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SEMI E84-0305 © SEMI 1999, 2005 6 6.1.2.3 The assignment of the load port is releva nt when two load ports use a common pa rallel I/O interface. The active equipment shall select the load port by m eans of the CS_0 and/ …

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SEMI E84-0305 © SEMI 1999, 2005 5
5.1.22 single arm/single hand AMHS equipment — AMHS equipment which hands off a carrier using a single arm
mechanism with a single hand (single end effector).
5.1.23 single handoff — the transfer of a single carrier in a handoff operation.
5.1.24 zone — term used for describing the intervals during PIO communication.
6 Enhanced Carrier Handoff Parallel I/O Interface Requirements
6.1 Signal Definitions
6.1.1 Table 1 shows the signals required for the enhanced carrier handoff parallel I/O interface. The table defines
signal name, the direction of the information (P/A: P represents passive equipment and A represents active
equipment), and the description. In the description, the meaning of the signal and the indication of the signal level,
and comments. Signals defined in Table 1 are:
VALID Indicates that the signal transition is active and selected.
CS_0 Carrier Stage 0
CS_1 Carrier Stage 1
TR_REQ Transfer Request
L_REQ Load Request
U_REQ Unload Request
READY READY for Transfer
BUSY BUSY for Transfer
COMPT Complete Transfer
CONT Continuous Handoff
HO_AVBL Handoff Available
ES Emergency Stop
VA Vehicle arrived
AM_AVBL Transfer Arm Available
VS_0 Carrier Stage 0 from Passive OHS Vehicle
VS_1 Carrier Stage 1 from Passive OHS Vehicle
The VA, AM_AVBL, VS_0,1 signals are intended only for use with interbay AMHS equipment (passive OHS
vehicles).
The VALID, CS_0, CS_1 signals are not intended for use with interbay AMHS equipment (passive OHS vehicles).
6.1.2 Load Port Assignment Signals
6.1.2.1 The signals CS_0 and CS_1 are used to select load ports to be used for the handoff. For the parallel I/O
interface which is dedicated to a single load port, the signals must be set:
CS_0 ON
CS_1 OFF
See Figures 4 and 5.
6.1.2.2 The capability to control two load ports by a common parallel I/O interface is required; therefore, it is
assumed in this specification that a common parallel I/O interface can be used to control handoffs of two load ports.
SEMI E84-0305 © SEMI 1999, 2005 6
6.1.2.3 The assignment of the load port is relevant when two load ports use a common parallel I/O interface. The
active equipment shall select the load port by means of the CS_0 and/or CS_1 signals (see Figure 6).
CS_0 selects the left hand load port as viewed when facing towards the equipment’s load ports.
CS_1 selects the right hand load port as viewed when facing towards the equipment’s load ports.
6.1.2.4 For the simultaneous handoff, both of CS_0 and CS_1 must be set to ON at the handoff. Figure 8 shows a
piece of passive equipment with four load ports (LP1, LP2, LP3, LP4) and two parallel I/O interfaces (PI/O#1,
PI/O#2), where PI/O#1 is common to load ports LP1 and LP2 and PI/O#2 is common to load ports LP3 and LP4.
Tables 2 and 3 show the range of signal combinations.
6.1.3 Load Port Assignment Signals for OHS (Passive type)
6.1.3.1 The signals VS_0 and VS_1 are used to select load ports to be used for the handoff. For the parallel I/O
interface which is dedicated to a single load port, the signals must be set;
VS_0 ON
VS_1 OFF
6.1.3.2 Two load ports can be controlled by using VS_0 and VS_1.
VS_0 ON: Selects left hand Load port.
OFF: Does not select Left hand Load port.
VS_1 ON: Selects Right hand Load port.
OFF: Does not select Right hand Load port.
VS_0 and VS_1 are controlled individually.
Table 1 Signals for the Enhanced Carrier Handoff Parallel I/O Interface
Signal Name P/A Description
VALID A -> P Indicates that the interface communication is valid.
ON: the communication is valid
OFF: the communication is not valid
Before this signal is turned ON, the load port must be specified by the signal CS_0 and/or CS_1.
CS_0 A -> P Specifies the load port used for carrier handoff (¶6.1.2, Load Port Assignment Signals).
One PI/O device per load port
ON: Use the load port for carrier handoff
OFF: N/A
One PI/O device per 2 load ports
ON: Use the left load port for handoff
OFF: Do not use the left load port of handoff
CS_1 A -> P Specifies the load port used for carrier handoff (¶6.1.2, Load Port Assignment Signals).
One PI/O device per load port
Not used (OFF)
One PI/O device per 2 load ports
ON: Use the right load port for handoff
OFF: Do not use the right load port of handoff
TR_REQ A -> P Requests the handoff to the passive equipment.
ON: the active equipment has requested the handoff
OFF: the active equipment has not requested the handoff
This signal is turned OFF when the BUSY signal transitions to OFF.
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Signal Name P/A Description
L_REQ P -> A Indicates the load port is assigned to load a carrier. L_REQ always indicates a carrier transfer from
Active to Passive equipment.
ON: The load port is assigned to load a carrier
OFF: The load port is not assigned to load a carrier
This signal is turned ON when the load port is specified by CS_0 and/or CS_1 and the VALID signal
is turned ON. This signal is turned OFF when the load port detects the carrier in the correct position.
In simultaneous handoff, the carrier on both load ports shall not be present when this signal is turned
ON, and the carriers shall be present in correct position on both load ports when this signal is turned
OFF.
U_REQ P -> A Indicates the load port is assigned to unload a carrier. U_REQ always indicates a carrier transfer from
Passive to Active equipment.
ON: The load port is assigned to unload a carrier
OFF: The load port is not assigned to unload a carrier
This signal is turned ON when the load port is specified by CS_0 and/or CS_1, and the VALID signal
is turned ON. This signal is turned OFF when the carrier on the load port is removed.
In simultaneous handoff, the carrier on both load ports shall be present in correct position when this
signal is turned ON, and the carriers shall not be present on both load ports when this signal is turned
OFF.
READY P -> A Indicates the passive equipment has accepted the transfer request from the active equipment.
ON: the passive equipment is ready for the handoff
OFF: the passive equipment is not ready for the handoff
This signal is turned ON when the passive equipment accepts the transfer request, and it is turned OFF
when the COMPT signal is turned ON.
BUSY A -> P Indicates the handoff is in progress by the active equipment.
ON: the handoff is in progress
OFF: no handoff is in progress
This signal is turned ON when the active equipment starts handoff operation. READY must be ON
when BUSY is turned ON. It must be turned OFF after the active equipment has completed the handoff
and the active equipment resource position is outside the handoff conflict area. The passive equipment
must not perform any mechanical action in the handoff conflict area while this signal is ON. The active
equipment turns the BUSY OFF after confirming the L_REQ or U_REQ OFF.
COMPT A -> P Indicates the active equipment has completed the handoff operation.
ON: the handoff is completed
OFF: the handoff is not completed
This signal is turned ON when the active equipment has completed the handoff (BUSY OFF), and it is
turned OFF after the passive equipment has completed the handoff operation (READY OFF).
CONT A -> P Specifies the handoff is continuous handoff.
ON: continuous handoff
OFF: not continuous handoff
This signal is turned ON by BUSY ON for the first carrier handoff, and it is turned OFF by BUSY ON
for the last carrier handoff operation.
If the passive equipment has a mechanism that interferes with the handoff (such as a shutter door), that
mechanism must be held in the non-interfering state (the door must remain open) during the
continuous handoff.