semi合集-English.pdf - 第361页
SEMI E51-0200 © SEMI 1995 , 2000 7 0 100 200 300 400 500 140 110 120 50 70 80 90 1.0 10 µ 100 µ 0.00 1 0.01 0.1 1 µ 10 100 Duration in Seconds Percent of Nominal Supply Voltage (RMS or Peak) Ei l t Steady State 0.5 0.2 0…
SEMI E51-0200 © SEMI 1995, 2000 6
Exhaust Temp. Supply Filtration
(absolute)
Specification POC Material POC Fitting Notes
Heat/General - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304
SS/Galv./Acid
Res. SS
stub/s.m.
flange
within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Solvent - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304 SS/Galv. stub/s.m.
flange
within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Vacuum Pump - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
- - 304 SS NW flange within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
Acid - -2.5 to -7.6 cm
(-1 to -3 in H
2
O)
--Acid Res.
SS/PVC SCH
40/PP
stub/p. flange within
-2.5 to -7.6 cm
range
(-1 to -3 in H
2
O)
± 30% variability
NOTE 1: Review waste composition, concentration, and temperature for material compatibility.
NOTE 2: Tool to have POC mechanical joint secondarily-contained and exhausted.
NOTE 3: Tool to have POC mechanical joint for toxic or hazardous gas POC mechanical joint secondarily-contained and exhausted.
NOTE 4: Tool to have POC mechanical joint secondarily-contained.
Electrical Services
Applicable Code See NFPA 70 (National Electrical Code).
Supply Voltage, Nominal 120/208V and 277/480V single-phase, 208/120V and 480/277V three-phase
Typical Supply Voltage Range See Figure 2.
EMI Noise See SEMI E33.
ESD Ambient See SEMI E33.
Ground Currents See IEEE 1100.
Computer Interfaces See SEMI E30.
Electrical Interface See SEMI E7.
UPS Electrical standards as described by customer
SEMI E51-0200 © SEMI 1995, 20007
0
100
200
300
400
500
140
110
120
50
70
80
90
1.0
10
µ
100 µ
0.001
0.01
0.1
1
µ
10
100
Duration in Seconds
Percent of Nominal Supply Voltage (RMS or Peak)
Eilt
Steady
State
0.5
0.2
0.02
0.003
200
µ
Supply Voltage
Range Envelope
NOTE 1: For Equipment Voltage Sag Immunity Specification see SEMI F47.
Figure 2
Typical Facilities Supply Voltage Range Envelope
SEMI E51-0200 © SEMI 1995, 2000 8
Table 2 Site-Specific Facilities Services and Termination Matrix
Water Service Supply
Temp.
Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water
Ultra Pure Water
Deionized Water
Hot Ultra Pure Water
Fire Protection
Process Cooling Water
Gas Service Supply
Temp.
Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra Pure
Nitrogen, Process
Nitrogen, Non-Process
Compressed Air
Oxygen
Hydrogen, Bulk
Argon
Helium
Natural Gas
Process Vacuum
Specialty Gases
Drains Waste Temp. Pressure Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acid Waste
H
2
SO
4
Solvent Waste
Industrial
DI Reclaim
Fluoride Waste
HF Reclaim
Slurry
Bulk Chemical
Distribution
Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acids, Bases, Oxidizers
Solvents