedures.

Determination of the suitability of the material is solely the responsibility of the user.

Test Date: Operator: Test Facility:

Tube Manufacturer: Fitting Manufacturer:

Tube O.D.: Fitting Type:

Tube Wall Thickness: Fitting Size:

Tube P/N: Fitting P/N:

Tube Material: Fitting Material:

Leakage— (bbl/min.) [ ] = Acutal Tube Bend Radius, cm(s)

3R 2R 1.5R 1R 0.5R

Sample Straight [ ] [ ] [ ] [ ] [ ]

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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the contents in whole or in part is forbidden without express written

consent of SEMI.