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SEMI M23-0703 © SEMI 1993, 2003 11 Figure 6 SEMI Wafer Edge Profile Template Table 3 Edge Profile — Dimension and Tolerance Requirements Property Dimensions Units Edge Profile Coordinate: x-coordinate y-coordinate Point …

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SEMI M23-0703 © SEMI 1993, 2003 10
Figure 5
Diagram Shows an InP Wafer with the Same Orientation as Figure 3, but with a Few Degrees of Orthogonal
Misorientation from the Intended Off-Orientation. The
α angle is also shown.
SEMI M23-0703 © SEMI 1993, 2003 11
Figure 6
SEMI Wafer Edge Profile Template
Table 3 Edge Profile — Dimension and Tolerance Requirements
Property Dimensions Units
Edge Profile Coordinate: x-coordinate y-coordinate
Point A 75 0
µm
Point B 510 0
µm
Point C 50 (See NOTE 1.)
µm
Point D 0 75
µm
NOTE 1: The y-coordinate of point C is 1/3 the nominal wafer thickness.
Figure 7
Example of Acceptable and Unacceptable Wafer Edge Profiles
SEMI M23-0703 © SEMI 1993, 2003 12
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