semi合集-English.pdf - 第2455页
SEMI E87-0705 © SEMI 1999, 2005 24 13 Load Port/Carrier Associ ation State Model 13.1 The purpose of the Carrier As sociation St ate Model is to define the host view of carrier to load port association of the production …

SEMI E87-0705 © SEMI 1999, 2005 23
12.4 Load Port Reservation State Definitions
12.4.1 LOAD PORT RESERVATION — The super state of the substates NOT RESERVED and RESERVED.
12.4.2 NOT RESERVED — A substate of LOAD PORT RESERVATION, this state is active when there is no
reservation existing at the load port.
12.4.3 RESERVED — A substate of LOADPORT RESERVATION, this state is active when there is a reservation
for future activity at the load port. When in this state, the access mode for a load port may not be changed.
12.5 Load Port Reservation State Transition Table
Table 10 Load Port Reservation State Transition Table
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
RESERVED
No event report is required
for this transition.
2 NOT
RESERVED
Service: If reserved by service,
the host or operator sends a
ReserveAtPort or a Bind service
to the production equipment.
CarrierOut: This happens when
the equipment physically initiates
a CarrierOut operation.
RESERVED If the user has configured
the equipment to use the
reservation visible signal
indicator, it is activated for
this load port.
Data required to be
available for this event
report:
PortID
LoadPortReservationState
CarrierID may be included
when a carrier out or a
bind service triggers this
transition.
3 RESERVED Service: If a reservation is
cancelled by service, the host or
operator sends a CancelBind or a
CancelReservationAtPort.
Carrier arrival: A carrier arrives
at the reserved port.
NOT
RESERVED
If the user has configured
the equipment to use the
reservation visible signal,
the indicator is deactivated
for this load port.
Data required to be
available for this event
report:
PortID
LoadPortReservationState
12.6 Relation of Reservation to Association
12.6.1 The following figure indicates the relationship of Association to Reservation.
Reservation / Association
ASSOCIATED
ID Read
Unload or
carrier in
Complete
Load
Complete
ASSOCIATED
RESERVED
Bind
Carrier Presence
Load
w/o Bind
w/o Reserve
Load
w/ Bind
If fails, then PWC/CC
is received
RESERVED
Reserve
Load
w/ Reserve
ASSOCIATED
Visible Signal
Carrier Out
Complete
Unload
Complete
Carrier Out
St art
RESERVED
ASSOCIATED
Carrier Out
Figure 6
Relation of Reservation to Association

SEMI E87-0705 © SEMI 1999, 2005 24
13 Load Port/Carrier Association State Model
13.1 The purpose of the Carrier Association State Model is to define the host view of carrier to load port association
of the production equipment, as well as the host interactions with the production equipment necessary to associate a
carrier to load port, and to perform equipment based carrier verification. Each load port shall maintain an
independent instance of the Carrier Association State Model. Each instance of this state model must not influence
the state of the same state model for a different load port.
13.1.1 This state model provides the ability to perform carrierID verification with two different methods. If the
CarrierID is provided before the equipment reads the CarrierID, the CarrierID that becomes associated with the load
port can be used later for equipment based carrier verification. If the association happens by CarrierID read (not by a
service execution), then the production equipment shall report the CarrierID information in a data collection event.
13.2 Load Port/Carrier Association State Model Diagram
NOT
ASSOCIATED
ASSOCIATED
2 3
1
LOAD PORT/CARRIER
ASSOCIATION
4
Figure 6
Load Port/Carrier Association State Model Diagram
13.2.1 Load Port/Carrier Association State Definitions
13.2.1.1 LOAD PORT/CARRIER ASSOCIATION — The parent state of the NOT ASSOCIATED and
ASSOCIATED sub-states.
13.2.1.2 NOT ASSOCIATED — A sub-state of LOAD PORT/CARRIER ASSOCIATION. There is no carrier
association present for this load port.
13.2.1.3 ASSOCIATED — A sub-state of LOAD PORT/CARRIER ASSOCIATION. A CarrierID has been
associated with this load port. The load port is not available for a new carrier association.
13.2.2 Load Port/Carrier Association State Transition Table
13.2.2.1 Table 11 defines the transitions of the Load Port/Carrier Association State Model.

SEMI E87-0705 © SEMI 1999, 2005 25
Table 11 Load Port/Carrier Association State Transition Definitions
# Previous State Trigger New State Actions Comments
1 (no state) System reset. NOT
ASSOCIATED
No event report is required
for this transition
2 NOT
ASSOCIATED
Service Normal: If associated
by service in the noraml
situation, the host sends a
Bind service to the
production equipment when
the port is unoccupied.
Service Abnormal: If
associated with a service in
an abnormal situation, the
host sends a
ProceedWithCarrierService
to the production equipment
when the load port is
ocuupied.
CarrierID Read: If
associated by a CarrierID
read, the production
equipment creates the
association at the time the
CarrierID read is performed.
Known Carrier: A carrier
already known to the
production equipment is
being loaded onto the load
port. This happens when the
CarrierOut service is
initiated.
ASSOCIATED Once the CarrierID to load
port association is complete,
the load port is not available
for association until the state
returns to NOT
ASSOCIATED again.
Data required to be
available for this event
report:
PortID
CarrierID
PortAssociationState
3 ASSOCIATED Service: If cancellation of a
load port association is
required; then, this can be
accomplished by sending a
CancelBind service to the
production equipment before
the carrier arrives to the
loadport or before a transfer
sequence has started.
Carrier Unload: An
association cancellation may
also be performed by
removing the carrier from the
load port or by the production
equipment moving a carrier
to an internal buffer position.
NOT
ASSOCIATED
A carrier unload, may
happen before or after
processing occurs. The load
port is available for another
association once the carrier
is removed.
Data required to be
available for this event
report:
PortID
PortAssociationState