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SEMI 30.1-0200 © SEMI 1998, 2000 26 12.4.3 M odifying Process Pr ogram V a riable Parame ters — The rem ote commands of PP-SELECT, PP-ASSIGN, or P P-UPDATE are used to m odify any of t he identified proces s program vari…

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of the method described in this section will reduce the
number of process programs.
12.4 Process Program Variable Parameters — A
process program parameter specifies a value that
temporarily modifies the value of a process program
variable parameter. A process program variable
parameter is formally defined within a process program
body and contains (1) a variable parameter name that is
unique in the body (CPNAME), and (2) a parameter
default value for use when the process program is
selected for execution without specification of an
override value for this variable parameter
(CPVAL/CPEVAL).
12.4.1 Overriding Process Program Variable
Parameters Default Values
12.4.1.1 Any process-related information that is
normally requested from the operator console in manual
operation shall have a process program variable
parameter identified in the process program and default
values assigned in the body of the process program. An
equipment would run the process program using the
default values unless those values were overridden.
12.4.1.2 These process program variable parameters
allow a host to tailor a process program for a specific
run of material by temporarily modifying (replacing)
the process program default values using a remote
command of PP-UPDATE. The modification does not
permanently change the process program; the
modifications remain in effect only until the next run or
until the next PP-UPDATE remote command is
received.
12.4.2 Requirements and Rules
12.4.2.1 ISEM equipment is required to support
variable process program parameters. Additionally,
ISEM process programs are required to contain variable
process program parameters that specify a name for
each of the four previously defined ISEM table types.
Specifically, parameters for “TABLE-AREA-DEF”,
“TABLE-ALIGN-DEF”, “TABLE-ANOMALY-DEF”,
and “TABLE-M21-ANOMALY-DEF” table names are
required. Only the names that refer to these TABLE-
DEFs are required to be included in the process
program body. The actual TABLE-DEF data is external
to the process program body. The host may always
assume that there are variable process program
parameters for these four ISEM tables.
12.4.2.2 Before execution of a CARRIERBLD can
begin, the presence of all the ISEM Tables that it
references shall be verified by the equipment. If they
are not all present, an error shall be reported. The
equipment shall support data items that may be linked
to the event report that specifies the name of missing
ISEM Tables. S7,F27 is used for reporting this error
condition.
12.4.2.3 The following table summarizes the variable
process program parameters that ISEM equipment shall
support and the remote command parameters that the
host may use to override their values (as defined in
Section 13 and Table 9).
Table 7 Required Variable Process Program Parameters
Variable Process Program Parameter and Host
Command Parameter Name (CPNAME)
Description
“ALIGNLIST” A list of location identifiers to be reviewed.
“ANOMALYLIST” A list of location identifiers to be reviewed.
“AREALIST” A list of area identifiers to be inspected or reviewed.
“ELEMENTLIST” A list of array element identifiers to be inspected.
“SLOTLIST” A list of carrier slot numbers with material to be inspected or to be reviewed.
“SUBSTRATELIST” A list of substrate IDs with material to be inspected or to be reviewed.
“TABLE-ALIGN-DEF” A set of alignment site definitions.
“TABLE-ANOMALY-DEF” A set of (SEMI M20) anomaly location and attribute definitions.
“TABLE-AREA-DEF” A set of area definitions.
“TABLE-M21-ANOMALY-DEF” A set of SEMI M21 anomaly location and attribute definitions.
SEMI 30.1-0200 © SEMI 1998, 2000 26
12.4.3 Modifying Process Program Variable
Parameters — The remote commands of PP-SELECT,
PP-ASSIGN, or PP-UPDATE are used to modify any
of the identified process program variable parameters
within the process program. The modification is done
by including CPNAME/CPVAL pairs within the
“PROCESS-BLD-GROUP”, which is part of the
remote commands of PP-SELECT or PP-ASSIGN, or
by including a different list name in the PP-UPDATE
remote command. A CPNAME in a process program
shall be identical to the process program variable
parameter name as specified in the “PROCESS-BLD-
GROUP”. See next section for details of these
parameters.
12.5 Use of Process Programs, Remote Commands,
and “PROCESS-BLD-GROUP” — This is a brief
description of the steps involved in using the process
program structure, the process program variable
parameters, the TABLE-DEFs, and the modification of
process program variable parameters through the use of
“PROCESS-BLD-GROUP” and CPNAME/CEPVAL
pairs in the enhanced remote command (S2,F49).
• A process program is created with certain items in
the body identified as process program variable
parameters, along with their default values.
• The host sends to equipment one or more TABLE-
DEFs: such as “TABLE-AREA-DEF” and
“TABLE-ALIGN-DEF”, along with the names of
those tables using Stream 13 commands (See SEMI
E5). These tables are now resident on the
equipment.
• The host sends an enhanced remote command
(S2,F49) to the equipment (either PP-SELECT or
PP-ASSIGN) that contains the information needed
for processing (“CARRIERBLD”). The
“CARRIERBLD” contains a “PROCESS-BLD-
GROUP” for each different set of run parameters
that are needed during the inspection or review
process.
• “PROCESS-BLD-GROUP” shall contain the
ProcessBuildGroupID to identify which program is
selected.
• If the default list of slots in the process program
needs to be changed for this run, then “PROCESS-
BLD-GROUP” contains a “MATERIALLIST” and
the list of selected slots or substrates, designated by
SlotIDs or SubstrateIDs.
• If the default set of inspection areas in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-AREA-DEF” (in AreaTable
Name). If not all of the inspection areas given in
that “TABLE-AREA-DEF” are needed for this run,
then “AREALIST” is used and includes a list of the
names of the specific inspection areas which are
needed. Those names refer to inspection areas
defined in the “TABLE-AREA-DEF”.
• If the default set of alignment sites in the process
program needs to be changed for this run, then
“PROCESS-BLD-GROUP” contains the name of a
specific “TABLE-ALIGN-DEF” (in AlignTable
Name). If not all of the alignment sites given in
that “TABLE-ALIGN-DEF” are needed for this
run, then “ALIGNLIST” is used and includes a list
of the names of the specific alignment sites which
are needed. Those names refer to alignment sites
defined in the “TABLE-ALIGN-DEF”.
• If the SEMI M21 coordinate system is being used
and a pattern has been defined with pattern element
names and if only certain of those elements need to
be inspected for this run, then “PROCESS-BLD-
GROUP” contains an “ELEMENTLIST” and the
list of selected elements, designated by
ElementIDs.
• If certain equipment-specific process program
variable parameters need to have different values
for this run, then for each needed parameter,
“PROCESS-BLD-GROUP” contains a CPNAME
(unique name of a specific process program
variable parameter) and the new CEPVAL (new
value for that parameter).
• The equipment executes the process program with
the new values.
• If indicated in the process program, the equipment
generates the list of anomalies found and sends it to
the host in the format of a “TABLE-ANOMALY-
DEF” using the ISEM table definition and Stream
13 transfer messages (see SEMI E5 for format
specification).
• The host would send the “TABLE-ANOMALY-
DEF” to a review equipment. The host might need
to modify part of the table if required by the review
equipment. This anomaly table is now resident on
the review equipment. (NOTE: The host might
choose to not send all of the table of anomalies, but
rather a desired selection of them.)
• The host sends the equipment the enhanced remote
command (PP-SELECT or PP-ASSIGN) that
contains a “CARRIERBLD”. The
“CARRIERBLD” has a “PROCESS-BLD-
GROUP” for each different set of run parameters
that is needed by the review equipment. It is
required for the host to use the Enhanced Remote
Command S2,F49 for transferring the information
SEMI 30.1-0200 © SEMI 1998, 200027
to the equipment. “PROCESS-BLD-GROUP”
includes the name of a specific “TABLE-
ANOMALY-DEF” in the parameter
AnomalyTableName. If not all of the anomalies
given in that “TABLE-ANOMALY-DEF” are
needed for this run, then either “ANOMALYLIST”
or “M21-ANOMALYLIST” is used and includes a
list of the names of the specific anomalies which
are desired. Those names refer to anomalies
defined in the named “TABLE-ANOMALY-DEF”.
• The equipment runs the process program using the
selected values and reviewing the specific
anomalies indicated.
• The equipment adds review information to the
ANOMALYATTRIBUTE list. Then the review
equipment sends this modified “TABLE-
ANOMALY-DEF” to the host.
13 Remote Commands
The purpose of this section is to identify remote
commands, command parameters, and valid commands
versus states pertinent to the SEM.
13.1 Requirements
• The equipment shall support the SEMI E30
required remote commands.
• All the remote commands defined by ISEM are
required unless they have been qualified by the
statement “if the equipment supports this
functionality, it shall use this command.” In this
case, they are only required if the equipment
supports the functionality necessary to support the
command. A good example of this is the MAP-
CARRIER command. If the equipment does not
have the hardware necessary to scan a carrier for
the presence of substrates in slots, then the
command is not required by the ISEM.
• The alphanumeric strings defined by ISEM for
RCMD and CPNAME are required.
Host Command Parameter (CPNAME/CPVAL) — A
parameter name/value associated with a particular host
command when using stream function (S2,F41) and a
(CPNAME/CEPVAL) parameter name/value when
using the enhanced remote command (S2,F49). This
document specifies unique names (CPNAMEs) and
values (CPVALs and CEPVALs) for many command
parameters. Note that if there are no associated
parameters, a zero length list is sent.
The purpose of the remote commands is to allow host
control over the following capabilities:
• Start processing
• Stop processing
• Temporarily suspend processing
• Resume processing
• Abort processing
• Select process programs, material, and/or sites to
measure
• Report location of material found
The following remote commands (RCMDs) shall be
supported as described below:
NOTE 3: The terms “current cycle” and “safe point” used
below are to be defined by the supplier.
13.2 Remote Commands Description
1. ABORT — Terminate the current cycle prior to its
completion. ABORT has the intent of immediately
stopping the process and is used because of
abnormal conditions. ABORT makes no guarantee
about the subsequent condition of material except
as noted in the “ABORTLEVEL” description.
2. CLEANUP — De-selection of the current ISEM
job (“CARRIERBLD”) and process program
(“PROCESS-BLD-GROUP”), including the
removal of all material to output locations and any
equipment-specific activities needed to transition
into the IDLE state. Completion of this command
should generate a collection event report. If the
equipment supports this functionality, it will use
this command.
3. MAP-CARRIER — Requests the equipment to
provide a list of carrier slots that contain material.
MAP-CARRIER has the intent of providing the
host with enough information about the location
and/or ID of material so it may select material for
processing accordingly. Completion of this
command shall generate a collection event report.
If the equipment supports this functionality, it must
use this command.
4. NEXT-MATERIAL — Processing of the current
substrate is halted at the first safe point and
unloaded to the target carrier location. NEXT-
MATERIAL has the intent of allowing the host to
skip measurement of the current substrate. This is a
trigger for processing state transition from
WORKING to UNLOAD. If the equipment
supports this functionality, it will use this
command.
5. PAUSE — Suspend processing temporarily at the
next safe point. PAUSE has the intent of resuming
the process at the same point where it was paused.