semi合集-English.pdf - 第1758页
SEMI E42-0704 © SEMI 1995, 2004 27 Table 3.2 defi nes the attributes of the agen t-specific dataset object . Table 3.2 Agent-Specific Dataset Ob ject Attribute Definition Attribute Name Definition Access Rqmt Form ObjTyp…
SEMI E42-0704 © SEMI 1995, 2004 26
Attribute Name Definition Access Rqmt Form
recalculated to total time for a main recipe when
linked. Used for scheduling purposes. Algorithm for
calculation shall be documented. Default is 0.
ExecChgCtrl Specifies change control requirements for recipe.
(See Section 6.5.)
RW N Binary. Bitwise (MSB =
8**).
1 - The recipe body may be
changed,
2 - Change notification is
required,
3 - Recipe may be selected
after change,
4 - Most recent parameter
settings shall be saved.
ExtRef A list of all recipe specifiers as referenced within the
recipe. Explicit versions not required. Reset when
the recipe is created, updated, and verified.
RO N List of formatted text.
LinkList A complete list of recipe specifiers found in the
ExtRef
attribute of a main recipe and all of its sub-
recipes, with duplicates removed and all versions
explicitly determined. Set for the main recipe when
linked
. Reset when the recipe is originated or
verified. Required for multi-part recipe support.
RO N List of formatted text.
LinkParam A list of all variable parameter definitions contained
in the Parameters
attribute of a main recipe and all o
f
its subrecipes, with duplicates removed. Reset when
the recipe is created, updated, or verified. Set when
the recipe is linked. Required for variable parameter
support.
RO N Structure composed of
p
arameter name, initial value,
and restrictions.
Parameters A list of variable parameter definitions contained in
the recipe. Reset when the recipe is created,
updated, and verified. Set when the recipe is
verified. Required only for variable parameter
support.
RO N Structure composed of
p
arameter name, initial value,
and restrictions.
SrcRcpID Identifier of the source form recipe from which a
derived object form recipe is derived. Value
determined by the verifier of the recipe. Required
only for support of derived object form recipes.
RO N Formatted text.
VerificationID Identification code set by the verifier of the recipe.
May be used to determine out-of-date formats that
need to be reverified.
RO N Text. Maximum length is 40
characters.
UD_* Non-standard attribute defined by supplier or user.
Asterisk indicates the part of the attribute name that
is provided in this definition. Shall be preserved
exactly except by the entity that defined it.
RO N Varies with definition. Text
form is limited to 80
characters.
** NOTE: SEMI E4 and E5 number bits 1–8, where Bit 8 = MSB (most significant bit).
3.4.2.2 Agent-Specific Attribute Definitions — The names of user-defined attributes shall start with the prefix
"AgentSpec_UD_" and shall be preserved without modification from transferred recipes. These attributes follow all
standard attributes when transferred.
An agent-specific dataset exists only if an agent-specific attribute other than the timestamp and attribute-length
attributes of the dataset itself have been set.
SEMI E42-0704 © SEMI 1995, 2004 27
Table 3.2 defines the attributes of the agent-specific dataset object.
Table 3.2 Agent-Specific Dataset Object Attribute Definition
Attribute Name Definition Access Rqmt Form
ObjType The object type. RO Y Text = "MRcpASDS"
ObjID The object's identifier. Contains the value in
AgentSpec_Agent
.
RO Y Text.
AgentSpec_Agent The name of the executing agent to which the other
attributes in the dataset apply. Mandatory.
RO Y Text.
AgentSpec_AttrLength The length of the agent-specific attributes, in bytes.
Mandatory.
RO Y Unsigned integer.
AgentSpec_ChgTime Timestamp of when an agent-specific attribute was last
changed. Mandatory.
RO Y Formatted text.
AgentSpec_Comments Comments specific to the agent entered by the author. RW N Text. Maximum length
is 80 characters.
AgentSpec_LinkParam A list of variable parameter definitions modified from
the list in LinkParam
. Valid only for a linked main
recipe. Parameter name and form may not be changed.
RO N List of Structure
composed parameter
name, value, and
restrictions.
Certified The certification-level for the specific agent, assigned
by an authorized user. Reset when
AgentSpec_LinkParam
is modified. Required for
certification support.
RW N Unsigned integer.
AgentSpec_UD_* Non-standard attribute defined by the supplier or user.
Asterisk indicates the part of the attribute name that is
provided in this definition. Must be preserved exactly
except by the defining entity.
RO N Varies with definition.
Text form is limited to
80 characters.
3.4.2.3 Minimal Managed Recipe — The minimal model for a managed recipe is shown in Figure 3.6. Only
required attributes are supported in this model. This model can only be used for single-part recipes in the dedicated
namespace, such as the default namespace required for stand-alone equipment. There are no agent-specific datasets.
Figure 3.6
Object Model for Minimal Managed Recipe
SEMI E42-0704 © SEMI 1995, 2004 28
3.5 Execution Recipes — The type of recipe handled by
a recipe executor is called an execution recipe. This
type of recipe has attributes and a body but does not
have an agent-specific dataset. Most of the generic
attributes of the managed recipe, and certain of the
agent-specific attributes, are also attributes of the
execution recipe, while in other cases, a generic
attribute and an agent-specific attribute are merged and
placed in a new execution recipe attribute.
A managed recipe is converted to an execution recipe
when the recipe is downloaded to the recipe executor,
and correspondingly, an execution recipe is converted
to a managed recipe when uploaded from the recipe
executor.
The execution recipe is defined in detail in Section 6.3.
4 Recipe Namespace
This section defines the basic conceptual model for the
recipe namespace, a logical domain for recipe storage
and management, within which the identifier of a recipe
is guaranteed to be unique. The model in the current
section is applicable to implementations with
centralized storage. Section 5 defines an extension of
the basic model for a distributed recipe namespace.
In general, the term "namespace" refers to a domain of
unique identifiers. The issue of namespace boundaries
exists for all object types, particularly in a distributed
environment, and is not unique to recipes. However,
within the context of RMS, namespace is used as a
synonym for recipe namespace.
4.1 Motivations — A recipe's identifier may not be
unique across different namespaces or throughout a
factory. (That is, a given identifier may be used by
internally different recipes except within a single
namespace.) A primary role of a namespace is to define
an area within which the uniqueness of any given recipe
identifier may be guaranteed.
The requirements for Recipe Management that are
addressed in this section include:
• to define the boundaries of specific areas where
recipes may be uniquely identified, stored, and
retrieved,
• to define the attributes and operations for the
management domain of recipes, including recipe
protection and recipe operations,
• to allow control of removable media,
• to allow stand-alone equipment to execute recipes,
• to facilitate smooth integration of stand-alone
equipment into on-line factory systems,
• to allow integrated equipment to continue to
execute recipes when communications have been
lost, and
• to provide the basis for the distributed model in
Section 5, which allows a supervisor to use and
manage the storage capacity of its subordinate
agents.
4.2 Namespace Model — The namespace model serves
two major purposes. First, it provides a common set of
management rules. Second, it allows a set of recipes to
be shared among a group of executing agents that have
a common process type, common functionality, and a
common recipe language.
Figure 4.1 shows the basic namespace model with four
objects: the recipe, the namespace itself, a namespace
component called recipe namespace segment, and a
recipe namespace manager.
The recipe namespace manager (or manager)
represents the interface for the namespace to the
external world and the internal decision authority
within the namespace. All services for the namespace
and its recipes are provided by the manager. The
namespace itself is passive. While it has important
attributes, the namespace has no operations, and it
provides no services.
The recipe namespace segment (or segment)
represents both the internal storage element and the
actual manipulation of recipes within the namespace,
under the supervision of the manager. In the basic
model, it also provides no public services. The
relationship between the segment and the manager in
this model is presumed to be internal to an application.
Figure 4.1 represents a namespace with centralized
storage. However, it can easily be extended to the
distributed recipe namespace, which may have
multiple segments, each provided by a different external
agent. For that case, the manager and segment must
provide public services for one another.