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SEMI E87-0705 © SEMI 1999, 2005 49 R1-2.3.2 Indicated states: LTS = L oad Port Transfer State, LRS = Load Port Reservation State L CAS = Load Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot …

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SEMI E87-0705 © SEMI 1999, 2005 48
Method of Original
Instantiation
CarrierID
Read
ID
Verifi-cation
Following Actions CarrierID = Parameter Required
by Service
9 The method of
original
instantiation is
defined following
the carrierID read
fail and is described
in column titled
following actions.
Fails NA A ProceedWithCarrier service is
received and the carrierID is
provided in the service.
CarrierID
provided by
the Proceed-
WithCarrier
service.
ProceedWith-Carrier
: CarrierID, PortID,
PropertiesList
10 The method of
original
instantiation is
defined following
the carrierID read
fail and is described
in the column titled
Following Actions.
A CancelCarrier service is received
and the carrierID is the one
provided by the CancelCarrier.
CarrierID
provided by
the Cancel-
Carrier
service.
CancelCarrier:
CarrierID, PortID
R1-2 Scenarios
R1-2.1 The scenarios listed here are not a requirement of this standard. They are provided to aid in the
understanding of the document. These scenarios are not an exhaustive set of all possible scenarios. The scenarios
presented are typical or common scenarios encountered when using this standard.
R1-2.2 Normal Roundtrip 1
R1-2.2.1 Assumptions: Fixed buffer production equipment, FOUP, Host based verification
R1-2.2.2 Indicated states: LTS = Load Port Transfer State, LCAS = Load Port/Carrier Association State, CIDS =
Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-2 Normal Roundtrip 1
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier is docked.
SNR
7 Slot map is read. H<-E WaitingForHost
8 Slot map is verified by host, and result is OK.
WFH
9 Host commands to proceed. H->E ProceedWithCarrier
10 Process starts.
11 Process completes.
TB
12 Carrier is undocked. H<-E ReadyToUnload RTU
13 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
14 Unloading transfer completes. H<-E ReadyToLoad RTL NA (T) (T)
R1-2.3 Normal Roundtrip 2
R1-2.3.1 Assumptions: Fixed buffer production equipment, FOUP, Production equipment based verification, Bind
Service received
SEMI E87-0705 © SEMI 1999, 2005 49
R1-2.3.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-3 Normal Roundtrip 2
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with
specified carrierID, and reserved for
loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by production
equipment, and result is OK.
H<-E IDVerificationOK
6 Carrier is docked.
7 Slot map is read.
SNR
8 Slot map is verified by production
equipment, and result is OK.
H<-E SlotMapVerificationOK
9 Process starts.
10 Process completes.
TB
11 Carrier is undocked. H<-E ReadyToUnload RTU
12 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
13 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.4 Normal Roundtrip 3
R1-2.4.1 Internal buffer production equipment, FOUP, Host based verification
R1-2.4.2 Indicated states: LTS = Load Port Transfer State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map
Status, LCAS = Load Port/Carrier Association State.
Table R1-4 Normal Roundtrip 3
# Comment Dir Message LTS LCAS CIDS CSMS
0 Initial condition. RTL
1 Loading transfer starts. H<-E TransferBlocked
2 Loading transfer completes.
NA (T) (T)
3 CarrierID is read. H<-E WaitingForHost
4 CarrierID is verified by host, and result is OK.
WFH
5 Host commands to proceed. H->E ProceedWithCarrier
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
SNR
9 Slot map is read at FIMS port. H<-E WaitingForHost
10 Slot map is verified by host, and result is OK.
WFH
11 Host commands to proceed. H->E ProceedWithCarrier
12 Process completes.
13 Carrier completes. H<-E CarrierComplete
NA
14 Host commands to carrier-out. H->E CarrierOut
RTL
15 Carrier-out starts. H<-E TransferBlocked TB
16 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
A
IVO
SVO
SEMI E87-0705 © SEMI 1999, 2005 50
# Comment Dir Message LTS LCAS CIDS CSMS
17 Unloading transfer starts. H<-E TransferBlocked TB
18 Unloading transfer completes. H<-E ReadyToLoad RTL NA (T) (T)
R1-2.5 Normal Roundtrip 4
R1-2.5.1 Internal buffer production equipment, FOUP, Production equipment based verification, Bind service
received
R1-2.5.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State, LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status.
Table R1-5 Normal Roundtrip 4
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. NR NA (T) (T)
1 Load port is associated with
specified carrierID, and reserved for
loading.
H->E Bind
RTL
2 Loading transfer starts. H<-E TransferBlocked
R
3 Loading transfer completes.
4 CarrierID is read.
INR
5 CarrierID is verified by equipment,
and result is OK.
H<-E IDVerificationOK
6 Carrier-in starts. H<-E BufferCapacityChange
TB
A
7 Carrier-in completes.
8 Process starts.
9 Slot map is read at FIMS port.
SNR
10 Slot map is verified by equipment,
and result is OK.
H<-E SlotMapVerificationOK
11 Process completes.
12 Carrier completes. H<-E CarrierComplete
13 Host commands to carrier-out. H->E CarrierOut
RTL
NR
NA
14 Carrier-out starts. H<-E TransferBlocked TB R
15 Carrier-out completes. H<-E
H<-E
ReadyToUnload
BufferCapacityChange
RTU
16 Unloading transfer starts. H<-E TransferBlocked TB
A
IVO
SVO
17 Unloading transfer completes. H<-E ReadyToLoad RTL
NR
NA (T) (T)
R1-2.6 Normal Roundtrip 5
R1-2.6.1 Assumptions: Fixed buffer production equipment, FOUP, Production equipment based verification,
Carrier Notification service received
R1-2.6.2 Indicated states: LTS = Load Port Transfer State, LRS = Load Port Reservation State LCAS = Load
Port/Carrier Association State, CIDS = Carrier ID Status, CSMS = Carrier Slot Map Status
Table R1-6 Normal Roundtrip 5
# Comment Dir Message LTS LRS LCAS CIDS CSMS
0 Initial condition. (T) (T)
1 Equipment is notified of future
Carrier arrival.
H->E CarrierNotification
RTL
2 Loading transfer starts. H<-E TransferBlocked TB
NR NA
INR SNR