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SEMI S21-1103 © SEMI 2003 2 4.3 European Directives 2 89/686/EEC — Pers onal Protective Equipment Directive 4.4 Europea n Standards 3 EN207 — Personal Eye-Protection - Filters and Eye- Protection A g ainst Laser Radiati …

SEMI S21-1103 © SEMI 2003 1

SEMI S21-1103

SAFETY GUIDELINE FOR WORKER PROTECTION

This safety guideline was technically approved by the Global Environmental, Health, & Safety Committee

and is the direct responsibility of the Japanese Environmental, Health, & Safety Committee. Current edition

approved by the Japanese Regional Standards Committee on August 8, 2003. Initially available at

www.semi.org October 2003; to be published November 2003.

1 Purpose

1.1 This safety guideline identifies preferred methods

for the protection of persons from safety and health

hazards as they perform work on or around

semiconductor manufacturing equipment.

2 Scope

2.1 This guideline describes methods for protection

against hazards that workers may encounter in the work

area, such as hazardous energies, physical hazards, or

hazardous chemicals.

2.2 This guideline is intended to recommend

considerations for protecting all persons that work on or

around semiconductor equipment.

2.3 This guideline applies to equipment suppliers and

users of equipment, including activities related to

semiconductor manufacturing, and equipment and

process development activities.

2.4 This guideline includes the following sections:

1 Purpose

2 Scope

3 Limitations

4 Referenced Standards

5 Terminology

6 General Worker Safety

7 Chemical Hazards

8 Control of Hazardous Energy

9 EEW at Hazardous Voltage or Energy Levels

10 Radiation-Producing Equipment

11 Physical Hazards

12 Personal Protective Equipment

13 Emergency Preparation and Managing

Abnormal Situations

NOTICE: This safety guideline does not purport to

address all of the safety issues associated with its use.

It is the responsibility of the users of this safety

guideline to establish appropriate safety and health

practices and determine the applicability of regulatory

or other limitations prior to use.

3 Limitations

3.1 This guideline is intended to be used by the

equipment suppliers and users in consideration of

worker protection. This guideline is not intended to be

all-inclusive or used to verify conformance to any

regulatory requirements.

3.2 Equipment design criteria are outside the scope of

this document.

4 Referenced Standards

4.1 SEMI Standards

SEMI F34 — Guide for Liquid Chemical Pipe Labeling

SEMI S2 — Environmental, Health, and Safety

Guidelines for Semiconductor Manufacturing

Equipment

SEMI S8  Safety Guidelines for Ergonomics

Engineering of Semiconductor Manufacturing

Equipment

SEMI S13  Safety Guideline for Operation and

Maintenance Manuals Used with Semiconductor

Manufacturing Equipment

SEMI S19 — Safety Guideline for Training of

Semiconductor Manufacturing Equipment Installation,

Maintenance and Service Personnel

4.2 ANSI Standards

ANSI B 11.21 — Machine Tools - Machine Tools

Using Lasers for Processing Materials - Safety

Requirements for Design, Construction, Care, and Use

ANSI Z136.1 — Safe Use of Lasers

ANSI/NFPA 70E Standard for Electrical Safety

Requirements for Employee Workplaces 2000 Edition

1 American National Standards Institute, New York Office: 11 West

42nd Street, New York, NY 10036, USA. Telephone: 212.642.4900;

Fax: 212.398.0023 Website: www.ansi.org

SEMI S21-1103 © SEMI 2003 2

4.3 European Directives

89/686/EEC — Personal Protective Equipment

Directive

4.4 European Standards

EN207 — Personal Eye-Protection - Filters and Eye-

Protection Against Laser Radiation

EN208 — Personal Eye-Protection - Eye-Protectors for

Adjustment Work on Lasers and Laser Systems (Laser

Adjustment Eye-Protectors)

4.5 JIS Standards

JIS C 6802 — Safety of Laser Products

4.6 OSHA Standards

29 CFR 1910.147 — The Control of Hazardous Energy

(lockout/tagout)

29 CFR 1910.1200  Hazard Communication

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CPR — cardiopulmonary resuscitation

5.1.2 EEW — energized electrical work – Also known

as Working On Energized Electrical Circuitry.

5.1.3 EMO — Emergency Off

5.1.4 ERT — Emergency Response Team

5.1.5 MSDS — Material Safety Data Sheet

5.1.6 PPE — Personal Protective Equipment

5.2 Definitions

5.2.1 confined space  a space that:

(1) is large enough and so configured that an employee

can bodily enter and perform assigned work; and (2)

has limited or restricted means for entry or exit (e.g.,

chambers, space in enclosures are spaces that may have

limited means of entry.); and (3) is not designed for

continuous employee occupancy.

2 European Commission, Available through the European Union

On-Line at http://europa.eu.int/index_en.htm.

3 European Committee for Standardization, Available through the

ON-CEN Sales Point, P.B. 130, A-1021 Vienna. Fax

43.1.213.00.818; Website: www.on-norm.at/cen/index_e.htm

4 Japanese Industrial Standards, Available through the Japanese

Standards Association, 1-24, Akasaka 4-Chome, Minato-ku, Tokyo

107-8440, Japan. Telephone: 81.3.3583.8005; Fax: 81.3.3586.2014

Website: www.jsa.or.jp

5Occupational Safety and Health Administration, U.S. Government

Printing Office, Washington, DC 20402, USA

5.2.2 e-diagnostic  electronic access to equipment

for the purpose of diagnosing problems from a distance

(e.g., via dial-up, network connection, or wireless

communication means).

5.2.3 electrical PPE — personal protective equipment

specially designed to provide protection from electrical

arc, shock or other effect that could cause injury to a

person touching an electrical circuit or causing an

electrical fault.

5.2.4 emergency  a sudden, serious event or

situation, such as earthquake, explosion, fire, or release

of hazardous energy or chemicals.

5.2.5 emergency response team  a team who is

responsible for responding to emergencies.

5.2.6 employer  entity that directly supervises

employees.

5.2.7 energized electrical work — work performed on

energized equipment or systems containing hazardous

voltages.

5.2.8 facility operator  entity that controls activities

at the site.

5.2.9 facility owner  the actual owner of the property

that may not be the actual operator of the facility.

5.2.10 hazardous energy  any energy that can

potentially result in serious injury, illness, or death.

NOTE 1: Hazardous energies include electrical (e.g.,

capacitors, batteries), chemical, thermal/cryogenic, stored

pressure (e.g., pressurized containers), suspended weight,

stored mechanical (e.g., springs), generated pressure (e.g.,

hydraulics and pneumatics), and other sources that may lead

to the risk of injury.

5.2.11 operator  a person who interacts with the

equipment only to the degree necessary for the

equipment to perform its intended function. [SEMI S2]

5.2.12 hazardous voltage  voltages greater than 30

volts rms, 42.4 volts peak, 60 volts DC [SEMI S2].

NOTE 2: To avoid confusion between hazardous voltage and

non-hazardous electrical energy, see definition for non-

hazardous electrical energy.

5.2.13 non-hazardous electrical energy — electrical

energy of which voltage considered to need no further

protection to be safe for human contact. Includes

voltages less than the value specified as “hazardous

voltage” and power less than 240 volt-amps (VA) (as

used in EMO circuits and interlock circuits that must

remain active during maintenance).

5.2.14 supplier  party who provides equipment to

and communicates directly with the user. A supplier

SEMI S21-1103 © SEMI 2003 3

may be a manufacturer, an equipment distributor, or an

equipment representative. [SEMI S2]

5.2.15 user  party who acquires equipment for the

purpose of using it to manufacture semiconductors.

5.2.16 work  any activity performed on

semiconductor manufacturing equipment, utilities

connected to the equipment, or facilities associated with

the equipment within the work area.

5.2.17 work area  room or defined space where

semiconductor manufacturing equipment is located and

where workers are present. This can include service

chases and sub-fab areas.

5.2.18 workers  personnel who install, operate,

maintain, service, decontaminate, or disassemble

equipment.

6 General Worker Safety

6.1 The hierarchy for selecting worker protection

measures should be as follows:

• Hazard elimination by design

• Engineering controls

• Administrative methods

• Personal Protective Equipment

6.2 The equipment supplier should provide information

in the equipment operation, maintenance, or service

manual or other appropriate documents on

recommended controls to reduce the risks. These

documents should conform to SEMI S13.

6.3 Equipment Engineering System (EES) Related

Safety Issues

6.3.1 Suppliers should identify all forms of e-

diagnostic communications (either standard or optional)

that exist or are planned and should include the

preferred method (i.e., local area network (LAN),

telephone line, wireless port) that is required.

6.3.2 Suppliers should describe any communications

isolation feature (e.g., cut-off switches, locations for

disconnecting cables) that is available to protect

equipment from being controlled remotely.

NOTE 3: Isolation of communication usually will not be

acceptable to local jurisdictions as a substitute for isolation of

hazardous energy in a hazardous energy control procedure.

6.4 Prior to work, employers should develop safe work

procedures.

6.4.1 Development of safe work procedures should use

hazard analyses and risk assessments to identify the

hazards and determine which hazards warrant further

mitigation.

6.4.2 Risks identified by job hazard analyses and risk

assessments should be reduced to an acceptable level,

using the protective measure hierarchy described above.

6.5 Employers should ensure that workers are

adequately trained to perform their assigned work

safely.

6.5.1 Suppliers and users should agree on training

involving specific equipment.

NOTE 4: See SEMI S19, which pertains to safety training

and certification for personnel working in semiconductor

fabrication facilities.

6.6 The supplier should provide the user with the

version of equipment installation, maintenance, service,

and operation manuals that matches the specific

equipment configuration as installed, contains the most

current information for that configuration but is

appropriate to the specific equipment for both

configuration and process.

6.6.1 The user should verify that the manuals correctly

reflect the equipment configuration as it was installed.

If there are any discrepancies, the user and the supplier

should agree on corrective actions.

6.7 The facility operator should establish site-specific

safety procedures for the safety of all persons including

temporary workers, visitors, and supplier

representatives in the work area.

6.7.1 Site-specific hazards and appropriate protective

measures including applicable safety procedures should

be communicated by the facility operator to all persons.

6.8 Upon request, the facility operator should identify

appropriate communication measures to ensure there is

communication between workers that may be

physically separated, such as between upper and lower

floors or between operation and maintenance areas.

NOTE 5: Facility operators may restrict wireless

communications because of interference issues. This may

include wireless phones, Personal Digital Assistants (PDAs),

two-way pagers, and other wireless devices.

6.9 The facility operator should ensure conformance to

all applicable regulatory requirements and control of

hazards in the work area. The use of industry practices

should be considered in the absence of regulatory

requirements.

NOTE 6: Multi-employer work site issues may be involved

in some jurisdictions. Check with local site personnel for

information before finalizing practices.