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SEMI F56-0600 © SEMI 2000 6 MFC Under Test DC Power Supply Monitor/Recorder DC Power Supply Flow Output Monitor/Recorder + COM - Current Meter Figure 2 Test Setup for DC Su pply Voltag e effects P1 MFC FLOW STANDARD Pres…
SEMI F56-0600 © SEMI 20005
18 Illustrations
Satisfy
Manufacturers
Warm up
Requirements
Ensure all
Reference
requirements are
met
Purge MFC with
N2
Zero MFC and
record Data
Vary Positive DC
powersupply
holding negative
supply at
reference value
Record Data at
each power level
Zero MFC after
power supply limit
is reached and
record Data
Vary Negative DC
power supply
holdong positive
supply at
reference value
Record Data at
each power level
Zero MFC and
record Data
Vary both power
supplies together
and record Data
at each level of
increasing range.
Zero MFC and
record Data
Vary both power
supplies together
and record Data
at each level of
decreasing range.
Zero MFC and
record Data
Repeat 13.5 -
13.13 with MFC at
100% Flow
13.4
13.5
13.6
13.2
13.3
13.6
13.7
13.8
13.6
13.9
13.10
13.11
13.12
13.13
13.14
13.15
Figure 1
Flow Chart
SEMI F56-0600 © SEMI 2000 6
MFC
Under Test
DC Power Supply
Monitor/Recorder
DC
Power Supply
Flow Output
Monitor/Recorder
+ COM -
Current Meter
Figure 2
Test Setup for DC Supply Voltage effects
P1
MFC
FLOW
STANDARD
Pressure
Regulator
Inlet
Valve
Outlet
Valve
Nitrogen
Source
Figure 3
Flow Setup
SEMI F56-0600 © SEMI 20007
Span (Actual Flow)
Span of MFC
ZERO
Ideal Response
0
Positive Voltage Variation
-3
-2
-1
0
1
2
3
Flow Changes (%FS)
A
similar plot would be obtained:
Zero and span effects as a result of varying the negative power
l
zero and span effects as a results of varying both power supplies
tth
Figure 4
Data Plots