semi合集-English.pdf - 第5586页

SEMI P10-0705 © SEMI 1990, 2005 81 < x s : e l e m e n t n a m e = " P a t t e r n G r o u p R e s u l t s " t y p e = " P a t t e r n G r o u p R e s u l t s T y p e " m i n Oc cu r s = " 0 &…

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SEMI P10-0705 © SEMI 1990, 2005 80
< xs: elem ent nam e= "Mirr orM a sk" t ype= " x s:boolea n"
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< xs: elem ent nam e= "Cust om e r Spe cRevision"
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< / xs: sequence>
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unbounde d" / >
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/ >
< / xs: sequence>
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fixed
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< / xs: ext ension>
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>
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< / xs: ext ension>
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SEMI P10-0705 © SEMI 1990, 2005 81
< xs: elem ent nam e= "Pa t t e r nGr ou pResult s"
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< xs: elem ent nam e= "Regist rMea su re m e nt s"
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< xs: elem ent nam e= "Closure M easurem e nts"
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m axOccurs
= "u nbounde d" / >
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m axOccurs
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< xs: elem ent nam e= "De fect M easur em en t s"
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"
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< xs: elem ent nam e= "Fina lQcAudit or" t ype= "x s:st r ing"
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< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
use
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt MaskResult sOpt ion s" / >
< xs: at t ribut e
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fixed
= "En dM a sk Result sOpt ions" / >
< / xs: com plexType>
- < xs: com plexType nam e= "Ven dorI nfoType">
SEMI P10-0705 © SEMI 1990, 2005 82
- < xs: sequence>
< xs: elem ent nam e= "Vendor Con t a ct " t ype= "x s:st ring"
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= " 0 " / >
< xs: elem ent nam e= "Vendor Phone" type= "xs:st r in g"
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= " 0 " / >
< xs: elem ent nam e= "Ve ndorAddre ss" type= "xs:st ring"
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= "u nbounde d" / >
< xs: elem ent nam e= "Vendor Fax" type= "xs:st r ing"
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= " 0 " / >
< xs: elem ent nam e= "Vendor Em a il" t ype= "xs:st ring"
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= " 0 " / >
< xs: elem ent nam e= "Fina lQcAudit or" t ype= "x s:st r ing"
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= " 0 " / >
< xs: elem ent nam e= "Vendor Or der I d" type= "x s:st ring"
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< / xs: sequence>
< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt V endor I nfo" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= "
re qu ire d"
fixed
= "En dVe n dorI n fo" / >
< / xs: com plexType>
- < xs: com plexType nam e= "BillingI nfor m at ionType" >
- < xs: sequence>
< xs: elem ent nam e= "Bla nk e t PoN um ber" t y pe= "x s:string"
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= " 0 " / >
< xs: elem ent nam e= "PoNum be r" type= "xs:st r ing"
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< xs: elem ent nam e= "SoN um ber" t ype= " x s:st ring"
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= " 0 " / >
< xs: elem ent nam e= "ReleaseN um ber " t ype= "x s:st rin g"
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0 " / >
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< xs: at t ribut e nam e= "groupN am e " t ype= " x s:st ring"
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< xs: at t ribut e nam e= "p1 0 St art " type= "x s:string" use= "requ ire d"
fixed
= "St a rt BillingI nfor m a t ion" / >
< xs: at t ribut e nam e= "p1 0 End" t ype= "x s:st ring" use= " r equir e d"
fixed
= "EndBillingI nfor m a t ion" / >
< / xs: com plexType>
- < xs: com plexType nam e= "M a t er ia lsUsedType" >
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< xs: elem ent nam e= "
TopPe llicleUsed" type= "x s:st r ing"
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= " 0 " / >
< xs: elem ent nam e= "Bott om PellicleUse d" type= "xs:st ring"
m inOccurs
= " 0 " / >
< xs: elem ent nam e= "Pa ck a geUsed" t ype= "x s:st r ing"
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= " 0 " / >
< xs: elem ent nam e= "Subst ra t e " type= " Subst ra t e Type "
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