semi合集-English.pdf - 第2539页

SEMI E88-1104 E © SEMI 1999, 2004 36 STEP COMMENTS HOST SC COMMENTS  S6,F11 Event Report Send (ERS) ZoneCapacityChange Event Report Acknowledge (ERA) S6,F12  7.  S6,F11 Event Report Send (ERS) CraneActive 8. Event Rep…

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SEMI E88-1104
E
© SEMI 1999, 2004 35
STEP COMMENTS HOST SC COMMENTS
22.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID
· CarrierLoc = “LP”
· CarrierZoneName
· PortType = “LP”
23. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
24. Carrier leaves the domain of
the stocker as it is acquired
manually by a PGV.
25.
S6,F11
Event Report Send (ERS)
CarrierRemoved
· CarrierID
· HandoffType = MANUAL
26. Event Report Acknowledge (ERA)
S6,F12
27.
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
28. Event Report Acknowledge (ERA)
S6,F12
13.1.5 Carrier Transfer to an Automated Stocker Output with Multiple Loading Ports
13.1.5.1 Three carriers are requested to the stocker output. The output shuttle consists of multiple carrier positions
including the stocker crane set down port (OP – location 03) and two AGV accessible port locations (LPs –
locations 05 and 06). The port shuttle also has a BP (location 04) that is the location reached by a carrier before
reaching the LP positions. The Host sends the three Transfer commands to the stocker and they are queued. The
first two Transfer commands send carriers to LP locations 05 and 06 respectively. These carriers are to be loaded by
the same AGV. The third carrier is also requested to LP 05. Each carrier is transferred to the OP where it then
automatically travels forward on the shuttle toward the BP and LPs (see figure in Section 6.16). The first two
carriers arrive at the LPs. The vehicle removes the two carriers from the LPs. The third carrier then shuttles
forward to the LP location 05.
STEP COMMENTS HOST SC COMMENTS
1. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID = “060658”
· PRIORITY = “20”
· TRANSFERINFO
1. CARRIERID = “11111”
2. SOURCE
3. DEST = “06”
S2,F49
In this scenario SOURCE is the
name of a CarrierLoc or
ZoneName and DEST is the name
of a “loading port.” Either
CARRIERID or SOURCE may be
empty.
2.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
3.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID = “060658”
· CarrierID = “11111”
· CarrierLoc
· CarrierZoneName
· Dest = “06”
4. Event Report Acknowledge (ERA)
S6,F12
5.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID = “11111”
· CarrierLoc
· CarrierZoneName
6. Event Report Acknowledge (ERA)
S6,F12
SEMI E88-1104
E
© SEMI 1999, 2004 36
STEP COMMENTS HOST SC COMMENTS
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
7.
S6,F11
Event Report Send (ERS)
CraneActive
8. Event Report Acknowledge (ERA)
S6,F12
9. The Host issues the other two
commands for carriers “22222”
and “33333.”
These commands are queued by
the stocker because it is
active performing the command
for carrier “11111.”
10. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID = “101883”
· PRIORITY = “21”
· TRANSFERINFO
1. CARRIERID = “22222”
2. SOURCE
3. DEST = “05”
S2,F49
In this scenario SOURCE is the
name of a CarrierLoc or
ZoneName and DEST is the name
of an “loading port.” Either
CARRIERID or SOURCE may be
empty.
11.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
12. Enhanced Remote Command (ERC)
TRANSFER
· COMMANDID = “012155”
· PRIORITY = “30”
· TRANSFERINFO
1. CARRIERID = “33333”
2. SOURCE
3. DEST = “05”
S2,F49
In this scenario SOURCE is the
name of a CarrierLoc or
ZoneName and DEST is the name
of an output port. Either
CARRIERID or SOURCE may be
empty.
13.
S2,F50
Enhanced Remote Command
Acknowledge (ERCA)
16. The first carrier is set down
by the stocker on the output
port.
17.
S6,F11
Event Report Send (ERS)
CraneIdle
18. Event Report Acknowledge (ERA)
S6,F12
19.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID = “11111”
· CarrierLoc = “03”
· CarrierZoneName
· PortType = “OP”
20. Event Report Acknowledge (ERA)
S6,F12
21. Now that carrier “11111” has
left the “stocker set down”
position of the output port,
the stocker initiates the next
highest priority queued
command.
22.
S6,F11
Event Report Send (ERS)
TransferInitiated
· CommandID = “012155”
· CarrierID = “33333”
· CarrierLoc
· CarrierZoneName
· Dest = “05”
23. Event Report Acknowledge (ERA)
S6,F12
SEMI E88-1104
E
© SEMI 1999, 2004 37
STEP COMMENTS HOST SC COMMENTS
24.
S6,F11
Event Report Send (ERS)
CarrierTransferring
· CarrierID = “33333”
· CarrierLoc
· CarrierZoneName
25. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
26.
S6,F11
Event Report Send (ERS)
CraneActive
27. Event Report Acknowledge (ERA)
S6,F12
28. Carrier “11111” arrives at the
buffer port.
29.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID = “11111”
· CarrierLoc = “04”
· PortType = “BP”
· CarrierZoneName
30. Event Report Acknowledge (ERA)
S6,F12
S6,F11
Event Report Send (ERS)
ZoneCapacityChange
Event Report Acknowledge (ERA)
S6,F12
31. Carrier “11111” arrives at the
first vehicle loading port.
32.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID = “11111”
· CarrierLoc = “05”
· PortType = “LP”
· CarrierZoneName
33. Event Report Acknowledge (ERA)
S6,F12
34. Carrier “11111” can cycle
forward one more port so it
does.
35. Carrier “11111” arrives at the
vehicle loading “end” port
(“06”).
36.
S6,F11
Event Report Send (ERS)
TransferCompleted
· CommandID = “060658”
· ResultCode = 0
· CarrierID = “11111”
· CarrierLoc = “06”
· CarrierZoneName
37. Event Report Acknowledge (ERA)
S6,F12
38.
S6,F11
Event Report Send (ERS)
CarrierWaitOut
· CarrierID = “11111”
· CarrierLoc = “06”
· PortType = “LP”
· CarrierZoneName
39. Event Report Acknowledge (ERA)
S6,F12
40. The stocker sets down carrier
“33333” on the output port.
41.
S6,F11
Event Report Send (ERS)
CraneIdle
42. Event Report Acknowledge (ERA)
S6,F12