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SEMI E105-0701 © SEMI 2000, 2001 2 Scheduling Manager Scheduling Component Factory Operations requests activity decisions releases product (lot starts) Factory Planning (Enterprise) Product Management requests activity f…

SEMI E105-0701 © SEMI 2000, 20011

SEMI E105-0701

PROVISIONAL SPECIFICATION FOR CIM FRAMEWORK SCHEDULING

COMPONENT

This specification was technically approved by the Global Information & Control Committee and is the direct

responsibility of the North American Information & Control Committee. Current edition approved by the

Japanese Regional Standards Committee on February 1, 2001. Initially available at www.semi.org April

2001; to be published July 2001. Originally published October 2000.

1 Purpose

1.1 The Scheduling Component supports Factory

Operations, Material Transport and Storage, Production

Machine, and Equipment Tracking and Maintenance

components by ordering, in time, jobs that process

material on equipment, move material, and maintain

equipment. The scheduler uses knowledge of product

demand, equipment and material state, process flows,

throughput bottlenecks, operational policy and

constraints, and other information to recommend jobs

that maximize effective utilization of factory resources

to satisfy product demand and planned objectives.

1.2 Increased control over operations requires an

active Scheduling Component that can respond to

factory events and changes in state and dynamically

adjust the schedules for material processing, material

transport and equipment maintenance. The Scheduling

Component can react to inventory levels of material in

the factory to adjust priorities to minimize queue sizes

and ensure that use of bottleneck equipment is opti-

mized to keep WIP inventory levels at desired levels.

1.3 The Scheduling Component can minimize turn

around time (TAT) by coordinating material transport

(for substrates and durables) with processing to reduce

equipment idle time. The Scheduling Component can

sequence activities to minimize setup time. It can also

respond to scheduled and unscheduled equipment

down-time to minimize impact on turn around time. In

addition to minimizing overall TAT, it can react to the

priorities for urgent lots to move them through the

process flow in the minimum possible time while

adjusting the schedules of lower-priority lots that are

impacted.

2 Scope

2.1 The primary run-time responsibilities of the

Scheduling Component are to monitor resource and

material state and apply scheduling and dispatching

decision mechanisms to identify the next activity

(dispatching) or sequence of activities (scheduling) for

factory resources. The Scheduling Component includes

an interface that supports both scheduling and

dispatching. Figure 1 illustrates the interactions

between the Scheduling Component and other

components of the CIM Framework. This illustration

does not reflect all of the many inputs to the Scheduling

Component that are required to provide it with the

current status of the factory resources.

2.2 As described in this standard, the Scheduling

Component produces activity option and activity

forecast lists. These lists are produced by combining

the factory model and status information from other

components with scheduling policies in the Scheduling

Component. For example, the Scheduling Component

combines data from the Specification Component on

how products are made with status data from the

Equipment and Product Management Components to

give activity options for a machine.

2.3 The Factory Operations Component uses the

Scheduling Component services to orchestrate the man-

agement of machines and production of lots. For exam-

ple, when a tool becomes available, Factory Operations

uses the Activity Options list to select the next lot to

process on the tool. Factory Operations then works

with other components to execute the production job for

the lot on the machine. Executing the production job

changes the state of lot and tool in other components.

These status changes are then used by the Scheduling

Component when it produces new activity lists.

2.4 The Scheduling Manager supp orts Factory

Operations by providing an answer to questions like,

“What is next for this material or resource?” The

answer may be based on evaluation of current or future

constraints and objectives. Although the dispatcher's

output takes the form of a decision for the next activity

for the target resource, the interface may also support

manual scenarios by providing a list of prioritized

activities from which the decision is selected.

2.5 The Scheduling Manager interface also provides

forecasts of future activities projected to occur after the

next activity. By simulating anticipated future activity

sequencing and execution timing the scheduler can

generate forecasts that predict future responses from the

dispatcher for subsequent requests. These forecasts are

subject to change as factory conditions change, but they

offer the best current projection of future activity

decisions.

SEMI E105-0701 © SEMI 2000, 2001 2

Scheduling

Manager

Scheduling Component

Factory

Operations

requests activity

decisions

releases product

(lot starts)

Factory

Planning

(Enterprise)

Product

Management

requests activity

forecasts

Equipment

Tracking and

Maintenance

Specification

Factory

Labor

provides product

status

provides

equipment status

provides activity

specifications

provides

operator status

Material

Transport &

Storage

provides material

location

Figure 1

Scheduling Component Interactions

2.6 This specification does not describe the definition

of the policies used by the Scheduling Component to

produce activity lists. This is left to component

implementors.

2.7 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Limitations

3.1 Provisional Status — This specification is

designated as provisional due to known areas that need

to be completed. The following items summarize the

deficiencies of the provisional specification to be

addressed before a subsequent ballot to upgrade it to

full standard status.

3.1.1 Dependence on Factory Operations Component

— The Scheduling Component provides specifications

of activities that are executed by the Factory Operations

Component in the form of production jobs, transport

jobs and maintenance jobs. The specification of Factory

Operations may require changes to the activity

specification properties of the Scheduling Component.

When the Specification for CIM Framework Factory

Operations Component is complete, this dependency

can be resolved.

3.1.2 Specification of Event Subscriptions — The

Scheduling Component maintains a current status of the

factory resources and material by receiving event

notifications of occurrences that indicate changes in

other components. Events are specified with the

component responsible for publishing the event

notifications. Until all of the required event formats are

defined as part of the publishing component

specification, the inputs to the Scheduling Component

will be defined only in general terms. When event

specifications are complete, these event subscriptions

can be specified.

3.1.3 Initialization — The Scheduling Component

does not currently provide interfaces that allow the

representation of factory conditions to be initialized for

the start-up of dispatching and scheduling. The addition

of initialization interfaces will be added or deemed out

of scope prior to upgrade to full standard status.

4 Referenced Standards

4.1 SEMI Standards

SEMI E81 — Provisional Specification for CIM

Framework Domain Architecture

SEMI E97 — Provisional Specification for CIM

Framework Global Declarations and Abstract Interfaces

SEMI E102 — Provisional Specification for CIM

Framework Material Transport and Storage Component

4.2 Other Documents

UML Notation Guide, Version 1.1, document number

ad/97-08-05, Object Management Group.

ISO/IEC International Standard 14750 (also ITU-T

Recommendation X.920): Information Technology –

Open Distributed Processing – Interface Definition

Language

5 Terminology

5.1 Definitions

5.1.1 activity — work performed as part of the

manufacturing operations of a factory. Activities may

be specified formally by a predefined type of job

specification (for example, Production Job, Transport

Job or PM Job), or they may be represented by

identifying the minimal set of resources and material

needed to allow subsequent completion of the job

specification. An activity is the result of dispatching or

scheduling.

5.1.2 dispatching — generation of a decision or option

for the next activity involving a particular factory

resource or material. The dispatch result is determined

by evaluating the current state of the factory, the

priorities and requirements for the activities, and the

relationship of the activities to one another. Dispatching

returns only the immediately applicable part of a

schedule.

5.1.3 factory planning — recommendation of lot starts

for a particular production facility over an extended

period of time. The factory plan is determined by

predicting future changes in factory state and available

capacity as lots progress through production. This

prediction is used to determine the optimum sequence

of lot starts to best achieve the production goals of the

facility. Factory planning is typically the responsibility

of enterprise systems.

5.1.4 scheduling — generation of a forecast of future

time sequenced activities involving factory resources or

material. The schedule is based on the current state of

the factory, the priorities and requirements for the

activities, the relationship of the activities to one

1 UML Notation Guide v1.1 is available to the general public at

http://www.omg.org/cgi-bin/doclist.pl, +1-508-820 4300, Object

Management Group, Inc. , Framingham Corporate Center, 492 Old

Connecticut Path, Framingham, MA 01701.

2 ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-

1211 Genève 20, Switzerland

another and knowledge of factory level goals and

capacity. Scheduling covers activities projected to

occur over a longer future time interval than

dispatching.

6 Requirements

6.1 Scheduling Component — The Scheduling

Component provides a single interface called the

SchedulingManager with operations for both

dispatching and scheduling.

6.1.1 Any resource or material within the factory may

have a next activity defined for it. The

SchedulingManager interface is responsible for

identifying activities that answer questions such as:

• What’s next for this Machine?

• Where next for this Lot?

• What’s next for this Operator?

6.1.2 The SchedulingManager interface is also

responsible for generating a time-sequenced forecast of

future activities for a resource or for material within the

factory. This forecast is based on projections from the

current factory state and may be updated as actual

activities are dispatched and executed.

6.1.3 The Scheduling Component Information Model

is shown in Figure 2.

ComponentManager

(from Factory Component)

SchedulingManager

Figure 2

Dispatching Component Information Model